DE60000565T2 - Mikro-Elektromekanische Optische Vorrichtung - Google Patents
Mikro-Elektromekanische Optische VorrichtungInfo
- Publication number
- DE60000565T2 DE60000565T2 DE60000565T DE60000565T DE60000565T2 DE 60000565 T2 DE60000565 T2 DE 60000565T2 DE 60000565 T DE60000565 T DE 60000565T DE 60000565 T DE60000565 T DE 60000565T DE 60000565 T2 DE60000565 T2 DE 60000565T2
- Authority
- DE
- Germany
- Prior art keywords
- electro
- micro
- optical device
- mechanical optical
- mechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0003—MEMS mechanisms for assembling automatically hinged components, self-assembly devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Adjustment Of Camera Lenses (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/390,580 US6265239B1 (en) | 1997-12-22 | 1999-09-03 | Micro-electro-mechanical optical device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60000565D1 DE60000565D1 (de) | 2002-11-14 |
DE60000565T2 true DE60000565T2 (de) | 2003-08-14 |
Family
ID=23543052
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60000565T Expired - Lifetime DE60000565T2 (de) | 1999-09-03 | 2000-08-21 | Mikro-Elektromekanische Optische Vorrichtung |
Country Status (4)
Country | Link |
---|---|
US (1) | US6265239B1 (de) |
EP (1) | EP1093003B1 (de) |
JP (1) | JP2001117029A (de) |
DE (1) | DE60000565T2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6300619B1 (en) * | 1997-12-22 | 2001-10-09 | Lucent Technologies Inc. | Micro-electro-mechanical optical device |
US6784771B1 (en) * | 2001-07-24 | 2004-08-31 | New Peregrine, Inc. | MEMS optical mirror array |
KR100393193B1 (ko) * | 2001-09-29 | 2003-07-31 | 삼성전자주식회사 | 광 도파로와 mems 액추에이터를 구비한 가변 광 감쇠기 |
US7190509B2 (en) | 2001-11-07 | 2007-03-13 | Trex Enterprises Corp. | Optically addressed MEMS |
US6717227B2 (en) | 2002-02-21 | 2004-04-06 | Advanced Microsensors | MEMS devices and methods of manufacture |
US6900510B2 (en) * | 2002-02-21 | 2005-05-31 | Advanced Microsensors | MEMS devices and methods for inhibiting errant motion of MEMS components |
US6858911B2 (en) * | 2002-02-21 | 2005-02-22 | Advanced Micriosensors | MEMS actuators |
US6975788B2 (en) * | 2002-12-09 | 2005-12-13 | Lucent Technologies, Inc. | Optical switch having combined input/output fiber array |
JP2007108452A (ja) * | 2005-10-14 | 2007-04-26 | Fujitsu Ltd | 可動ミラーの安定化装置 |
US8203775B1 (en) * | 2011-08-16 | 2012-06-19 | Agiltron, Inc. | MEMS bistable optical switch and methods for use thereof |
US11448854B2 (en) * | 2019-02-21 | 2022-09-20 | Alcon, Inc. | Angle adjustment system |
DE102020204767A1 (de) * | 2020-04-15 | 2021-10-21 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanische Vorrichtung mit Anschlagsfederstruktur |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0614101A3 (de) * | 1993-02-03 | 1994-10-19 | Canon Kk | Optischer Ablenker und Verfahren zu seiner Herstellung. |
US5903380A (en) | 1997-05-01 | 1999-05-11 | Rockwell International Corp. | Micro-electromechanical (MEM) optical resonator and method |
US5994159A (en) * | 1997-12-22 | 1999-11-30 | Lucent Technologies, Inc. | Self-assemblying micro-mechanical device |
-
1999
- 1999-09-03 US US09/390,580 patent/US6265239B1/en not_active Expired - Lifetime
-
2000
- 2000-08-21 DE DE60000565T patent/DE60000565T2/de not_active Expired - Lifetime
- 2000-08-21 EP EP00307182A patent/EP1093003B1/de not_active Expired - Lifetime
- 2000-09-01 JP JP2000265137A patent/JP2001117029A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2001117029A (ja) | 2001-04-27 |
EP1093003A3 (de) | 2001-05-02 |
US6265239B1 (en) | 2001-07-24 |
EP1093003B1 (de) | 2002-10-09 |
DE60000565D1 (de) | 2002-11-14 |
EP1093003A2 (de) | 2001-04-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |