DE60018883T2 - Optisches Querverbindungssystem mit mikro-elektromechanischer Kippspiegelanordnung - Google Patents
Optisches Querverbindungssystem mit mikro-elektromechanischer Kippspiegelanordnung Download PDFInfo
- Publication number
- DE60018883T2 DE60018883T2 DE60018883T DE60018883T DE60018883T2 DE 60018883 T2 DE60018883 T2 DE 60018883T2 DE 60018883 T DE60018883 T DE 60018883T DE 60018883 T DE60018883 T DE 60018883T DE 60018883 T2 DE60018883 T2 DE 60018883T2
- Authority
- DE
- Germany
- Prior art keywords
- array
- mirror
- input
- optical
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 64
- 239000000835 fiber Substances 0.000 claims description 45
- 239000000758 substrate Substances 0.000 claims description 9
- 239000013307 optical fiber Substances 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 238000003491 array Methods 0.000 description 27
- 230000000052 comparative effect Effects 0.000 description 6
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
- G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Use Of Switch Circuits For Exchanges And Methods Of Control Of Multiplex Exchanges (AREA)
- Optical Communication System (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16614999P | 1999-11-17 | 1999-11-17 | |
| US166149P | 1999-11-17 | ||
| US512174 | 2000-02-24 | ||
| US09/512,174 US6690885B1 (en) | 1999-10-07 | 2000-02-24 | Optical crossconnect using tilting mirror MEMS array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60018883D1 DE60018883D1 (de) | 2005-04-28 |
| DE60018883T2 true DE60018883T2 (de) | 2006-04-13 |
Family
ID=26862005
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60018883T Expired - Lifetime DE60018883T2 (de) | 1999-11-17 | 2000-11-06 | Optisches Querverbindungssystem mit mikro-elektromechanischer Kippspiegelanordnung |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1102096B1 (https=) |
| JP (2) | JP4619519B2 (https=) |
| CA (1) | CA2325250A1 (https=) |
| DE (1) | DE60018883T2 (https=) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010051511A (ko) * | 1999-11-09 | 2001-06-25 | 윌리엄 비. 켐플러 | 마이크로미러 광 스위치 |
| JP4745579B2 (ja) * | 1999-12-01 | 2011-08-10 | エクスロス インコーポレイテッド ノーテル ネットワークス | マルチプル1×n光スイッチ構成 |
| CA2325611C (en) * | 1999-12-01 | 2004-04-20 | Lucent Technologies Inc. | An optical cross connect employing a curved optical component |
| US6556740B1 (en) | 2000-04-14 | 2003-04-29 | Nanogear | Fiber optic cross connect with folding of light beams |
| US6418247B1 (en) * | 2000-09-08 | 2002-07-09 | Harris Corporation | Fiber optic switch and associated methods |
| US7050669B2 (en) * | 2001-04-30 | 2006-05-23 | Trex Enterprises Corp. | Optical cross connect switch with axial alignment beam |
| US6543087B2 (en) | 2001-06-01 | 2003-04-08 | Aip Networks, Inc. | Micro-electromechanical hinged flap structure |
| US6563975B2 (en) * | 2001-06-18 | 2003-05-13 | Raytheon Company | Method and apparatus for integrating optical fibers with collimating lenses |
| US6704476B2 (en) | 2001-06-29 | 2004-03-09 | Lucent Technologies Inc. | Optical MEMS switch with imaging system |
| US6647172B2 (en) | 2001-06-29 | 2003-11-11 | Lucent Technologies Inc. | Imaging technique for use with optical MEMS devices |
| JP2003066348A (ja) | 2001-08-28 | 2003-03-05 | Nec Corp | 光伝送システム |
| JP3908503B2 (ja) * | 2001-10-30 | 2007-04-25 | 富士通株式会社 | 光スイッチ |
| EP1471372B1 (en) | 2002-01-29 | 2010-01-27 | Panasonic Corporation | Shape-variable mirror and light control device having the shape-variable mirror |
| JP3942497B2 (ja) | 2002-06-25 | 2007-07-11 | オリンパス株式会社 | 光スイッチ |
| JP2004037791A (ja) * | 2002-07-03 | 2004-02-05 | Olympus Corp | 静電駆動型ミラー装置 |
| WO2005011322A2 (en) | 2003-07-28 | 2005-02-03 | Olympus Corporation | Optical switch and method of controlling optical switch |
| JP4489393B2 (ja) | 2003-08-21 | 2010-06-23 | オリンパス株式会社 | 半導体装置 |
| JP4592292B2 (ja) | 2004-01-16 | 2010-12-01 | 株式会社日本マイクロニクス | 電気的接続装置 |
| JP4813061B2 (ja) | 2005-01-19 | 2011-11-09 | オリンパス株式会社 | 光スイッチ |
| JP4556879B2 (ja) | 2005-03-31 | 2010-10-06 | 日立金属株式会社 | 光スイッチおよび光スイッチアレイ |
| US9304259B1 (en) | 2014-03-13 | 2016-04-05 | Google Inc. | MEMS mirror arrays having multiple mirror units |
| US9664896B1 (en) | 2014-03-13 | 2017-05-30 | Google Inc. | Pre-tilted MEMS mirrors |
| US10317626B2 (en) | 2017-06-15 | 2019-06-11 | Google Llc | Inner and outer collimator elements for an optical circuit switch |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5037173A (en) * | 1989-11-22 | 1991-08-06 | Texas Instruments Incorporated | Optical interconnection network |
| JP2617054B2 (ja) * | 1991-10-18 | 1997-06-04 | 日本電信電話株式会社 | 光接続モジュール |
| US5444801A (en) * | 1994-05-27 | 1995-08-22 | Laughlin; Richard H. | Apparatus for switching optical signals and method of operation |
| EP1092166A4 (en) * | 1998-06-05 | 2004-09-29 | Afn Llc | OPTICAL SWITCH WITH PLANE MATRIX AND METHOD THEREOF |
| JP2000019434A (ja) * | 1998-06-30 | 2000-01-21 | Nippon Signal Co Ltd:The | 光セレクタ |
| JP2002526803A (ja) * | 1998-09-15 | 2002-08-20 | エクスロス・インク | フレクシブル・モジュラ・コンパクト光ファイバスイッチ |
-
2000
- 2000-11-06 EP EP00309821A patent/EP1102096B1/en not_active Expired - Lifetime
- 2000-11-06 DE DE60018883T patent/DE60018883T2/de not_active Expired - Lifetime
- 2000-11-08 CA CA002325250A patent/CA2325250A1/en not_active Abandoned
- 2000-11-17 JP JP2000350490A patent/JP4619519B2/ja not_active Expired - Fee Related
-
2010
- 2010-01-12 JP JP2010003906A patent/JP2010134472A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CA2325250A1 (en) | 2001-05-17 |
| JP2010134472A (ja) | 2010-06-17 |
| EP1102096A2 (en) | 2001-05-23 |
| EP1102096B1 (en) | 2005-03-23 |
| DE60018883D1 (de) | 2005-04-28 |
| JP4619519B2 (ja) | 2011-01-26 |
| EP1102096A3 (en) | 2002-07-10 |
| JP2001174724A (ja) | 2001-06-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |