DE60137845D1 - Rauscharmes spektroskopisches ellipsometer - Google Patents

Rauscharmes spektroskopisches ellipsometer

Info

Publication number
DE60137845D1
DE60137845D1 DE60137845T DE60137845T DE60137845D1 DE 60137845 D1 DE60137845 D1 DE 60137845D1 DE 60137845 T DE60137845 T DE 60137845T DE 60137845 T DE60137845 T DE 60137845T DE 60137845 D1 DE60137845 D1 DE 60137845D1
Authority
DE
Germany
Prior art keywords
noise
spectroscopic ellipsometer
ellipsometer
spectroscopic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60137845T
Other languages
English (en)
Inventor
Frederic Ferrieu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zarbana Digital Fund LLC
Original Assignee
Fahrenheit Thermoscope LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fahrenheit Thermoscope LLC filed Critical Fahrenheit Thermoscope LLC
Application granted granted Critical
Publication of DE60137845D1 publication Critical patent/DE60137845D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE60137845T 2000-06-09 2001-06-08 Rauscharmes spektroskopisches ellipsometer Expired - Lifetime DE60137845D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0007425A FR2810108B1 (fr) 2000-06-09 2000-06-09 Ellipsometre spectroscopique a faible bruit
PCT/FR2001/001781 WO2001094898A1 (fr) 2000-06-09 2001-06-08 Ellipsometre spectroscopique a faible bruit

Publications (1)

Publication Number Publication Date
DE60137845D1 true DE60137845D1 (de) 2009-04-16

Family

ID=8851152

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60137845T Expired - Lifetime DE60137845D1 (de) 2000-06-09 2001-06-08 Rauscharmes spektroskopisches ellipsometer

Country Status (6)

Country Link
US (2) US6791684B2 (de)
EP (1) EP1290417B1 (de)
JP (1) JP2003536064A (de)
DE (1) DE60137845D1 (de)
FR (1) FR2810108B1 (de)
WO (1) WO2001094898A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE518122T1 (de) * 2004-05-14 2011-08-15 Kla Tencor Tech Corp Systemn zum messen oder analysieren von proben mit vuv-licht
US20060215076A1 (en) * 2005-03-22 2006-09-28 Karim John H Selective light transmitting and receiving system and method
US8994943B2 (en) * 2012-11-30 2015-03-31 Infineon Technologies Ag Selectivity by polarization
US9903806B2 (en) * 2013-12-17 2018-02-27 Nanometrics Incorporated Focusing system with filter for open or closed loop control

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4284351A (en) * 1978-06-12 1981-08-18 National Research Development Corporation Processing of digital signals
JPH0622110B2 (ja) 1984-02-14 1994-03-23 株式会社日立製作所 放電灯
JPS6250641A (ja) * 1985-08-30 1987-03-05 Hitachi Ltd 吸光光度計を備えた分析装置
US5329357A (en) * 1986-03-06 1994-07-12 Sopra-Societe De Production Et De Recherches Appliquees Spectroscopic ellipsometry apparatus including an optical fiber
FR2595471B1 (fr) 1986-03-06 1988-06-10 Production Rech Appliquees Dispositif d'ellipsometrie spectroscopique a fibres optiques
GB8628397D0 (en) 1986-11-27 1986-12-31 Secr Defence Digital correlator/structurator
JPS63308543A (ja) 1987-06-10 1988-12-15 Fuji Electric Co Ltd 散乱光測光装置
JPH0772700B2 (ja) 1991-07-05 1995-08-02 日本分光株式会社 位相差制御装置及び方法
US5313044A (en) * 1992-04-28 1994-05-17 Duke University Method and apparatus for real-time wafer temperature and thin film growth measurement and control in a lamp-heated rapid thermal processor
US5956144A (en) * 1992-09-03 1999-09-21 Micro Research, Inc. Method and apparatus for use of polarized light vectors in identifying and evaluating constituent compounds in a specimen
US5657126A (en) * 1992-12-21 1997-08-12 The Board Of Regents Of The University Of Nebraska Ellipsometer
US5386121A (en) * 1993-12-23 1995-01-31 International Business Machines Corporation In situ, non-destructive CVD surface monitor
JP2796494B2 (ja) 1994-02-28 1998-09-10 富山県 光学活性物質分析装置
JPH08166345A (ja) 1994-12-16 1996-06-25 Shiroki Corp 液体濃度測定装置
JPH10501072A (ja) 1995-03-20 1998-01-27 カンサス ステイト ユニバーシティ リサーチ フアウンデーション エリプソメトリー顕微鏡
US5615673A (en) 1995-03-27 1997-04-01 Massachusetts Institute Of Technology Apparatus and methods of raman spectroscopy for analysis of blood gases and analytes
JP3097492B2 (ja) 1995-04-17 2000-10-10 住友電気工業株式会社 レーザ光源とその製作方法
FR2737572B1 (fr) * 1995-08-03 1997-10-24 Centre Nat Rech Scient Ellipsometre multi-detecteurs et procede de mesure ellipsometrique multi-detecteurs
JPH0979905A (ja) * 1995-09-11 1997-03-28 Shimadzu Corp 発光分光分析装置
DE29521772U1 (de) * 1995-12-20 1998-08-13 Heraeus Noblelight Gmbh, 63450 Hanau Elektrodenlose Entladungslampe
JPH10281992A (ja) 1997-04-02 1998-10-23 Nikon Corp 光学材料の成分濃度分布測定方法および光透過率分布測定方法
DE19721045A1 (de) * 1997-05-09 1998-11-12 Sentech Instr Gmbh Verfahren zur Bestimmung von Brechungsindices und von Schichtdicken transparenter und absorbierender Schichten mittels der Spektroellipsometrie
US6134011A (en) 1997-09-22 2000-10-17 Hdi Instrumentation Optical measurement system using polarized light
US6485703B1 (en) * 1998-07-31 2002-11-26 The Texas A&M University System Compositions and methods for analyte detection
US6125687A (en) * 1998-08-20 2000-10-03 International Business Machines Corporation Apparatus for measuring outgassing of volatile materials from an object
US6535286B1 (en) * 2000-03-21 2003-03-18 J.A. Woollam Co. Inc. Positionable multiple detector system for spectrophotomer, ellipsometer, polarimeter and systems, and methodology of use
DE10021378A1 (de) 2000-05-02 2001-11-08 Leica Microsystems Optische Messanordnung mit einem Ellipsometer
US6950196B2 (en) * 2000-09-20 2005-09-27 Kla-Tencor Technologies Corp. Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen
US6515744B2 (en) 2001-02-08 2003-02-04 Therma-Wave, Inc. Small spot ellipsometer

Also Published As

Publication number Publication date
FR2810108A1 (fr) 2001-12-14
WO2001094898A1 (fr) 2001-12-13
US20020180385A1 (en) 2002-12-05
JP2003536064A (ja) 2003-12-02
EP1290417B1 (de) 2009-03-04
US6791684B2 (en) 2004-09-14
EP1290417A1 (de) 2003-03-12
FR2810108B1 (fr) 2004-04-02
USRE44007E1 (en) 2013-02-19

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Legal Events

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