AU6012500A - Microelectromechanical device with moving element - Google Patents
Microelectromechanical device with moving elementInfo
- Publication number
- AU6012500A AU6012500A AU60125/00A AU6012500A AU6012500A AU 6012500 A AU6012500 A AU 6012500A AU 60125/00 A AU60125/00 A AU 60125/00A AU 6012500 A AU6012500 A AU 6012500A AU 6012500 A AU6012500 A AU 6012500A
- Authority
- AU
- Australia
- Prior art keywords
- moving element
- microelectromechanical device
- microelectromechanical
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
- G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/051—Translation according to an axis parallel to the substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
- G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3572—Magnetic force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3576—Temperature or heat actuation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/3578—Piezoelectric force
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
- H04Q2011/0007—Construction
- H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
- H04Q2011/0007—Construction
- H04Q2011/0026—Construction using free space propagation (e.g. lenses, mirrors)
- H04Q2011/003—Construction using free space propagation (e.g. lenses, mirrors) using switches based on microelectro-mechanical systems [MEMS]
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
- H04Q2011/0052—Interconnection of switches
- H04Q2011/0056—Clos
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
- H04Q2011/0052—Interconnection of switches
- H04Q2011/0058—Crossbar; Matrix
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Computer Networks & Wireless Communication (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14462899P | 1999-07-20 | 1999-07-20 | |
US60144628 | 1999-07-20 | ||
US17049499P | 1999-12-13 | 1999-12-13 | |
US17049299P | 1999-12-13 | 1999-12-13 | |
US60170492 | 1999-12-13 | ||
US60170494 | 1999-12-13 | ||
PCT/IL2000/000431 WO2001006543A2 (en) | 1999-07-20 | 2000-07-20 | Microelectromechanical device with moving element |
Publications (1)
Publication Number | Publication Date |
---|---|
AU6012500A true AU6012500A (en) | 2001-02-05 |
Family
ID=27386137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU60125/00A Abandoned AU6012500A (en) | 1999-07-20 | 2000-07-20 | Microelectromechanical device with moving element |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1218790A2 (en) |
JP (1) | JP2003523833A (en) |
AU (1) | AU6012500A (en) |
CA (1) | CA2379537A1 (en) |
IL (1) | IL147475A0 (en) |
WO (1) | WO2001006543A2 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6571029B1 (en) | 2001-02-13 | 2003-05-27 | Omm, Inc. | Method for determining and implementing electrical damping coefficients |
US6556739B1 (en) | 2001-02-13 | 2003-04-29 | Omm, Inc. | Electronic damping of MEMS devices using a look-up table |
US6590697B2 (en) * | 2001-10-04 | 2003-07-08 | Megasense | VOA with a movable focusing mirror |
EP1564182B1 (en) | 2002-11-19 | 2008-05-07 | Baolab Microsystems S.L. | Miniature relay and corresponding uses thereof and process for actuating the relay |
US7190245B2 (en) | 2003-04-29 | 2007-03-13 | Medtronic, Inc. | Multi-stable micro electromechanical switches and methods of fabricating same |
US7388459B2 (en) * | 2003-10-28 | 2008-06-17 | Medtronic, Inc. | MEMs switching circuit and method for an implantable medical device |
JP4634057B2 (en) * | 2004-03-17 | 2011-02-16 | アンリツ株式会社 | Optical cavity |
CA2564473A1 (en) | 2004-05-19 | 2005-11-24 | Baolab Microsystems S.L. | Regulator circuit and corresponding uses |
JP6353249B2 (en) * | 2014-03-20 | 2018-07-04 | 北陸電気工業株式会社 | Display element and display device |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5914801A (en) * | 1996-09-27 | 1999-06-22 | Mcnc | Microelectromechanical devices including rotating plates and related methods |
-
2000
- 2000-07-20 AU AU60125/00A patent/AU6012500A/en not_active Abandoned
- 2000-07-20 IL IL14747500A patent/IL147475A0/en unknown
- 2000-07-20 EP EP00946255A patent/EP1218790A2/en not_active Withdrawn
- 2000-07-20 JP JP2001511714A patent/JP2003523833A/en active Pending
- 2000-07-20 CA CA002379537A patent/CA2379537A1/en not_active Abandoned
- 2000-07-20 WO PCT/IL2000/000431 patent/WO2001006543A2/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JP2003523833A (en) | 2003-08-12 |
WO2001006543A3 (en) | 2001-05-25 |
CA2379537A1 (en) | 2001-01-25 |
IL147475A0 (en) | 2002-08-14 |
WO2001006543A2 (en) | 2001-01-25 |
EP1218790A2 (en) | 2002-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
AU5684899A (en) | Micro sensor device | |
AU5842000A (en) | Interventive-diagnostic device | |
EP1072453A3 (en) | Refrigeration-cycle device | |
AU2002230535A1 (en) | Mems device with integral packaging | |
AU2001228310A1 (en) | Rear-projecting device | |
AU3569700A (en) | Fluidic devices | |
AU6168300A (en) | Sensing device | |
AU2001278597A1 (en) | Sensor device | |
AU5784300A (en) | Sheet-adhesion device | |
AU2000251797A1 (en) | Wiping device | |
AU5878900A (en) | Microfluidic device interface | |
EP1180823A3 (en) | Cable-connection or cable-joint device | |
AU6012500A (en) | Microelectromechanical device with moving element | |
AU1288901A (en) | Sensor device | |
AU2833500A (en) | Sensor element | |
AU2993600A (en) | Patterned silicon-on-insulator devices | |
AU6842700A (en) | Shuttle-cock shaped device | |
AU2001241311A1 (en) | Cap-signaling device | |
AU2001293823A1 (en) | Sensor device | |
AU2001254745A1 (en) | Pellet-freezing device | |
AU5120000A (en) | Structural device | |
AU7421200A (en) | Device | |
AU2001250678A1 (en) | Holder-grasping device | |
AU2001238543A1 (en) | Antiextrusion device | |
AU1429201A (en) | The curtain attaching device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |