DE60022768D1 - Polarisationsinterferometer mit verminderten Geistern - Google Patents

Polarisationsinterferometer mit verminderten Geistern

Info

Publication number
DE60022768D1
DE60022768D1 DE60022768T DE60022768T DE60022768D1 DE 60022768 D1 DE60022768 D1 DE 60022768D1 DE 60022768 T DE60022768 T DE 60022768T DE 60022768 T DE60022768 T DE 60022768T DE 60022768 D1 DE60022768 D1 DE 60022768D1
Authority
DE
Germany
Prior art keywords
spirits
diminished
polarization interferometer
interferometer
polarization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60022768T
Other languages
English (en)
Other versions
DE60022768T2 (de
Inventor
Groot J De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zygo Corp
Original Assignee
Zygo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corp filed Critical Zygo Corp
Application granted granted Critical
Publication of DE60022768D1 publication Critical patent/DE60022768D1/de
Publication of DE60022768T2 publication Critical patent/DE60022768T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02059—Reducing effect of parasitic reflections, e.g. cyclic errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
DE60022768T 1999-08-27 2000-07-25 Polarisationsinterferometer mit verminderten Geistern Expired - Lifetime DE60022768T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US384609 1999-08-27
US09/384,609 US6163379A (en) 1999-08-27 1999-08-27 Interferometer with tilted waveplates for reducing ghost reflections
PCT/US2000/020168 WO2001016557A1 (en) 1999-08-27 2000-07-25 Interferometer having reduced ghost beam effects

Publications (2)

Publication Number Publication Date
DE60022768D1 true DE60022768D1 (de) 2005-10-27
DE60022768T2 DE60022768T2 (de) 2006-06-29

Family

ID=23518002

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60022768T Expired - Lifetime DE60022768T2 (de) 1999-08-27 2000-07-25 Polarisationsinterferometer mit verminderten Geistern

Country Status (6)

Country Link
US (1) US6163379A (de)
EP (1) EP1208350B1 (de)
JP (1) JP4681179B2 (de)
DE (1) DE60022768T2 (de)
TW (1) TW461958B (de)
WO (1) WO2001016557A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6876451B1 (en) 2000-08-25 2005-04-05 Zygo Corporation Monolithic multiaxis interferometer
JP2002333311A (ja) * 2001-05-10 2002-11-22 Matsushita Electric Ind Co Ltd 形状測定装置及び方法
DE10130902A1 (de) * 2001-06-27 2003-01-16 Zeiss Carl Interferometersystem, Verfahren zum Aufnehmen eines Interferogramms und Verfahren zum Bereitstellen und Herstellen eines Objekts mit einer Soll-Oberfläche
US6778280B2 (en) 2001-07-06 2004-08-17 Zygo Corporation Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
US6819431B2 (en) * 2001-07-06 2004-11-16 Zygo Corporation Polymer retarder
US6836335B2 (en) * 2001-07-06 2004-12-28 Zygo Corporation Multi-axis interferometer
EP1419360A4 (de) * 2001-08-23 2004-10-27 Zygo Corp Geneigtes interferometer
US6947621B2 (en) * 2002-01-22 2005-09-20 Lockheed Martin Corporation Robust heterodyne interferometer optical gauge
GB0222962D0 (en) * 2002-10-04 2002-11-13 Renishaw Plc Laser system
US7230754B2 (en) * 2003-08-15 2007-06-12 Meade Instruments Corp. Neutral white-light filter device
US7317539B2 (en) * 2004-08-23 2008-01-08 Asml Netherlands B.V. Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method
JP4741329B2 (ja) * 2005-09-26 2011-08-03 株式会社フジクラ 波長分散測定方法、波長分散測定装置及び波長分散補正システム
US7561278B2 (en) * 2005-10-18 2009-07-14 Zygo Corporation Interferometer using integrated retarders to reduce physical volume
RU2417391C2 (ru) 2006-08-24 2011-04-27 Сименс Энерджи Энд Отомейшн, Инк. Устройства, системы и способы конфигурирования программируемого логического контроллера
JP5477774B2 (ja) * 2009-03-30 2014-04-23 株式会社ニコン 光学ユニット、干渉装置、ステージ装置、パターン形成装置およびデバイス製造方法
US8526005B1 (en) 2010-01-21 2013-09-03 Lockheed Martin Corporation System and method for calibrating optical measurement systems that utilize polarization diversity
US8885172B2 (en) 2011-02-01 2014-11-11 Zygo Corporation Interferometric heterodyne optical encoder system
DE102012111693A1 (de) * 2012-11-30 2014-06-05 Gd Optical Competence Gmbh Strahlformungseinrichtung
US10215986B2 (en) 2016-05-16 2019-02-26 Microsoft Technology Licensing, Llc Wedges for light transformation
US20190113329A1 (en) 2017-10-12 2019-04-18 Keysight Technologies, Inc. Systems and methods for cyclic error correction in a heterodyne interferometer
KR102436448B1 (ko) 2017-12-13 2022-08-24 에이에스엠엘 홀딩 엔.브이. 빔 분할 프리즘 시스템
US11402472B2 (en) 2019-04-16 2022-08-02 Argo AI, LLC Polarization sensitive LiDAR system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3450476A (en) * 1966-02-03 1969-06-17 Hewlett Packard Co Apparatus for measuring the index of refraction of a fluid medium
US4189233A (en) * 1977-03-07 1980-02-19 Westinghouse Electric Corp. Passive optical range simulator device
US4784490A (en) * 1987-03-02 1988-11-15 Hewlett-Packard Company High thermal stability plane mirror interferometer
US4865450A (en) * 1988-06-23 1989-09-12 United States Of America As Represented By Secretary Of The Air Force Dual photoelastic modulator heterodyne interferometer
GB8920364D0 (en) * 1989-09-08 1989-10-25 Downs Michael J Optical measuring instruments
US5444532A (en) * 1992-02-25 1995-08-22 Nikon Corporation Interferometer apparatus for detecting relative movement between reflecting members
US5398112A (en) * 1993-10-04 1995-03-14 Wyko Corporation Method for testing an optical window with a small wedge angle
JPH10281718A (ja) * 1997-02-06 1998-10-23 Nikon Corp 偏光光学素子及び偏光方位調整方法、及びそれを用いた光波干渉測定装置

Also Published As

Publication number Publication date
TW461958B (en) 2001-11-01
JP2003517145A (ja) 2003-05-20
DE60022768T2 (de) 2006-06-29
EP1208350B1 (de) 2005-09-21
US6163379A (en) 2000-12-19
EP1208350A1 (de) 2002-05-29
EP1208350A4 (de) 2002-10-30
WO2001016557A1 (en) 2001-03-08
JP4681179B2 (ja) 2011-05-11

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