FR2920754B1 - Micro systeme comprenant une poutre deformable par flexion et procede de fabrication - Google Patents
Micro systeme comprenant une poutre deformable par flexion et procede de fabricationInfo
- Publication number
- FR2920754B1 FR2920754B1 FR0706269A FR0706269A FR2920754B1 FR 2920754 B1 FR2920754 B1 FR 2920754B1 FR 0706269 A FR0706269 A FR 0706269A FR 0706269 A FR0706269 A FR 0706269A FR 2920754 B1 FR2920754 B1 FR 2920754B1
- Authority
- FR
- France
- Prior art keywords
- flexion
- manufacture
- micro system
- deformable beam
- deformable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2447—Beam resonators
- H03H9/2463—Clamped-clamped beam resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02259—Driving or detection means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02527—Combined
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49009—Dynamoelectric machine
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0706269A FR2920754B1 (fr) | 2007-09-07 | 2007-09-07 | Micro systeme comprenant une poutre deformable par flexion et procede de fabrication |
US12/205,698 US8030805B2 (en) | 2007-09-07 | 2008-09-05 | Microsystem comprising a bending beam and process of manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0706269A FR2920754B1 (fr) | 2007-09-07 | 2007-09-07 | Micro systeme comprenant une poutre deformable par flexion et procede de fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2920754A1 FR2920754A1 (fr) | 2009-03-13 |
FR2920754B1 true FR2920754B1 (fr) | 2010-06-18 |
Family
ID=39291055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0706269A Expired - Fee Related FR2920754B1 (fr) | 2007-09-07 | 2007-09-07 | Micro systeme comprenant une poutre deformable par flexion et procede de fabrication |
Country Status (2)
Country | Link |
---|---|
US (1) | US8030805B2 (fr) |
FR (1) | FR2920754B1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2916271B1 (fr) * | 2007-05-14 | 2009-08-28 | St Microelectronics Sa | Circuit electronique permettant la mesure de masse de materiau biologique et procede de fabrication |
FR2920754B1 (fr) * | 2007-09-07 | 2010-06-18 | St Microelectronics Sa | Micro systeme comprenant une poutre deformable par flexion et procede de fabrication |
US9031266B2 (en) | 2011-10-11 | 2015-05-12 | Infineon Technologies Ag | Electrostatic loudspeaker with membrane performing out-of-plane displacement |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4912990A (en) * | 1989-02-27 | 1990-04-03 | Sundstrand Data Control, Inc. | Magnetically driven vibrating beam force transducer |
US5339698A (en) * | 1993-06-07 | 1994-08-23 | Alliedsignal Inc. | Vibrating beam force transducer with automatic adjustment of its electromagnetic drive |
US5684276A (en) * | 1995-12-12 | 1997-11-04 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Micromechanical oscillating mass balance |
US6311557B1 (en) * | 1999-09-24 | 2001-11-06 | Ut-Battelle, Llc | Magnetically tunable resonance frequency beam utilizing a stress-sensitive film |
EP1197726A1 (fr) * | 2000-10-04 | 2002-04-17 | Eidgenössische Technische Hochschule Zürich | Palpeur à plusieurs usages et levier pour cela |
KR100439423B1 (ko) * | 2002-01-16 | 2004-07-09 | 한국전자통신연구원 | 마이크로전자기계 액튜에이터 |
US6707351B2 (en) * | 2002-03-27 | 2004-03-16 | Motorola, Inc. | Tunable MEMS resonator and method for tuning |
JP4593239B2 (ja) | 2003-11-19 | 2010-12-08 | パナソニック株式会社 | 電気機械フィルタ |
US7102467B2 (en) * | 2004-04-28 | 2006-09-05 | Robert Bosch Gmbh | Method for adjusting the frequency of a MEMS resonator |
US8063535B2 (en) * | 2005-01-07 | 2011-11-22 | Trustees Of Boston University | Nanomechanical oscillator |
FR2883560A1 (fr) | 2005-03-24 | 2006-09-29 | St Microelectronics Sa | Microsysteme electromecanique comprenant une poutre se deformant par flexion |
FR2920754B1 (fr) * | 2007-09-07 | 2010-06-18 | St Microelectronics Sa | Micro systeme comprenant une poutre deformable par flexion et procede de fabrication |
-
2007
- 2007-09-07 FR FR0706269A patent/FR2920754B1/fr not_active Expired - Fee Related
-
2008
- 2008-09-05 US US12/205,698 patent/US8030805B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20090066170A1 (en) | 2009-03-12 |
US8030805B2 (en) | 2011-10-04 |
FR2920754A1 (fr) | 2009-03-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20150529 |