DE60018883T2 - Optisches Querverbindungssystem mit mikro-elektromechanischer Kippspiegelanordnung - Google Patents

Optisches Querverbindungssystem mit mikro-elektromechanischer Kippspiegelanordnung Download PDF

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Publication number
DE60018883T2
DE60018883T2 DE60018883T DE60018883T DE60018883T2 DE 60018883 T2 DE60018883 T2 DE 60018883T2 DE 60018883 T DE60018883 T DE 60018883T DE 60018883 T DE60018883 T DE 60018883T DE 60018883 T2 DE60018883 T2 DE 60018883T2
Authority
DE
Germany
Prior art keywords
array
mirror
input
optical
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60018883T
Other languages
German (de)
English (en)
Other versions
DE60018883D1 (de
Inventor
Vladmir Anatolyevich Piscataway Aksyuk
David John Summit Bishop
Randy Clinton Whippany Giles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/512,174 external-priority patent/US6690885B1/en
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Publication of DE60018883D1 publication Critical patent/DE60018883D1/de
Application granted granted Critical
Publication of DE60018883T2 publication Critical patent/DE60018883T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/32Optical coupling means having lens focusing means positioned between opposed fibre ends
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/354Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/35543D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Use Of Switch Circuits For Exchanges And Methods Of Control Of Multiplex Exchanges (AREA)
  • Optical Communication System (AREA)
DE60018883T 1999-11-17 2000-11-06 Optisches Querverbindungssystem mit mikro-elektromechanischer Kippspiegelanordnung Expired - Lifetime DE60018883T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US16614999P 1999-11-17 1999-11-17
US166149P 1999-11-17
US512174 2000-02-24
US09/512,174 US6690885B1 (en) 1999-10-07 2000-02-24 Optical crossconnect using tilting mirror MEMS array

Publications (2)

Publication Number Publication Date
DE60018883D1 DE60018883D1 (de) 2005-04-28
DE60018883T2 true DE60018883T2 (de) 2006-04-13

Family

ID=26862005

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60018883T Expired - Lifetime DE60018883T2 (de) 1999-11-17 2000-11-06 Optisches Querverbindungssystem mit mikro-elektromechanischer Kippspiegelanordnung

Country Status (4)

Country Link
EP (1) EP1102096B1 (https=)
JP (2) JP4619519B2 (https=)
CA (1) CA2325250A1 (https=)
DE (1) DE60018883T2 (https=)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010051511A (ko) * 1999-11-09 2001-06-25 윌리엄 비. 켐플러 마이크로미러 광 스위치
JP4745579B2 (ja) * 1999-12-01 2011-08-10 エクスロス インコーポレイテッド ノーテル ネットワークス マルチプル1×n光スイッチ構成
CA2325611C (en) * 1999-12-01 2004-04-20 Lucent Technologies Inc. An optical cross connect employing a curved optical component
US6556740B1 (en) 2000-04-14 2003-04-29 Nanogear Fiber optic cross connect with folding of light beams
US6418247B1 (en) * 2000-09-08 2002-07-09 Harris Corporation Fiber optic switch and associated methods
US7050669B2 (en) * 2001-04-30 2006-05-23 Trex Enterprises Corp. Optical cross connect switch with axial alignment beam
US6543087B2 (en) 2001-06-01 2003-04-08 Aip Networks, Inc. Micro-electromechanical hinged flap structure
US6563975B2 (en) * 2001-06-18 2003-05-13 Raytheon Company Method and apparatus for integrating optical fibers with collimating lenses
US6704476B2 (en) 2001-06-29 2004-03-09 Lucent Technologies Inc. Optical MEMS switch with imaging system
US6647172B2 (en) 2001-06-29 2003-11-11 Lucent Technologies Inc. Imaging technique for use with optical MEMS devices
JP2003066348A (ja) 2001-08-28 2003-03-05 Nec Corp 光伝送システム
JP3908503B2 (ja) * 2001-10-30 2007-04-25 富士通株式会社 光スイッチ
EP1471372B1 (en) 2002-01-29 2010-01-27 Panasonic Corporation Shape-variable mirror and light control device having the shape-variable mirror
JP3942497B2 (ja) 2002-06-25 2007-07-11 オリンパス株式会社 光スイッチ
JP2004037791A (ja) * 2002-07-03 2004-02-05 Olympus Corp 静電駆動型ミラー装置
WO2005011322A2 (en) 2003-07-28 2005-02-03 Olympus Corporation Optical switch and method of controlling optical switch
JP4489393B2 (ja) 2003-08-21 2010-06-23 オリンパス株式会社 半導体装置
JP4592292B2 (ja) 2004-01-16 2010-12-01 株式会社日本マイクロニクス 電気的接続装置
JP4813061B2 (ja) 2005-01-19 2011-11-09 オリンパス株式会社 光スイッチ
JP4556879B2 (ja) 2005-03-31 2010-10-06 日立金属株式会社 光スイッチおよび光スイッチアレイ
US9304259B1 (en) 2014-03-13 2016-04-05 Google Inc. MEMS mirror arrays having multiple mirror units
US9664896B1 (en) 2014-03-13 2017-05-30 Google Inc. Pre-tilted MEMS mirrors
US10317626B2 (en) 2017-06-15 2019-06-11 Google Llc Inner and outer collimator elements for an optical circuit switch

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5037173A (en) * 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
JP2617054B2 (ja) * 1991-10-18 1997-06-04 日本電信電話株式会社 光接続モジュール
US5444801A (en) * 1994-05-27 1995-08-22 Laughlin; Richard H. Apparatus for switching optical signals and method of operation
EP1092166A4 (en) * 1998-06-05 2004-09-29 Afn Llc OPTICAL SWITCH WITH PLANE MATRIX AND METHOD THEREOF
JP2000019434A (ja) * 1998-06-30 2000-01-21 Nippon Signal Co Ltd:The 光セレクタ
JP2002526803A (ja) * 1998-09-15 2002-08-20 エクスロス・インク フレクシブル・モジュラ・コンパクト光ファイバスイッチ

Also Published As

Publication number Publication date
CA2325250A1 (en) 2001-05-17
JP2010134472A (ja) 2010-06-17
EP1102096A2 (en) 2001-05-23
EP1102096B1 (en) 2005-03-23
DE60018883D1 (de) 2005-04-28
JP4619519B2 (ja) 2011-01-26
EP1102096A3 (en) 2002-07-10
JP2001174724A (ja) 2001-06-29

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