USRE44007E1 - Low-noise spectroscopic ellipsometer - Google Patents
Low-noise spectroscopic ellipsometer Download PDFInfo
- Publication number
- USRE44007E1 USRE44007E1 US11/520,061 US52006101A USRE44007E US RE44007 E1 USRE44007 E1 US RE44007E1 US 52006101 A US52006101 A US 52006101A US RE44007 E USRE44007 E US RE44007E
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- US
- United States
- Prior art keywords
- ellipsometer
- recited
- detection assembly
- light
- monochromator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime, expires
Links
- 238000001514 detection method Methods 0.000 claims abstract description 29
- 238000001816 cooling Methods 0.000 claims abstract description 19
- 230000010287 polarization Effects 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 18
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 7
- 238000004458 analytical method Methods 0.000 claims description 7
- 229910052805 deuterium Inorganic materials 0.000 claims description 7
- 238000005070 sampling Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 229910052736 halogen Inorganic materials 0.000 claims description 4
- 150000002367 halogens Chemical class 0.000 claims description 4
- 239000000523 sample Substances 0.000 claims 9
- 230000005495 cold plasma Effects 0.000 claims 2
- 238000005259 measurement Methods 0.000 abstract description 13
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 5
- 229910052724 xenon Inorganic materials 0.000 description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 241000287107 Passer Species 0.000 description 1
- 230000005679 Peltier effect Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012625 in-situ measurement Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Definitions
- FIG. 1 The principles of a known state of the art ellipsometer are shown in FIG. 1 .
- Such an ellipsometer conventionally comprises a light source 1 , a polarizer 2 , an analyzer 3 , and a detector 4 associated with a monochromator 5 .
- One of the two elements constituted by the polarizer 2 and the analyzer 3 is a rotary element.
- the output from the detector 4 is connected to processor means 6 which perform Fourier analysis on the modulated signal as measured by the detector 4 in order to determine information relating to the surface state of the sample E.
- the monochromator 5 By means of the monochromator 5 , it is possible to perform measurements at different wavelengths, thereby characterizing the optical properties of the material.
- the visible spectroscopic ellipsometers available on the market generally operate in a spectral range of 1 micrometer ( ⁇ m) to 230 nanometers (nm), using a xenon arc source (selected for high radiant flux density or “irradiance”).
- ellipsometers have been proposed that are capable of operating over a broader spectral range than the above-mentioned ellipsometers and that include an additional source, such as a deuterium (D 2 ) source that provides less of a point source, emitting in the range 130 nm to 700 nm at a power of 30 watts (W) to a few hundreds of watts or more.
- D 2 deuterium
- W watts
- the detectors that are used are generally detectors of the Si or Ge photodiode type or photomultipliers (generally multi-alkali photomultipliers), operating at ambient temperature.
- the processor means of most ellipsometers implement a simplified photon counting method, which method is known as the “Hadamard method”. That method consists in counting photons with a signal that is amplitude sampled over a very limited number of channels: eight counters or channels, for each period of rotation of the rotary element of the ellipsometer (a configuration with a rotary polarizer or analyzer (modulated polarization) and/or a rotating plate (phase modulation)).
- a first limitation is associated directly with fluctuations in the source, i.e. with its lack of stability, with this constraint being known as shot noise limitation (SNL).
- SNL shot noise limitation
- DNL detector noise limitation
- the Hadamard sums (as determined over quarter periods of the modulated signal) are calculated by taking account of a previously measured offset which corresponds to the leakage noise and to the DNL.
- the amplitude of the spectrum component at 2 ⁇ in the signal is of the same order of magnitude as the amplitude of the noise (with this being true more particularly in the ultraviolet where counts of only 100 to 1000 counts per second (cps) are measured).
- the signal components are thus “buried” in the noise level which itself corresponds to a superposition of the spectrum density of the source noise, shot noise when using a xenon arc, ambient light, and noise from the detector and its associated electronics.
- An object of the invention is to mitigate those drawbacks.
- the invention provides an ellipsometer structure in which noise is minimized.
- the invention proposes a spectroscopic ellipsometer comprising a light source emitting a light beam, a polarizer placed on the path of the light beam emitted by the light is source, a sample support receiving the light beam output from the polarizer, a polarization analyzer for passing the beam reflected by the sample to be analyzed, a detection assembly which receives the beam from the analyzer and which comprises a monochromator and a photodetector, and signal processor means for processing the signal output from said detection assembly, and including counting electronics.
- This ellipsometer presents the characteristic of comprising cooling means for keeping the detection assembly at a temperature lower than ambient temperature, in particular at a temperature of about ⁇ 15° C., or lower.
- its source is a deuterium lamp preferably having a power of about 30 watts.
- the counting electronics is suitable for performing amplitude sampling over a number of channels lying in the range 8 (Hadamard equivalent) up to 1024 (filtered Fourier), and particularly preferably about 1000 or more, in particular a number of channels lying in the range 1024 to 8192 (depending on the type of encoder).
- the processing means implement Fourier analysis on the signals sampled in this way.
- the proposed ellipsometer enables noise to be minimized (to improve its precision): i) with total protection from ambient light; ii) no polluting environment (mechanical vibration and/or sources of electromagnetic noise); and a detector operating by counting photons in a minimum intrinsic noise level which is obtained in this case by cooling ( 12 ) to keep the detection assembly at a temperature lower than ambient temperature.
- a detector operating by counting photons in a minimum intrinsic noise level which is obtained in this case by cooling ( 12 ) to keep the detection assembly at a temperature lower than ambient temperature.
- FIG. 1 is a diagram illustrating the principles of a spectroscopic ellipsometer known in the state of the art
- FIG. 2 is a block diagram of an ellipsometer constituting an embodiment of the invention
- FIGS. 3a and 3b are graphs on which measurements of the parameters ⁇ and ⁇ are plotted as a function of wavelength for an ellipsometer as shown in FIG. 2 and for a standard ellipsometer;
- FIG. 4 is a graph showing direct trace measurements obtained by an ellipsometer as shown in FIG. 2 and by a standard ellipsometer, the measurements being plotted as a function of wavelength.
- a spectroscopic ellipsometer constituting a possible embodiment of the invention presents the following characteristics.
- Its source 1 is a low noise source, i.e. a source whose frequency dispersion is much less than that of a xenon arc lamp.
- Such a source is advantageously a deuterium D 2 lamp.
- Deuterium D 2 lamps are lamps having particularly low noise. They are much more stable than xenon arc lamps (stability in a ratio of 20), and they also provide much better stability than other types of lamp in the ultraviolet and in a portion of the visible.
- halogen lamps towards the infrared
- plasma discharge lamps visible and UV
- plasma sources are particularly suitable, even when they have emission spectrum lines (non-continuous spectrum).
- Peltier effect cooling system ( ⁇ 15° C.).
- noise is reduced by at one least decade (from 200 cps to 10 cps, for example).
- the photomultiplier operates in a photon counting mode and ideally it is linear (no non-linearity associated with avalanche overlap effects (saturation in analog mode)).
- This limit of 160 nm can also be crossed by using inert gas conditions (nitrogen) with a PMT (R7639 from Hamamatsu) and a corresponding monochromator.
- inert gas conditions nitrogen
- PMT Raster t-T
- a corresponding monochromator In the extreme ultraviolet (120 nm to 160 nm), it is advantageous to cool the base of the photomultiplier 5 , or to perform N 2 sweeping in the photomultiplier enclosure cooled by a cooler element of the Peltier heat exchanger type, thus avoiding the need for a MgF 2 window.
- the proposed spectroscopic ellipsometer counts over a large number of channels: up to more than 1024 channels, which combined with Fourier analysis oversamples the signal and provides effective filtering of high frequency noise components, i.e. of intrinsic noise from the sources and the detector and the electronics.
- This counting technique turns out to be much better than that which is possible using the Hadamard method. It can be implemented very simply by using commercially available electronics. The oversampling it provides contributes to attenuating noise at all of the high frequencies associated with lamp noise.
- This ellipsometer is of the type having a rotary polarizer.
- It operates in the range 180 nm to 750 nm. It can be used in a vacuum or in a controlled atmosphere so as to extend its operating range to the range 130 nm to 720 nm.
- the source 1 is a deuterium lamp (D 2 ) having power of 30 W and a point source diameter of 0.5 millimeters (mm) (Oriel 63163 lamp or Hamamatsu L7295 or L7296 lamp).
- the light beam is transferred from the source 1 by means of a 600 ⁇ m single strand fused silica fiber 7 to the rotary polarizer 2 .
- One of the functions of the fiber is specifically to eliminate the residual birefringence of the source 1 .
- Coupling with the rotary polarizer 2 is performed via a converging element 8 of fused silica, selected for its low residual birefringence and its transparency in the ultraviolet.
- the sample E for analysis is placed at the outlet from the polarizer 2 on a support 9 whose orientation can be adjusted.
- the beam reflected by the sample is applied to the analyzer 3 .
- Both the polarizer 2 and the analyzer 3 are made of MgF 2 (for example they are constituted by analyzers and polarizers from Fichou/Optique which certifies 2.5° of deviation at 250 nm and a passband to 10 electron volts (eV)). This choice of material makes it possible to obtain greater transparency in the ultraviolet.
- the polarizer 2 is rotated at a frequency of about 10 Hz (with the criteria for selection being associated with the environment, mains frequency or vibration frequency) and is controlled by a mechanical assembly of the stepper type (microstep).
- the beam After being reflected on the sample and passing through the analyzer 3 , the beam is refocused by a set of mirrors 11 and is applied to the inlet of the monochromator 5 which is a dual monochromator having an Oriel 77250 type 1 ⁇ 8 M grating blazed at 250 nm with 1200 lines (180 nm to 500 nm in first order and an intermediate 0.6 mm slot; its resolution at 500 nm is 4 nm).
- Gratings blazed at 200 nm but with 600 lines per millimeter (mm) can be used.
- the system While performing a measurement, the system automatically incorporates two filters in succession so as to eliminate higher diffraction orders from the gratings of the monochromator. Control is performed by means of an Oriel filter passer and an Ni DAQ (TTL) interface from National Instrument.
- TTL Ni DAQ
- the output from the monochromator 5 is applied to the detector 4 which serves to count photons.
- the detector 4 is of the tube type and it is sold by Hamatsu under the reference R2949 or R7639.
- the detector 4 is placed in a cooler 12 of the C-659S type which maintains it at a temperature of ⁇ 15° C.
- the counting electronics includes a discriminator 13 connected to the detector 4 .
- the discriminator is of the type sold by Hamatsu under the reference C 3866 and it has a linear dynamic range of 10 7 .
- the detector 4 and the discriminator 13 are selected for their low dark current characteristics (159 cps at 25° C. and dropping to less than 10 cps when cooled for the R2949 and to less than 1 cps for the R7639 (which has quantum efficiency of 44% at 160 nm)). This can be implemented using water cooling or “cryogenic” nitrogen flow cooling with external cooling being provided by Peltier cooling elements and an external heat exchanger.
- the detector and the discriminator are also selected for their sensitivity in the blue of 8.3 ⁇ A/1 m with gain of 10 7 .
- the photon counting electronics is linear for 10 7 photons.
- the TTL output from the discriminator 13 is analyzed by means of a multiscale count card 14 (MCS II Nuclear Instrument or FMS Canberra Electronics card CM 7882) capable of analyzing 8192 count channels, with two simultaneous inputs and a sampling time of 2 ⁇ s.
- MCS II Nuclear Instrument or FMS Canberra Electronics card CM 7882 capable of analyzing 8192 count channels, with two simultaneous inputs and a sampling time of 2 ⁇ s.
- the card 14 is controlled by a computer 15 operating in a Windows NT server environment with object C++ programming coupled with commercial active X components, in this case the Works++ components from National Instruments.
- FIGS. 3a and 3b show measurements of ⁇ and ⁇ obtained over a wavelength range of 1 nanometer (around 250 nm) respectively when using a standard xenon lamp ellipsometer, photomultiplier at ambient temperature and Hadamart detection, and when using an ellipsometer as described above.
- the improvement is also clearly visible.
- the rotary polarizer system and the analyzer are MgF 2 lumps mounted in a vacuum on stepper micromotors (vacuum technology) having a hollow shaft (in which the MgF 2 lump is inserted) and the optical encoder which can thus be positioned even inside a casing or a cooling and measurement chamber of a cluster tool type reactor.
- the source and analysis inputs are then compact blocks. This makes it possible to implement two heads (analyzer and polarizer being equivalent).
- An estimate of the physical size that can be achieved corresponds to a cylinder having a diameter of about 40 mm and a length of 60 mm to 70 mm.
- Windows which are sources of birefringence and of absorption are thus eliminated since only the optical fibers are connected to the casing of the reactor. It has been shown that such a system can operate in situ for photons having wavelengths in the spectrum range 160 nm to 170 nm.
Abstract
Description
Claims (31)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/520,061 USRE44007E1 (en) | 2000-06-09 | 2001-06-08 | Low-noise spectroscopic ellipsometer |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0007425 | 2000-06-09 | ||
FR0007425A FR2810108B1 (en) | 2000-06-09 | 2000-06-09 | LOW NOISE SPECTROSCOPIC ELLIPSOMETER |
US10/168,041 US6791684B2 (en) | 2000-06-09 | 2001-06-08 | Low-noise spectroscopic ellipsometer |
US11/520,061 USRE44007E1 (en) | 2000-06-09 | 2001-06-08 | Low-noise spectroscopic ellipsometer |
PCT/FR2001/001781 WO2001094898A1 (en) | 2000-06-09 | 2001-06-08 | Low-noise spectroscopic ellipsometer |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/168,041 Reissue US6791684B2 (en) | 2000-06-09 | 2001-06-08 | Low-noise spectroscopic ellipsometer |
Publications (1)
Publication Number | Publication Date |
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USRE44007E1 true USRE44007E1 (en) | 2013-02-19 |
Family
ID=8851152
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/168,041 Ceased US6791684B2 (en) | 2000-06-09 | 2001-06-08 | Low-noise spectroscopic ellipsometer |
US11/520,061 Expired - Lifetime USRE44007E1 (en) | 2000-06-09 | 2001-06-08 | Low-noise spectroscopic ellipsometer |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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US10/168,041 Ceased US6791684B2 (en) | 2000-06-09 | 2001-06-08 | Low-noise spectroscopic ellipsometer |
Country Status (6)
Country | Link |
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US (2) | US6791684B2 (en) |
EP (1) | EP1290417B1 (en) |
JP (1) | JP2003536064A (en) |
DE (1) | DE60137845D1 (en) |
FR (1) | FR2810108B1 (en) |
WO (1) | WO2001094898A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8994943B2 (en) * | 2012-11-30 | 2015-03-31 | Infineon Technologies Ag | Selectivity by polarization |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005114148A2 (en) * | 2004-05-14 | 2005-12-01 | Kla-Tencor Technologies Corp. | Systems and methods for measurement or analysis of a specimen |
US20060215076A1 (en) * | 2005-03-22 | 2006-09-28 | Karim John H | Selective light transmitting and receiving system and method |
US9903806B2 (en) * | 2013-12-17 | 2018-02-27 | Nanometrics Incorporated | Focusing system with filter for open or closed loop control |
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- 2000-06-09 FR FR0007425A patent/FR2810108B1/en not_active Expired - Fee Related
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2001
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- 2001-06-08 WO PCT/FR2001/001781 patent/WO2001094898A1/en active Application Filing
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- 2001-06-08 US US11/520,061 patent/USRE44007E1/en not_active Expired - Lifetime
- 2001-06-08 DE DE60137845T patent/DE60137845D1/en not_active Expired - Lifetime
- 2001-06-08 EP EP01945381A patent/EP1290417B1/en not_active Expired - Lifetime
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Cited By (1)
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US8994943B2 (en) * | 2012-11-30 | 2015-03-31 | Infineon Technologies Ag | Selectivity by polarization |
Also Published As
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JP2003536064A (en) | 2003-12-02 |
US20020180385A1 (en) | 2002-12-05 |
FR2810108A1 (en) | 2001-12-14 |
DE60137845D1 (en) | 2009-04-16 |
EP1290417B1 (en) | 2009-03-04 |
EP1290417A1 (en) | 2003-03-12 |
FR2810108B1 (en) | 2004-04-02 |
WO2001094898A1 (en) | 2001-12-13 |
US6791684B2 (en) | 2004-09-14 |
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