DE69932957D1 - Optische untersuchungsvorrichtung - Google Patents

Optische untersuchungsvorrichtung

Info

Publication number
DE69932957D1
DE69932957D1 DE69932957T DE69932957T DE69932957D1 DE 69932957 D1 DE69932957 D1 DE 69932957D1 DE 69932957 T DE69932957 T DE 69932957T DE 69932957 T DE69932957 T DE 69932957T DE 69932957 D1 DE69932957 D1 DE 69932957D1
Authority
DE
Germany
Prior art keywords
examination device
optical examination
optical
examination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69932957T
Other languages
English (en)
Other versions
DE69932957T2 (de
Inventor
Takashi Koike
Toyoshi Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of DE69932957D1 publication Critical patent/DE69932957D1/de
Application granted granted Critical
Publication of DE69932957T2 publication Critical patent/DE69932957T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE69932957T 1999-11-11 1999-11-11 Optische untersuchungsvorrichtung Expired - Lifetime DE69932957T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1999/006281 WO2001035084A1 (en) 1998-05-12 1999-11-11 Optical inspection apparatus

Publications (2)

Publication Number Publication Date
DE69932957D1 true DE69932957D1 (de) 2006-10-05
DE69932957T2 DE69932957T2 (de) 2007-08-30

Family

ID=14237250

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69932957T Expired - Lifetime DE69932957T2 (de) 1999-11-11 1999-11-11 Optische untersuchungsvorrichtung

Country Status (6)

Country Link
US (1) US6891612B1 (de)
EP (1) EP1231461B1 (de)
CN (1) CN100356165C (de)
AU (1) AU1177900A (de)
DE (1) DE69932957T2 (de)
WO (1) WO2001035084A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200506375A (en) * 2003-05-16 2005-02-16 Tokyo Electron Ltd Inspection apparatus
US9247467B2 (en) 2005-10-27 2016-01-26 Qualcomm Incorporated Resource allocation during tune-away
US7701570B2 (en) * 2005-12-12 2010-04-20 Corning Incorporated Collimated light method and system for detecting defects in honeycombs
US20080079936A1 (en) * 2006-09-29 2008-04-03 Caterpillar Inc. Internal thread inspection probe
CN101349653B (zh) * 2007-07-17 2011-09-14 深圳市比克电池有限公司 电池隔膜纸沙眼的检测方法及装置
TWI376500B (en) * 2008-03-28 2012-11-11 Ind Tech Res Inst System for detecting defect of panel device
JP5021014B2 (ja) * 2009-10-30 2012-09-05 日本碍子株式会社 積層体の形成方法
WO2011082291A1 (en) * 2009-12-31 2011-07-07 First Solar, Inc. Flux monitor
GB2488123A (en) * 2011-02-15 2012-08-22 Vestas Wind Sys As System and method for detecting damage to a wind turbine blade
CN103698334B (zh) * 2013-10-25 2016-01-27 明基材料有限公司 隔离膜的针孔瑕疵检测系统及其检测方法
CN109738403A (zh) * 2019-01-03 2019-05-10 必欧瀚生物技术（合肥）有限公司 一种荧光标准卡及荧光标准卡用荧光膜的制备方法
CN110132980A (zh) * 2019-05-13 2019-08-16 无锡先导智能装备股份有限公司 电池检测系统、电池制造设备及电池检测方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3710129A (en) * 1971-02-16 1973-01-09 H Gibson Methods of and apparatus for detecting minute holes in objects
US4371897A (en) * 1980-09-02 1983-02-01 Xerox Corporation Fluorescent activated, spatially quantitative light detector
JPS5870134A (ja) 1981-04-27 1983-04-26 ゼロツクス・コ−ポレ−シヨン けい光励起光検出器
US4728800A (en) * 1985-04-24 1988-03-01 Young Engineering, Inc. Apparatus and method for detecting defects in a moving web
US5187217A (en) * 1987-04-02 1993-02-16 Saint-Gobain Vitrage Process for the production of a plasticized polyvinyl butyral for gluing a base onto a glazing
JPH04282441A (ja) * 1991-03-11 1992-10-07 Ricoh Co Ltd 透明導電膜の検査方法および検査装置
JPH04309849A (ja) * 1991-04-05 1992-11-02 Omron Corp ピンホール検査装置
JPH05281156A (ja) 1992-03-31 1993-10-29 Sony Corp 光学的検査装置
JPH0862149A (ja) * 1994-08-23 1996-03-08 Cosmo Giken Kk 細孔検査装置
JPH09218558A (ja) * 1996-02-09 1997-08-19 Ricoh Co Ltd 画像形成装置
JPH09318558A (ja) 1996-05-27 1997-12-12 Nikon Corp ピンホール検査方法及び装置
US5798531A (en) * 1996-06-10 1998-08-25 Harris Instrument Corporation System for detecting small holes in moving articles
DE59804993D1 (de) * 1998-05-06 2002-09-05 Alcan Tech & Man Ag Vorrichtung zum Erfassen der Poren- oder Rissbildung an einer Folie
JP4213252B2 (ja) 1998-05-12 2009-01-21 浜松ホトニクス株式会社 光学的検査装置
JP2001249005A (ja) * 2000-03-06 2001-09-14 Toshiba Corp 穴検出装置

Also Published As

Publication number Publication date
EP1231461B1 (de) 2006-08-23
CN1378647A (zh) 2002-11-06
CN100356165C (zh) 2007-12-19
EP1231461A1 (de) 2002-08-14
AU1177900A (en) 2001-06-06
EP1231461A4 (de) 2004-04-21
WO2001035084A1 (en) 2001-05-17
DE69932957T2 (de) 2007-08-30
US6891612B1 (en) 2005-05-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition