JPH0979905A - Emission spectrochemical analysis device - Google Patents

Emission spectrochemical analysis device

Info

Publication number
JPH0979905A
JPH0979905A JP23247395A JP23247395A JPH0979905A JP H0979905 A JPH0979905 A JP H0979905A JP 23247395 A JP23247395 A JP 23247395A JP 23247395 A JP23247395 A JP 23247395A JP H0979905 A JPH0979905 A JP H0979905A
Authority
JP
Japan
Prior art keywords
photomultiplier tube
tube
housing
cathode
cooling plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23247395A
Other languages
Japanese (ja)
Inventor
Yuichiro Ikeda
雄一郎 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP23247395A priority Critical patent/JPH0979905A/en
Publication of JPH0979905A publication Critical patent/JPH0979905A/en
Pending legal-status Critical Current

Links

Landscapes

  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

PROBLEM TO BE SOLVED: To maintain the lower sample light detecting limit of an emission spectrochemical analysis device at a low level by effectively radiating the heat of the photomutiplier tube of the detecting section of the analysis device so that the tube can be cooled effectively without increasing the size of the detecting section. SOLUTION: A cathode cooling plate 11a which is thermally connected to the cathode of a photomultiplier tube 11 is fitted to the tube 11 and the plate 11a is thermally connected to part of an enclosure 13 through a Peltier effect element 15 so that the tube 11 can be forcibly cooled by the element 15 which radiates heat from the tube 11 to the outside through the enclosure 13.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、発光分光分析装置
に係り、詳しくは、分光された試料光を受光する検出部
を冷却する構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an emission spectroscopic analysis device, and more particularly to a structure for cooling a detection unit that receives a spectroscopic sample light.

【0002】[0002]

【従来の技術】発光分光分析装置は、図5に示すよう
に、試料を発光させる発光部1と、この発光部1からの
試料光を分光する分光部2と、分光部2で分光された試
料光を受光する検出部3とを備えている。
2. Description of the Related Art As shown in FIG. 5, an emission spectroscopic analyzer includes a light emitting section 1 for emitting light from a sample, a spectroscopic section 2 for separating the sample light from the light emitting section 1, and a spectroscopic section 2. And a detector 3 for receiving the sample light.

【0003】発光部1では、例えばプラズマトーチ4に
より試料をプラズマ化することにより、試料光を発生す
る。分光部2では、ミラー5や回折格子6により、発光
部1からの試料光を分光する。そして、検出部3は通
常、サイドオン型の光電子増倍管7からなるもので、こ
の光電子増倍管7は、図6に示すように、銅のような熱
良導性金属の筐体8内に収容されている。なお、符号9
は光電子増倍管7のソケットで、筐体8に取り付けられ
ている。
In the light emitting section 1, the sample light is generated by, for example, converting the sample into plasma by the plasma torch 4. The spectroscopic unit 2 disperses the sample light from the light emitting unit 1 by the mirror 5 and the diffraction grating 6. The detector 3 is usually composed of a side-on type photomultiplier tube 7, and this photomultiplier tube 7 is, as shown in FIG. 6, a housing 8 made of a heat conductive metal such as copper. It is housed inside. Note that reference numeral 9
Is a socket of the photomultiplier tube 7 and is attached to the housing 8.

【0004】[0004]

【発明が解決しようとする課題】光電子増倍管7は、温
度が上昇すると、暗電流が増加し、光の検出下限が高く
なるので、低温に保つ必要がある。発光分光分析装置の
検出部3では、光電子増倍管7が、上記のように、銅の
筐体8内に収容されており、発生した熱は筐体8を通じ
て外部に放熱されるようになっているのであるが、単に
光電子増倍管7を銅の筐体8内にセットしただけでは、
放熱が充分に行われない嫌いがあり、使用時間が長くな
ると、光電子増倍管7、特にカソード電極の温度が上昇
して、暗電流が増加し、発光分光分析装置の検出部とし
て、微弱な試料光が検出できなくなるおそれがあった。
The photomultiplier tube 7 needs to be kept at a low temperature because the dark current increases as the temperature rises and the lower limit of light detection increases. In the detector 3 of the emission spectroscopic analyzer, the photomultiplier tube 7 is housed in the copper casing 8 as described above, and the generated heat is radiated to the outside through the casing 8. However, if the photomultiplier tube 7 is simply set in the copper casing 8,
There is a dislike that heat is not sufficiently radiated, and when the usage time is long, the temperature of the photomultiplier tube 7, especially the cathode electrode, rises, and the dark current increases. The sample light could not be detected.

【0005】本発明は、スペース増大等の不都合を生じ
ることなく、その光電子増倍管の放熱冷却が効果的に行
われるようにして、支障なく試料光の検出下限を低レベ
ルに維持することを課題とする。
According to the present invention, the lower limit of detection of the sample light can be maintained at a low level without any hindrance so that the photomultiplier tube can be effectively radiated and cooled without causing inconvenience such as increase in space. It is an issue.

【0006】[0006]

【課題を解決するための手段】本発明は、上記課題を達
成するために、次のような構成を備えている。
The present invention has the following structure in order to achieve the above object.

【0007】請求項1では、発光部からの光を分光部を
介して受光する検出部を、カソードに熱的に接続された
カソード冷却板を有する光電子増倍管を熱良導性金属の
筺体に収納して構成した発光分光分析装置において、前
記カソード冷却板を熱移動手段を介して前記筐体の一部
に熱的に接続する接続手段を備えて発光分光分析装置を
構成した。
According to the first aspect of the present invention, the photodetector having a cathode cooling plate thermally connected to the cathode is used as the detector for receiving the light from the light emitting unit through the spectroscopic unit. In the emission spectroscopic analysis apparatus housed in the above, the emission spectroscopic analysis apparatus is configured by including connecting means for thermally connecting the cathode cooling plate to a part of the housing through a heat transfer means.

【0008】また、請求項2では、請求項1の発光分光
分光装置において、前記接続手段によって前記光電子増
倍管を前記筺体から機械的に支持している。
According to a second aspect of the present invention, in the emission spectroscopic spectroscopic device of the first aspect, the connecting means mechanically supports the photomultiplier tube from the housing.

【0009】請求項3では、請求項1の発光分光分析装
置において、前記検出部を含む分光器が一定温度になる
ように温度調節を行うようにした。
According to a third aspect of the present invention, in the emission spectroscopic analysis apparatus according to the first aspect, temperature control is performed so that the spectroscope including the detection unit has a constant temperature.

【0010】[0010]

【発明の実施の形態】以下、本発明の実施の形態を図1
ないし図4に基づいて説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIG.
A description will be given with reference to FIG.

【0011】図1および図2は、本発明の一実施例に係
り、図1は発光分光分析装置の検出部の縦断面図、図2
はその要部の拡大縦断面図である。
1 and 2 relate to an embodiment of the present invention. FIG. 1 is a vertical cross-sectional view of a detecting portion of an emission spectroscopic analyzer.
FIG. 3 is an enlarged vertical sectional view of a main part thereof.

【0012】図1および図2において、符号10は、発
光部からの試料光を分光部を介して受光する検出部の全
体を示し、11は試料光の検出方向が横方向となったサ
イドオン型の光電子増倍管、12はそのソケット、13
は銅製の筐体である。
In FIG. 1 and FIG. 2, reference numeral 10 indicates the whole of a detector for receiving the sample light from the light emitting portion through the spectroscopic portion, and 11 is a side-on in which the sample light is detected in the lateral direction. Type photomultiplier tube, 12 is its socket, 13
Is a copper housing.

【0013】前記光電子増倍管11は、図2に明示する
ように、その外周がガラス製のバルブ11bによって密
封されているとともに、バルブ11bの頂部にカソード
冷却板11aを有するもので、カソード冷却板11a
は、バルブ11bの外部に露出するとともに、バルブ1
1bの内部においてカソード電極11cの延長端と接合
されている。
As shown in FIG. 2, the photomultiplier tube 11 has an outer periphery hermetically sealed by a glass bulb 11b and a cathode cooling plate 11a on the top of the bulb 11b. Board 11a
Is exposed to the outside of the valve 11b and the valve 1
It is joined to the extended end of the cathode electrode 11c inside 1b.

【0014】一方、筐体13の天板部13a内面には、
ゴム製のキャップ14が取り付けられている。このキャ
ップ14の内部には、ペルチェ効果素子15が保持され
ている。また、キャップ14の下端開口部には、光電子
増倍管11のバルブ11bの頂部が嵌入されており、こ
れによって、キャップ15に光電子増倍管11およびそ
のソケット12が一定姿勢に保持されている。ソケット
12は、特に筐体13に取り付ける必要はなく、図示の
ように、光電子増倍管11に差し込むだけでよい。
On the other hand, on the inner surface of the top plate portion 13a of the housing 13,
A rubber cap 14 is attached. A Peltier effect element 15 is held inside the cap 14. In addition, the top of the bulb 11b of the photomultiplier tube 11 is fitted into the lower end opening of the cap 14, whereby the photomultiplier tube 11 and its socket 12 are held in a fixed posture in the cap 15. . The socket 12 does not need to be attached to the housing 13 in particular, and may be inserted into the photomultiplier tube 11 as illustrated.

【0015】キャップ14内部においては、光電子増倍
管11のカソード冷却板11aがペルチェ効果素子15
を介して筐体13の一部に熱的に接合されている。具体
的には、光電子増倍管11のカソード冷却板11aがペ
ルチェ効果素子15の一面に接合し、ペルチェ効果素子
15の他面が筐体13の天板部13aに接合している。
Inside the cap 14, the cathode cooling plate 11 a of the photomultiplier tube 11 is arranged in the Peltier effect element 15.
It is thermally joined to a part of the housing 13 via. Specifically, the cathode cooling plate 11 a of the photomultiplier tube 11 is bonded to one surface of the Peltier effect element 15, and the other surface of the Peltier effect element 15 is bonded to the top plate portion 13 a of the housing 13.

【0016】上記の構成において、光電子増倍管11、
特に発熱しやすいカソード電極11cは、カソード冷却
板11aを介して、ペルチェ効果素子15の冷却作用に
より強制的に冷却され、しかも、ペルチェ効果素子15
自体の保有熱は、筐体13を通じて外部に放熱されるの
で、光電子増倍管11は強力に冷却されることになり、
暗電流の増大が抑えられ、光の検出下限が低いレベルに
維持される。
In the above structure, the photomultiplier tube 11,
Particularly, the cathode electrode 11c which easily generates heat is forcibly cooled by the cooling action of the Peltier effect element 15 via the cathode cooling plate 11a, and moreover, the Peltier effect element 15
Since the heat possessed by itself is radiated to the outside through the housing 13, the photomultiplier tube 11 is strongly cooled,
The increase in dark current is suppressed, and the lower limit of light detection is maintained at a low level.

【0017】また、従来の検出部の構成では、図6に示
したように、光電子増倍管7がソケット9により保持さ
れるので、ソケット9への光電子増倍管7の差し込み方
によっては、光電子増倍管7の姿勢に狂いの生じること
があるが、本発明の検出部10の構成では、光電子増倍
管11のバルブが直接キャップ14に保持されるので、
光電子増倍管11の姿勢に狂いが生じにくい。
Further, in the structure of the conventional detecting section, as shown in FIG. 6, the photomultiplier tube 7 is held by the socket 9, so that depending on how the photomultiplier tube 7 is inserted into the socket 9, Although the attitude of the photomultiplier tube 7 may be misaligned, the valve of the photomultiplier tube 11 is directly held by the cap 14 in the configuration of the detection unit 10 of the present invention.
The attitude of the photomultiplier tube 11 is unlikely to change.

【0018】なお、上記の実施例では、キャップ14
は、その環状凸部14aを筐体天板部13aに形成され
た溝に嵌合させることで、天板部13aに取り付けられ
ているが、キャップ14は接着剤により筐体13側に取
り付けてもよいし、また、図3の他の実施例に示すよう
に、キャップ14にフランジ14bを形成しておいて、
このフランジ14bの部分をネジ16により筐体13側
に取り付けてもよい。
In the above embodiment, the cap 14
Is attached to the top plate portion 13a by fitting the annular convex portion 14a into the groove formed in the top plate portion 13a of the casing, but the cap 14 is attached to the casing 13 side with an adhesive. Alternatively, as shown in another embodiment of FIG. 3, a flange 14b is formed on the cap 14,
The flange 14b may be attached to the housing 13 side with the screw 16.

【0019】図4は、さらに他の実施例に係る検出部の
要部の拡大縦断面図である。この実施例では、キャップ
14の内部に、ペルチェ効果素子15の一面に接触する
形で、アルミニウムのような熱良導性の金属板17が埋
設されており、この金属板17には、天板部13aを貫
通して樹脂製のネジ18が螺挿されている。ネジ18を
樹脂製としたのは、筐体13の熱を金属板17側に戻さ
ないようにするためである。そして、金属板17は、エ
ポキシ樹脂系絶縁剤のような熱伝導性の優れた絶縁剤1
9を介して、光電子増倍管11のカソード冷却板11a
に熱的に接合されている。
FIG. 4 is an enlarged vertical sectional view of a main part of a detecting section according to still another embodiment. In this embodiment, a metal plate 17 having a good thermal conductivity such as aluminum is embedded in the cap 14 so as to be in contact with one surface of the Peltier effect element 15. The metal plate 17 has a top plate. A resin screw 18 is screwed through the portion 13a. The reason why the screw 18 is made of resin is to prevent the heat of the housing 13 from returning to the metal plate 17 side. The metal plate 17 is made of an insulating material 1 having excellent thermal conductivity such as an epoxy resin insulating material.
Via the cathode cooling plate 11a of the photomultiplier tube 11
Is thermally bonded to.

【0020】この実施例では、光電子増倍管11が強力
に冷却され、また、その姿勢が狂いなく保持されるほ
か、ネジ18と金属板17との螺合により、キャップ1
4が筐体天板部13aに取り付けられるとともに、ペル
チェ効果素子15と天板部13aとが密に接合され、ペ
ルチェ効果素子15から筐体13への放熱効果がより良
好となる。
In this embodiment, the photomultiplier tube 11 is strongly cooled, and its posture is maintained without being deformed, and the screw 18 and the metal plate 17 are screwed together so that the cap 1
4 is attached to the housing top plate portion 13a, and the Peltier effect element 15 and the top plate portion 13a are closely joined to each other, so that the heat radiation effect from the Peltier effect element 15 to the housing 13 becomes better.

【0021】このほか、上記各実施例では、光電子増倍
管11およびそのソケット12をキャップ14を介して
筐体13側に保持させるようにしたが、ソケット12
を、従来通り、筐体13側に取り付けることも可能で、
その場合、光電子増倍管11のバルブ頂部は、特に筐体
13側に固定する必要はなく、光電子増倍管11のカソ
ード冷却板11aと筐体13との間にペルチェ効果素子
15がサンドイッチ状に介在していればよい。
In addition, in each of the above embodiments, the photomultiplier tube 11 and its socket 12 are held on the housing 13 side via the cap 14, but the socket 12
Can be attached to the case 13 side as before,
In that case, the bulb top of the photomultiplier tube 11 does not need to be fixed to the housing 13 side in particular, and the Peltier effect element 15 is sandwiched between the cathode cooling plate 11a of the photomultiplier tube 11 and the housing 13. Should be intervened in.

【0022】なお、上記実施の形態においてさらに温度
調節手段を設けて、この温度調節手段によって分光部
(図示省略)や検出部10全体が一定の温度になるよう
に温度調節すれば、カソード電極11cの冷却効果が高
まって、さらに暗電流を小さくすることができるように
なり、その分、測定の安定性は増すことになる。
In the above embodiment, if the temperature adjusting means is further provided and the temperature adjusting means adjusts the temperature of the entire spectroscopic section (not shown) and the detecting section 10 to a constant temperature, the cathode electrode 11c. The cooling effect of (1) is enhanced, and the dark current can be further reduced, and the stability of measurement is increased accordingly.

【0023】[0023]

【発明の効果】本発明の請求項1によれば、光電子増倍
管のカソード冷却板を、熱移動手段を介して筐体の一部
に熱的に接合しているので、冷却が強力で、暗電流が低
レベルに抑えられ、発光分光分析装置の検出部として、
微弱な試料光を検出することができるようになった。
According to the first aspect of the present invention, since the cathode cooling plate of the photomultiplier tube is thermally joined to a part of the housing through the heat transfer means, cooling is strong. The dark current is suppressed to a low level,
It became possible to detect weak sample light.

【0024】また、請求項2によれば、接続手段によっ
て、光電子増倍管を筐体側に機械的に支持することで、
光電子増倍管の姿勢に狂いが生じにくいという効果が得
られる。
According to a second aspect, the photomultiplier tube is mechanically supported on the housing side by the connecting means,
It is possible to obtain the effect that the attitude of the photomultiplier tube does not easily change.

【0025】さらには、請求項3によれば、分光部や検
出部全体が一定の温度になるように温度調節するので、
カソードの冷却効果が高まって、さらに暗電流を小さく
することができるようになり、その分、測定の安定性が
増すという効果が得られる。
Further, according to the third aspect, the temperature is adjusted so that the entire spectroscopic section and the detection section have a constant temperature.
The effect of cooling the cathode is enhanced, and the dark current can be further reduced, and the effect that the stability of measurement is increased accordingly is obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に係る発光分光分析装置の検
出部の縦断面図である。
FIG. 1 is a vertical cross-sectional view of a detection unit of an emission spectroscopic analyzer according to an embodiment of the present invention.

【図2】上記実施例の要部の拡大縦断面図である。FIG. 2 is an enlarged vertical sectional view of a main part of the above embodiment.

【図3】本発明の他の実施例に係る検出部の要部拡大縦
断面図である。
FIG. 3 is an enlarged vertical sectional view of a main part of a detection unit according to another embodiment of the present invention.

【図4】本発明のさらに他の実施例に係る検出部の要部
拡大縦断面図である。
FIG. 4 is an enlarged vertical sectional view of a main part of a detection unit according to still another embodiment of the present invention.

【図5】発光分光分析装置の概略構成図である。FIG. 5 is a schematic configuration diagram of an emission spectroscopy analyzer.

【図6】発光分光分析装置の従来の検出部の縦断面図で
ある。
FIG. 6 is a vertical cross-sectional view of a conventional detection unit of an emission spectroscopic analyzer.

【符号の説明】[Explanation of symbols]

10 …検出部 11 …光電子増倍管 11a…カソード冷却板 13 …筐体 14 …キャップ 15 …ペルチェ効果素子 DESCRIPTION OF SYMBOLS 10 ... Detection part 11 ... Photomultiplier tube 11a ... Cathode cooling plate 13 ... Housing 14 ... Cap 15 ... Peltier effect element

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 発光部からの光を分光部を介して受光す
る検出部を、カソードに熱的に接続されたカソード冷却
板を有する光電子増倍管を熱良導性金属の筺体に収納し
て構成した発光分光分析装置において、 前記カソード冷却板を熱移動手段を介して前記筐体の一
部に熱的に接続する接続手段を備えたことを特徴とする
発光分光分析装置。
1. A detection unit for receiving light from a light emitting unit via a spectroscopic unit, a photomultiplier tube having a cathode cooling plate thermally connected to a cathode is housed in a thermally conductive metal housing. The emission spectroscopic analysis apparatus configured as described above, further comprising a connecting means for thermally connecting the cathode cooling plate to a part of the housing via a heat transfer means.
【請求項2】 前記接続手段によって前記光電子増倍管
を前記筺体から機械的に支持したことを特徴とする請求
項1に記載の発光分光分析装置。
2. The optical emission spectroscopic analyzer according to claim 1, wherein the photomultiplier tube is mechanically supported from the housing by the connecting means.
【請求項3】 前記検出部を含む分光器が一定温度にな
るように温度調節を行うことを特徴とする請求項1また
は請求項2に記載の発光分光分析装置。
3. The emission spectroscopic analyzer according to claim 1, wherein the spectroscope including the detector is temperature-controlled so that the spectroscope has a constant temperature.
JP23247395A 1995-09-11 1995-09-11 Emission spectrochemical analysis device Pending JPH0979905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23247395A JPH0979905A (en) 1995-09-11 1995-09-11 Emission spectrochemical analysis device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23247395A JPH0979905A (en) 1995-09-11 1995-09-11 Emission spectrochemical analysis device

Publications (1)

Publication Number Publication Date
JPH0979905A true JPH0979905A (en) 1997-03-28

Family

ID=16939857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23247395A Pending JPH0979905A (en) 1995-09-11 1995-09-11 Emission spectrochemical analysis device

Country Status (1)

Country Link
JP (1) JPH0979905A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001094898A1 (en) * 2000-06-09 2001-12-13 France Telecom Low-noise spectroscopic ellipsometer
WO2002086471A1 (en) * 2001-04-12 2002-10-31 Hamamatsu Photonics K.K. Equipment for measuring luminescence reaction
WO2010150680A1 (en) * 2009-06-24 2010-12-29 株式会社日立製作所 Sample analyzing chip and measurement system using same
JP2013124876A (en) * 2011-12-13 2013-06-24 Hamamatsu Photonics Kk Optical measurement device
CN107466362A (en) * 2015-03-23 2017-12-12 分子装置有限公司 Reduce the photodetector and relevant device and method based on cooling type photomultiplier condensed
CN107564795A (en) * 2016-06-30 2018-01-09 东亚Dkk株式会社 Photomultiplier, measure device, manufacture fixture

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001094898A1 (en) * 2000-06-09 2001-12-13 France Telecom Low-noise spectroscopic ellipsometer
FR2810108A1 (en) * 2000-06-09 2001-12-14 France Telecom Low noise spectroscopic ellipsometer has a detection assembly cooled below freezing to minimize the detector noise so it is in the low photon region and a light source the noise of which is also minimized
JP2003536064A (en) * 2000-06-09 2003-12-02 フランス テレコム Low noise spectroscopic ellipsometer
US6791684B2 (en) 2000-06-09 2004-09-14 France Telecom Low-noise spectroscopic ellipsometer
USRE44007E1 (en) 2000-06-09 2013-02-19 Fahrenheit Thermoscope Llc Low-noise spectroscopic ellipsometer
WO2002086471A1 (en) * 2001-04-12 2002-10-31 Hamamatsu Photonics K.K. Equipment for measuring luminescence reaction
US7008594B2 (en) 2001-04-12 2006-03-07 Hamamatsu Photonics, K.K. Luminescent reaction measurement device
JP4611562B2 (en) * 2001-04-12 2011-01-12 浜松ホトニクス株式会社 Luminescent reaction measuring device
CN102460128A (en) * 2009-06-24 2012-05-16 株式会社日立制作所 Sample analyzing chip and measurement system using same
WO2010150680A1 (en) * 2009-06-24 2010-12-29 株式会社日立製作所 Sample analyzing chip and measurement system using same
JP5328914B2 (en) * 2009-06-24 2013-10-30 株式会社日立製作所 Sample analysis chip and measurement system using the same
JP2013124876A (en) * 2011-12-13 2013-06-24 Hamamatsu Photonics Kk Optical measurement device
CN107466362A (en) * 2015-03-23 2017-12-12 分子装置有限公司 Reduce the photodetector and relevant device and method based on cooling type photomultiplier condensed
EP3274693A4 (en) * 2015-03-23 2018-11-07 Molecular Devices, LLC Cooled photomultiplier tube based light detector with reduced condensation, and related apparatuses and methods
CN107466362B (en) * 2015-03-23 2020-09-08 分子装置有限公司 Cooled photomultiplier-based light detector with reduced condensation and related apparatus and method
CN107564795A (en) * 2016-06-30 2018-01-09 东亚Dkk株式会社 Photomultiplier, measure device, manufacture fixture

Similar Documents

Publication Publication Date Title
US6818885B2 (en) Photodetector
US7796265B2 (en) Optical absorption gas analyser
JP4762944B2 (en) Terahertz antenna module
EP1605252B1 (en) Method and apparatus for eliminating and compensating thermal transients in gas analyzer
US10651624B2 (en) Optoelectronic modules having features for improved alignment and reduced tilt
US20120206046A1 (en) Laser module
JPH0979905A (en) Emission spectrochemical analysis device
JP2014142236A (en) Infrared receiving unit and infrared gas sensor
JP2557171B2 (en) Displacement detection device
JP2007274569A (en) Imaging apparatus
GB2100058A (en) Pyroelectric detector
CN114235711B (en) Miniaturized portable high-sensitivity gas measurement system
JPH11329338A (en) Electron tube device
JPH0688747A (en) Cooling type photodetector
US7808620B2 (en) Microchip testing device
KR102230492B1 (en) Imaging device
JPH0968464A (en) Emission spectrophotometer
CN113167995B (en) Optical filter device and control method for optical filter device
EP1186829B1 (en) Portable light source
JPH06103939A (en) Image tube device
JP2002131128A (en) Spectroscopic photometer
JP2000315419A (en) Portable light source device
JP2007333653A (en) Radiation detection apparatus
JP3376634B2 (en) Temperature detector
CN211853704U (en) On-satellite calibration LED light source device