DE60002121T2 - Torsionsoszillator - Google Patents

Torsionsoszillator

Info

Publication number
DE60002121T2
DE60002121T2 DE60002121T DE60002121T DE60002121T2 DE 60002121 T2 DE60002121 T2 DE 60002121T2 DE 60002121 T DE60002121 T DE 60002121T DE 60002121 T DE60002121 T DE 60002121T DE 60002121 T2 DE60002121 T2 DE 60002121T2
Authority
DE
Germany
Prior art keywords
axis
spring
torsion
leaf
leaf springs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60002121T
Other languages
German (de)
English (en)
Other versions
DE60002121D1 (de
Inventor
Tomoko Arikawa
Toshiharu Hidaka
Hiroshi Miyajima
Kenji Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Application granted granted Critical
Publication of DE60002121D1 publication Critical patent/DE60002121D1/de
Publication of DE60002121T2 publication Critical patent/DE60002121T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
DE60002121T 1999-05-20 2000-05-17 Torsionsoszillator Expired - Fee Related DE60002121T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11140211A JP2000330067A (ja) 1999-05-20 1999-05-20 ねじり揺動体

Publications (2)

Publication Number Publication Date
DE60002121D1 DE60002121D1 (de) 2003-05-22
DE60002121T2 true DE60002121T2 (de) 2003-10-16

Family

ID=15263513

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60002121T Expired - Fee Related DE60002121T2 (de) 1999-05-20 2000-05-17 Torsionsoszillator

Country Status (4)

Country Link
US (1) US6445484B1 (enExample)
EP (1) EP1054285B1 (enExample)
JP (1) JP2000330067A (enExample)
DE (1) DE60002121T2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112006003849B4 (de) * 2006-04-24 2012-09-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Betreiben eines oszillierend auslenkbaren mikromechanischen Elements
DE102006051207B4 (de) 2006-10-30 2019-09-12 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements
DE102018207783A1 (de) * 2018-05-17 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS mit einem beweglichen Strukturelement und MEMS-Array

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6831765B2 (en) * 2001-02-22 2004-12-14 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
JP2003015064A (ja) 2001-07-04 2003-01-15 Fujitsu Ltd マイクロミラー素子
US6882455B2 (en) 2001-09-19 2005-04-19 Olympus Corporation Movable structure, and deflection mirror element, optical switch element and shape variable mirror including the movable structure
CN1318878C (zh) * 2002-08-14 2007-05-30 富士通株式会社 具有扭杆的微型摇动元件
JP2006317181A (ja) * 2005-05-10 2006-11-24 Matsushita Electric Works Ltd 加速度センサ
CN101268400A (zh) * 2005-09-21 2008-09-17 松下电器产业株式会社 促动器
JP4882595B2 (ja) * 2006-08-18 2012-02-22 セイコーエプソン株式会社 光スキャナおよび画像形成装置
KR100908120B1 (ko) * 2006-11-01 2009-07-16 삼성전기주식회사 전자기 마이크로 액츄에이터
JP2008182304A (ja) * 2007-01-23 2008-08-07 Konica Minolta Opto Inc 調和発振装置
DE102008006570A1 (de) * 2008-01-29 2009-07-30 Robert Bosch Gmbh Festkörpergelenk und mikromechanisches Bauelement
JP5354006B2 (ja) * 2009-03-04 2013-11-27 コニカミノルタ株式会社 平行移動機構および平行移動機構の製造方法
JP5216715B2 (ja) * 2009-08-05 2013-06-19 日本信号株式会社 プレーナ型アクチュエータ
DE102010064218A1 (de) 2010-12-27 2012-06-28 Robert Bosch Gmbh Magnetisch antreibbarer Mikrospiegel
JP5694007B2 (ja) * 2011-03-08 2015-04-01 株式会社トプコン Ｍｅｍｓ揺動装置
DE102015209030B4 (de) 2015-05-18 2023-06-07 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zum Herstellen einer mikromechanischen Vorrichtung
JP6732651B2 (ja) * 2016-12-26 2020-07-29 京セラ株式会社 ミラーデバイスおよび光走査装置
WO2019216424A1 (ja) 2018-05-11 2019-11-14 浜松ホトニクス株式会社 光学デバイス
CN116203717A (zh) 2018-05-11 2023-06-02 浜松光子学株式会社 光学装置
CN113495358A (zh) * 2020-04-02 2021-10-12 上海禾赛科技有限公司 一种激光扫描装置和包括该激光扫描装置的激光雷达

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63288464A (ja) 1987-05-21 1988-11-25 Teac Co 磁気ディスク装置
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
JP3003429B2 (ja) 1992-10-08 2000-01-31 富士電機株式会社 ねじり振動子および光偏向子
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
JP2722314B2 (ja) 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
US5739941A (en) 1995-07-20 1998-04-14 Texas Instruments Incorporated Non-linear hinge for micro-mechanical device
JP3684003B2 (ja) 1996-10-22 2005-08-17 オリンパス株式会社 光スキャナ
US5694237A (en) 1996-09-25 1997-12-02 University Of Washington Position detection of mechanical resonant scanner mirror
EP1012890A4 (en) 1997-04-01 2000-06-28 Xros Inc SETTING OPERATING SIZES OF A MICRO-MADE TORSION OSCILLATOR

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112006003849B4 (de) * 2006-04-24 2012-09-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Betreiben eines oszillierend auslenkbaren mikromechanischen Elements
DE102006051207B4 (de) 2006-10-30 2019-09-12 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements
DE102018207783A1 (de) * 2018-05-17 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS mit einem beweglichen Strukturelement und MEMS-Array
DE102018207783B4 (de) 2018-05-17 2022-11-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Array aus MEMS mit jeweils einem beweglichen Strukturelement
US12054384B2 (en) 2018-05-17 2024-08-06 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E. V. MEMS comprising a movable structural element, and MEMS array

Also Published As

Publication number Publication date
US6445484B1 (en) 2002-09-03
JP2000330067A (ja) 2000-11-30
DE60002121D1 (de) 2003-05-22
EP1054285A1 (en) 2000-11-22
EP1054285B1 (en) 2003-04-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee