DE60016659D1 - Verfahren zum Herstellen von synthetischem Quarzglas - Google Patents

Verfahren zum Herstellen von synthetischem Quarzglas

Info

Publication number
DE60016659D1
DE60016659D1 DE60016659T DE60016659T DE60016659D1 DE 60016659 D1 DE60016659 D1 DE 60016659D1 DE 60016659 T DE60016659 T DE 60016659T DE 60016659 T DE60016659 T DE 60016659T DE 60016659 D1 DE60016659 D1 DE 60016659D1
Authority
DE
Germany
Prior art keywords
quartz glass
synthetic quartz
producing synthetic
producing
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60016659T
Other languages
English (en)
Other versions
DE60016659T2 (de
Inventor
Motoyuki Yamada
Hisatoshi Otsuka
Koji Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Application granted granted Critical
Publication of DE60016659D1 publication Critical patent/DE60016659D1/de
Publication of DE60016659T2 publication Critical patent/DE60016659T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/0144—Means for after-treatment or catching of worked reactant gases
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1407—Deposition reactors therefor
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1446—Means for after-treatment or catching of worked reactant gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
DE60016659T 1999-04-21 2000-04-25 Verfahren zum Herstellen von synthetischem Quarzglas Expired - Lifetime DE60016659T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11367299 1999-04-21
JP11367299A JP3796561B2 (ja) 1999-04-21 1999-04-21 合成石英ガラスの製造方法

Publications (2)

Publication Number Publication Date
DE60016659D1 true DE60016659D1 (de) 2005-01-20
DE60016659T2 DE60016659T2 (de) 2006-03-09

Family

ID=14618247

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60016659T Expired - Lifetime DE60016659T2 (de) 1999-04-21 2000-04-25 Verfahren zum Herstellen von synthetischem Quarzglas

Country Status (4)

Country Link
US (1) US6339940B1 (de)
EP (1) EP1046617B1 (de)
JP (1) JP3796561B2 (de)
DE (1) DE60016659T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10111733B4 (de) * 2001-03-09 2007-02-08 Heraeus Tenevo Gmbh Verfahren zur Herstellung eines SiO2-Rohlings
CA2478421C (en) * 2002-03-08 2011-02-08 Revelations In Design, Lp Electric device control apparatus
JP5310343B2 (ja) * 2009-07-16 2013-10-09 信越化学工業株式会社 合成石英ガラスの製造方法
US10289204B2 (en) * 2012-11-15 2019-05-14 Quantum Interface, Llc Apparatuses for controlling electrical devices and software programs and methods for making and using same
US10503359B2 (en) * 2012-11-15 2019-12-10 Quantum Interface, Llc Selection attractive interfaces, systems and apparatuses including such interfaces, methods for making and using same
EP3218317B1 (de) 2014-11-13 2018-10-17 Gerresheimer Glas GmbH Partikelfilter einer glasformmaschine, kolbeneinheit, blaskopf, blaskopfstütze und an diesen filter angepasste glasformmaschine oder glasformmaschine mit diesem filter
CN112624579B (zh) * 2020-12-03 2021-09-17 东海县奥兰石英科技有限公司 一种一体集成法生产大直径透明石英坨的制备方法及装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038343B2 (ja) * 1981-03-06 1985-08-31 信越化学工業株式会社 石英ガラスの製造方法
DE3304552A1 (de) 1983-02-10 1984-08-16 Standard Elektrik Lorenz Ag, 7000 Stuttgart Verfahren zur herstellung von lichtwellenleitern
JPS62171939A (ja) 1986-01-27 1987-07-28 Sumitomo Electric Ind Ltd 多孔質光フアイバ母材の製造装置
JPH0776097B2 (ja) 1987-01-20 1995-08-16 日本電信電話株式会社 ガラス膜製造装置
JPH01242431A (ja) * 1988-03-22 1989-09-27 Fujikura Ltd ガラス微粒子堆積装置
JPH04270133A (ja) 1991-02-21 1992-09-25 Fujikura Ltd 多孔質光ファイバ母材の製造装置
JPH05297235A (ja) 1992-04-17 1993-11-12 Sumitomo Electric Ind Ltd 光導波路膜の作製方法
JPH0725631A (ja) * 1993-07-12 1995-01-27 Sumitomo Electric Ind Ltd ガラス薄膜の製造装置
JP3341395B2 (ja) 1993-10-13 2002-11-05 株式会社ニコン 石英ガラスの製造装置
JPH08165130A (ja) 1994-12-12 1996-06-25 Nikon Corp 合成石英ガラス製造装置
JPH08239230A (ja) 1995-03-03 1996-09-17 Fujikura Ltd 多孔質ガラス体の製造装置
DE19527451C2 (de) * 1995-07-27 1998-06-04 Heraeus Quarzglas Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeigneter Brenner
JP3832008B2 (ja) * 1997-02-28 2006-10-11 株式会社ニコン 石英ガラスの製造装置
KR100568894B1 (ko) 1998-10-21 2006-04-10 스미토모덴키고교가부시키가이샤 다공질 유리 모재 제조 장치 및 제조 방법

Also Published As

Publication number Publication date
US6339940B1 (en) 2002-01-22
DE60016659T2 (de) 2006-03-09
JP2000302459A (ja) 2000-10-31
EP1046617A2 (de) 2000-10-25
EP1046617B1 (de) 2004-12-15
JP3796561B2 (ja) 2006-07-12
EP1046617A3 (de) 2001-03-21

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Legal Events

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