DE69009332T2 - Magnetisch angetriebene schwingbalkenkraftwandler. - Google Patents

Magnetisch angetriebene schwingbalkenkraftwandler.

Info

Publication number
DE69009332T2
DE69009332T2 DE69009332T DE69009332T DE69009332T2 DE 69009332 T2 DE69009332 T2 DE 69009332T2 DE 69009332 T DE69009332 T DE 69009332T DE 69009332 T DE69009332 T DE 69009332T DE 69009332 T2 DE69009332 T2 DE 69009332T2
Authority
DE
Germany
Prior art keywords
drived
magnetically
suspension beam
beam converter
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69009332T
Other languages
English (en)
Other versions
DE69009332D1 (de
Inventor
Brian Norling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
AlliedSignal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AlliedSignal Inc filed Critical AlliedSignal Inc
Publication of DE69009332D1 publication Critical patent/DE69009332D1/de
Application granted granted Critical
Publication of DE69009332T2 publication Critical patent/DE69009332T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/01—Vibration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Measuring Fluid Pressure (AREA)
DE69009332T 1989-02-27 1990-01-08 Magnetisch angetriebene schwingbalkenkraftwandler. Expired - Lifetime DE69009332T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/315,964 US4912990A (en) 1989-02-27 1989-02-27 Magnetically driven vibrating beam force transducer
PCT/US1990/000130 WO1990010206A1 (en) 1989-02-27 1990-01-08 Magnetically driven vibrating beam force transducer

Publications (2)

Publication Number Publication Date
DE69009332D1 DE69009332D1 (de) 1994-07-07
DE69009332T2 true DE69009332T2 (de) 1994-12-22

Family

ID=23226868

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69009332T Expired - Lifetime DE69009332T2 (de) 1989-02-27 1990-01-08 Magnetisch angetriebene schwingbalkenkraftwandler.

Country Status (8)

Country Link
US (1) US4912990A (de)
EP (1) EP0411077B1 (de)
JP (1) JPH0769230B2 (de)
CN (1) CN1045176A (de)
CA (1) CA2010607A1 (de)
DE (1) DE69009332T2 (de)
IL (1) IL93172A0 (de)
WO (1) WO1990010206A1 (de)

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US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
WO1992003740A1 (en) * 1990-08-17 1992-03-05 Analog Devices, Inc. Monolithic accelerometer
US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5095763A (en) * 1990-12-03 1992-03-17 Delatorre Leroy C Load-sensitive resonator beam transducer
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
US5243278A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Differential angular velocity sensor that is sensitive in only one degree of freedom
US5168756A (en) * 1991-02-08 1992-12-08 Sundstrand Corporation Dithering coriolis rate and acceleration sensor utilizing a permanent magnet
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
WO1993000589A1 (en) * 1991-06-25 1993-01-07 Sundstrand Corporation Coriolis rate sensor using tunnel-effect displacement sensor
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5391844A (en) 1992-04-03 1995-02-21 Weigh-Tronix Inc Load cell
US5313023A (en) 1992-04-03 1994-05-17 Weigh-Tronix, Inc. Load cell
US5442146A (en) 1992-04-03 1995-08-15 Weigh-Tronix, Inc. Counting scale and load cell assembly therefor
US5336854A (en) 1992-04-03 1994-08-09 Weigh-Tronix, Inc. Electronic force sensing load cell
US5309772A (en) * 1992-08-03 1994-05-10 United Technologies Corporation Self-exciting optical strain gage
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5339698A (en) * 1993-06-07 1994-08-23 Alliedsignal Inc. Vibrating beam force transducer with automatic adjustment of its electromagnetic drive
US5417120A (en) * 1993-06-07 1995-05-23 Allied-Signal Inc. Vibrating beam force transducer with automatic drive control
US5501103B1 (en) * 1994-02-15 1998-08-04 Allied Signal Inc Two-port electromagnetic drive for a double-ended tuning fork
IL113556A (en) * 1994-05-11 1998-04-05 Allied Signal Inc A double-ended collar
US5604336A (en) * 1995-03-08 1997-02-18 Weigh-Tronix, Inc. Load cell with composite end beams having portions with different elastic modulus
US5691472A (en) * 1995-05-30 1997-11-25 Alliedsignal, Inc. Non-gimballed angular rate sensor
GB2301671B (en) * 1995-05-30 1999-10-13 Allied Signal Inc Angular rate sensor electronic balance
GB2301669B (en) * 1995-05-30 1999-11-10 Allied Signal Inc Angular rate sensor misalignment correction
US5739431A (en) * 1996-06-13 1998-04-14 Alliedsignal, Inc. Miniature magnetometer-accelerometer
US5905201A (en) * 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
US6173612B1 (en) * 1998-11-05 2001-01-16 Alliedsignal Inc. Stable metallization for electronic and electromechanical devices
US6735854B1 (en) * 1998-07-27 2004-05-18 Honeywell International, Inc. Method for forming an electro-mechanical device
US6293585B1 (en) * 1999-07-12 2001-09-25 Gagetek Technologies Holdings Company Torsional sensing load cell
US6272925B1 (en) 1999-09-16 2001-08-14 William S. Watson High Q angular rate sensing gyroscope
US6845667B1 (en) * 1999-09-16 2005-01-25 Watson Industries, Inc. High Q angular rate sensing gyroscope
FR2801970B1 (fr) * 1999-12-07 2002-02-15 St Microelectronics Sa Capteur magnetique de tres haute sensibilite
FR2801971B1 (fr) * 1999-12-07 2002-02-15 St Microelectronics Sa Emetteur et recepteur acoustiques integres, et procede de fabrication correspondant
EP1197726A1 (de) * 2000-10-04 2002-04-17 Eidgenössische Technische Hochschule Zürich Multifunktion-Sensor und Hebel dafür
US6497152B2 (en) 2001-02-23 2002-12-24 Paroscientific, Inc. Method for eliminating output discontinuities in digital pressure transducers and digital pressure transducer employing same
US6595054B2 (en) 2001-05-14 2003-07-22 Paroscientific, Inc. Digital angular rate and acceleration sensor
US6826960B2 (en) 2002-08-07 2004-12-07 Quartz Sensors, Inc. Triaxial acceleration sensor
KR100444235B1 (ko) * 2002-12-10 2004-08-16 삼성전기주식회사 자기 및 가속도 동시 검출 방법 및 장치
FR2851659B1 (fr) * 2003-02-24 2005-06-24 Sagem Capteur vibrant a ecran radiatif
NO20041830A (no) * 2004-05-04 2005-10-17 Fm Equipment As Måleinstrument
US7703342B2 (en) * 2005-03-30 2010-04-27 Xiroku, Inc. Pressure distribution detection device
FR2920754B1 (fr) * 2007-09-07 2010-06-18 St Microelectronics Sa Micro systeme comprenant une poutre deformable par flexion et procede de fabrication
KR100934217B1 (ko) 2007-12-10 2009-12-29 한국전자통신연구원 진동 측정을 위한 미소센서
US8307710B2 (en) * 2009-07-09 2012-11-13 Honeywell International Inc. Translational mass in-plane MEMS accelerometer
US8955382B2 (en) * 2011-03-10 2015-02-17 Honeywell International Inc. High performance double-ended tuning fork
US10429405B2 (en) * 2012-02-03 2019-10-01 Honeywell International Inc. Vibrating beam accelerometer
US9250261B2 (en) * 2012-12-28 2016-02-02 Intel Corporation Method, apparatus and system for providing metering of acceleration
US9791470B2 (en) * 2013-12-27 2017-10-17 Intel Corporation Magnet placement for integrated sensor packages
FR3019125B1 (fr) 2014-03-25 2017-07-21 Renault Sas Assistance a la conduite d'un vehicule avec inhibition de la commande de braquage des roues arriere
US9527733B2 (en) 2014-11-07 2016-12-27 The Chinese University Of Hong Kong Method and apparatus for dynamic-tuning
US10197590B2 (en) * 2014-11-17 2019-02-05 The Royal Institution For The Advancement Of Learning/Mcgill University Combined magnetometer accelerometer MEMS devices and methods
US10386204B2 (en) * 2017-06-28 2019-08-20 Intel Corporation Integrated sensor and homologous calibration structure for resonant devices
US10859596B2 (en) 2018-07-20 2020-12-08 Honeywell International Inc. Mechanically-isolated in-plane pendulous vibrating beam accelerometer
CN111928980A (zh) * 2019-05-13 2020-11-13 西人马联合测控（泉州）科技有限公司 压敏元件、压敏元件的制备方法和压力传感器
US11112246B2 (en) 2019-06-14 2021-09-07 United States Government As Represented By The Secretary Of The Army Torsional oscillator micro electro mechanical systems accelerometer
US11474126B2 (en) 2020-03-05 2022-10-18 Quartz Seismic Sensors, Inc. High precision rotation sensor and method

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US2854581A (en) * 1955-11-11 1958-09-30 Ferranti Ltd Beat frequency oscillator
US3190129A (en) * 1961-07-10 1965-06-22 Bosch Arma Corp Accelerometer and parts therefor
GB1181515A (en) * 1966-05-18 1970-02-18 Solartron Electronic Group Improvements in or relating to Force-Measuring Apparatus.
US3672220A (en) * 1970-02-12 1972-06-27 Solartron Electronic Group Force-transducers
US4118977A (en) * 1976-10-13 1978-10-10 The Foxboro Company Electric signal transmitter for vibrating-wire sensor
US4221133A (en) * 1978-10-25 1980-09-09 The Foxboro Company Vibratory-wire pressure sensor
US4215570A (en) * 1979-04-20 1980-08-05 The United States Of America As Represented By The United States Department Of Energy Miniature quartz resonator force transducer
US4372173A (en) * 1980-10-20 1983-02-08 Quartex, Inc. Resonator force transducer
US4467651A (en) * 1983-01-06 1984-08-28 Sundstrand Data Control, Inc. Method for determining acceleration
JPS60127434A (ja) * 1983-12-14 1985-07-08 Shimadzu Corp 振動式力検出器
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
JPS61224465A (ja) * 1985-03-29 1986-10-06 Nec Corp 力センサ及びその製造方法
JPH0756466B2 (ja) * 1987-10-28 1995-06-14 横河電機株式会社 振動形半導体トランスデューサ

Also Published As

Publication number Publication date
US4912990A (en) 1990-04-03
EP0411077A1 (de) 1991-02-06
DE69009332D1 (de) 1994-07-07
JPH0769230B2 (ja) 1995-07-26
EP0411077B1 (de) 1994-06-01
EP0411077A4 (en) 1992-03-11
CA2010607A1 (en) 1990-08-27
IL93172A0 (en) 1990-11-05
JPH03501527A (ja) 1991-04-04
CN1045176A (zh) 1990-09-05
WO1990010206A1 (en) 1990-09-07

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Legal Events

Date Code Title Description
8380 Miscellaneous part iii

Free format text: DER INHABER IST ZU AENDERN IN: ALLIEDSIGNAL INC., MORRISTOWN, N.J., US

8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF