GB0023477D0 - Micro electro-mechanical systems - Google Patents

Micro electro-mechanical systems

Info

Publication number
GB0023477D0
GB0023477D0 GB0023477A GB0023477A GB0023477D0 GB 0023477 D0 GB0023477 D0 GB 0023477D0 GB 0023477 A GB0023477 A GB 0023477A GB 0023477 A GB0023477 A GB 0023477A GB 0023477 D0 GB0023477 D0 GB 0023477D0
Authority
GB
Grant status
Grant
Patent type
Prior art keywords
micro
electro
mechanical
systems
micro electro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0023477A
Other versions
GB2371119A (en )
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marconi Caswell Ltd
Original Assignee
Marconi Caswell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/001Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating based on interference in an adjustable optical cavity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/04Optical MEMS
    • B81B2201/047Optical MEMS not provided for in B81B2201/042 - B81B2201/045
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019Bonding or gluing multiple substrate layers
GB0023477A 2000-09-25 2000-09-25 Micro electro-mechanical systems Withdrawn GB0023477D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0023477A GB0023477D0 (en) 2000-09-25 2000-09-25 Micro electro-mechanical systems

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0023477A GB0023477D0 (en) 2000-09-25 2000-09-25 Micro electro-mechanical systems
PCT/GB2001/004271 WO2002024570A1 (en) 2000-09-25 2001-09-25 Micro electro-mechanical systems

Publications (2)

Publication Number Publication Date
GB0023477D0 true GB0023477D0 (en) 2000-11-08
GB2371119A true GB2371119A (en) 2002-07-17

Family

ID=9900084

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0023477A Withdrawn GB0023477D0 (en) 2000-09-25 2000-09-25 Micro electro-mechanical systems

Country Status (2)

Country Link
GB (1) GB0023477D0 (en)
WO (1) WO2002024570A1 (en)

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US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
KR20040103977A (en) * 2002-04-17 2004-12-09 (주)엠투엔 Micro piezoelectric actuator and method for fabricating same
US7781850B2 (en) * 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US7342709B2 (en) 2002-12-25 2008-03-11 Qualcomm Mems Technologies, Inc. Optical interference type of color display having optical diffusion layer between substrate and electrode
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7373026B2 (en) * 2004-09-27 2008-05-13 Idc, Llc MEMS device fabricated on a pre-patterned substrate
CN100501494C (en) 2004-09-27 2009-06-17 Idc公司 MEMS device fabricated on a pre-patterned substrate
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7710632B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Display device having an array of spatial light modulators with integrated color filters
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
JP5048939B2 (en) * 2005-11-01 2012-10-17 オリンパス株式会社 Etalon device and its assembly and adjustment method
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
FR2900400B1 (en) 2006-04-28 2008-11-07 Tronic S Microsystems Sa Method of collective manufacture of membranes and cavities of small volume and high precision
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
EP1943551A2 (en) 2006-10-06 2008-07-16 Qualcomm Mems Technologies, Inc. Light guide
KR101460351B1 (en) 2006-10-06 2014-11-10 퀄컴 엠이엠에스 테크놀로지스, 인크. Optical loss structure integrated in an illumination apparatus of a display
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
EP2435868A1 (en) 2009-05-29 2012-04-04 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US9250418B2 (en) 2009-09-18 2016-02-02 Sintef Fabry-perot interferometer with piezoelectric actuator contracting in radial direction on membrane
US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
WO2012003529A1 (en) * 2010-07-05 2012-01-12 Newsouth Innovations Pty Limited Piezo-electric based micro-electro-mechanical lens actuation system
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
CN104662473A (en) * 2012-03-07 2015-05-27 新加坡国立大学 A MEMS iris diaphragm for an optical system and method for adjusting a size of an aperture thereof
CN102928977B (en) * 2012-10-24 2015-08-12 无锡微奥科技有限公司 Mems method for manufacturing a bistable micro mirror and the optical switch structure

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5323656A (en) * 1992-05-12 1994-06-28 The Foxboro Company Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors
US5484073A (en) * 1994-03-28 1996-01-16 I/O Sensors, Inc. Method for fabricating suspension members for micromachined sensors
WO1999052006A3 (en) * 1998-04-08 1999-12-29 Etalon Inc Interferometric modulation of radiation
DE19757197A1 (en) * 1997-12-22 1999-06-24 Bosch Gmbh Robert Manufacturing method for micromechanical device, esp. for resonant oscillating mirror device
US5914804A (en) * 1998-01-28 1999-06-22 Lucent Technologies Inc Double-cavity micromechanical optical modulator with plural multilayer mirrors
US6014240A (en) * 1998-12-01 2000-01-11 Xerox Corporation Method and apparatus for an integrated laser beam scanner using a carrier substrate
US6836366B1 (en) * 2000-03-03 2004-12-28 Axsun Technologies, Inc. Integrated tunable fabry-perot filter and method of making same

Also Published As

Publication number Publication date Type
GB2371119A (en) 2002-07-17 application
WO2002024570A1 (en) 2002-03-28 application

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Legal Events

Date Code Title Description
COOA Change in applicant's name or ownership of the application
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)