DE69009340T2 - Elektrostatisch angetriebener doppelarmiger schwingbalkenkraftwandler. - Google Patents

Elektrostatisch angetriebener doppelarmiger schwingbalkenkraftwandler.

Info

Publication number
DE69009340T2
DE69009340T2 DE69009340T DE69009340T DE69009340T2 DE 69009340 T2 DE69009340 T2 DE 69009340T2 DE 69009340 T DE69009340 T DE 69009340T DE 69009340 T DE69009340 T DE 69009340T DE 69009340 T2 DE69009340 T2 DE 69009340T2
Authority
DE
Germany
Prior art keywords
drived
electrostatically
double
beam converter
armed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69009340T
Other languages
English (en)
Other versions
DE69009340D1 (de
Inventor
Graeme Blake
Brian Norling
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
AlliedSignal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AlliedSignal Inc filed Critical AlliedSignal Inc
Publication of DE69009340D1 publication Critical patent/DE69009340D1/de
Application granted granted Critical
Publication of DE69009340T2 publication Critical patent/DE69009340T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/01—Vibration
DE69009340T 1989-02-27 1990-01-08 Elektrostatisch angetriebener doppelarmiger schwingbalkenkraftwandler. Expired - Lifetime DE69009340T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/316,899 US4901586A (en) 1989-02-27 1989-02-27 Electrostatically driven dual vibrating beam force transducer
PCT/US1990/000128 WO1990010205A1 (en) 1989-02-27 1990-01-08 Electrostatically driven dual vibrating beam force transducer

Publications (2)

Publication Number Publication Date
DE69009340D1 DE69009340D1 (de) 1994-07-07
DE69009340T2 true DE69009340T2 (de) 1995-01-05

Family

ID=23231197

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69009340T Expired - Lifetime DE69009340T2 (de) 1989-02-27 1990-01-08 Elektrostatisch angetriebener doppelarmiger schwingbalkenkraftwandler.

Country Status (8)

Country Link
US (1) US4901586A (de)
EP (1) EP0412140B1 (de)
JP (2) JPH03501529A (de)
CN (1) CN1054485A (de)
CA (1) CA2010242A1 (de)
DE (1) DE69009340T2 (de)
IL (1) IL93412A0 (de)
WO (1) WO1990010205A1 (de)

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US5417111A (en) * 1990-08-17 1995-05-23 Analog Devices, Inc. Monolithic chip containing integrated circuitry and suspended microstructure
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
DE69113632T2 (de) * 1990-08-17 1996-03-21 Analog Devices Inc Monolithischer beschleunigungsmesser.
US5408119A (en) * 1990-10-17 1995-04-18 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency
US5605598A (en) * 1990-10-17 1997-02-25 The Charles Stark Draper Laboratory Inc. Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency
US5168756A (en) * 1991-02-08 1992-12-08 Sundstrand Corporation Dithering coriolis rate and acceleration sensor utilizing a permanent magnet
US5243278A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Differential angular velocity sensor that is sensitive in only one degree of freedom
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5396797A (en) * 1991-02-08 1995-03-14 Alliedsignal Inc. Triaxial angular rate and acceleration sensor
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
US5129983A (en) * 1991-02-25 1992-07-14 The Charles Stark Draper Laboratory, Inc. Method of fabrication of large area micromechanical devices
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
WO1993010428A1 (en) * 1991-11-12 1993-05-27 Masstech Scientific Pty. Ltd. Force or load sensors
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US5408877A (en) * 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5275055A (en) * 1992-08-31 1994-01-04 Honeywell Inc. Resonant gauge with microbeam driven in constant electric field
US5367217A (en) * 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5377545A (en) * 1992-12-08 1995-01-03 Alliedsignal Inc. Servo accelerometer with tunnel current sensor and complementary electrostatic drive
US5450762A (en) * 1992-12-17 1995-09-19 Alliedsignal Inc. Reactionless single beam vibrating force sensor
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5361635A (en) * 1993-04-12 1994-11-08 Alliedsignal Inc. Multiple servo loop accelerometer with tunnel current sensors
US5511427A (en) * 1993-07-21 1996-04-30 Honeywell Inc. Cantilevered microbeam temperature sensor
US5417115A (en) * 1993-07-23 1995-05-23 Honeywell Inc. Dielectrically isolated resonant microsensors
US5456111A (en) * 1994-01-24 1995-10-10 Alliedsignal Inc. Capacitive drive vibrating beam accelerometer
DE4414969C1 (de) * 1994-04-28 1995-06-08 Siemens Ag Mikromechanisches Bauteil mit einer dielektrischen beweglichen Struktur, Mikrosystem und Herstellverfahren
US5581035A (en) * 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5646348A (en) * 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
US5725729A (en) * 1994-09-26 1998-03-10 The Charles Stark Draper Laboratory, Inc. Process for micromechanical fabrication
US5550516A (en) * 1994-12-16 1996-08-27 Honeywell Inc. Integrated resonant microbeam sensor and transistor oscillator
US5817942A (en) * 1996-02-28 1998-10-06 The Charles Stark Draper Laboratory, Inc. Capacitive in-plane accelerometer
US6745627B1 (en) * 1996-05-21 2004-06-08 Honeywell International Inc. Electrostatic drive for accelerometer
US5948981A (en) * 1996-05-21 1999-09-07 Alliedsignal Inc. Vibrating beam accelerometer
US5892153A (en) * 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5996411A (en) * 1996-11-25 1999-12-07 Alliedsignal Inc. Vibrating beam accelerometer and method for manufacturing the same
US5783973A (en) * 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
US5911156A (en) * 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5952574A (en) * 1997-04-29 1999-09-14 The Charles Stark Draper Laboratory, Inc. Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
US5905201A (en) * 1997-10-28 1999-05-18 Alliedsignal Inc. Micromachined rate and acceleration sensor and method
DE69718685T2 (de) * 1997-11-25 2003-09-18 Allied Signal Inc Schwingstab-beschleunigungsaufnehmer
US6351891B1 (en) 1997-12-18 2002-03-05 Honeywell International, Inc. Miniature directional indication instrument
US5948982A (en) * 1998-02-23 1999-09-07 Alliedsignal Inc. Vibrating beam accelerometers and methods of forming vibrating beam accelerometers
US6584857B1 (en) 2000-11-20 2003-07-01 Eastman Kodak Company Optical strain gauge
US6487913B2 (en) 2000-12-18 2002-12-03 Eastman Kodak Company Strain gauge with resonant light modulator
TW546477B (en) * 2001-08-09 2003-08-11 Matsushita Electric Ind Co Ltd Drop impact determination system and acceleration sensing element used in the drop impact determination system
US7138893B2 (en) * 2002-01-16 2006-11-21 Matsushita Electric Industrial Co., Ltd. Micro device
WO2003083492A1 (en) * 2002-03-26 2003-10-09 The Charles Stark Draper Laboratory, Inc. Microelectromechanical sensors having reduced signal bias errors and methods of manufacturing the same
US7498721B2 (en) * 2003-02-05 2009-03-03 Brunel University Resonant sensor assembly
US7064541B2 (en) * 2003-08-06 2006-06-20 The Johns Hopkins University Complementary metal-oxide semiconductor xylophone bar magnetometer with automatic resonance control
CN1299427C (zh) * 2003-09-19 2007-02-07 清华大学 用于微机械传感器的半频驱动及闭环方法
US7467553B2 (en) * 2005-12-22 2008-12-23 Honeywell International Inc. Capacitively coupled resonator drive
US8187902B2 (en) * 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
JP5151934B2 (ja) * 2008-11-28 2013-02-27 富士電機株式会社 真空計
FR2941533B1 (fr) * 2009-01-23 2011-03-11 Commissariat Energie Atomique Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte.
US8143768B2 (en) * 2009-06-26 2012-03-27 Hanson Richard A Miniature mechanical resonator device
JP2011043459A (ja) * 2009-08-24 2011-03-03 Nippon Telegr & Teleph Corp <Ntt> メカニカル検出器および測定方法
US9562888B2 (en) * 2010-03-31 2017-02-07 Cornell University Stress-based sensor, method, and applications
DE102010024711A1 (de) * 2010-06-23 2011-12-29 Airbus Operations Gmbh Vorrichtung und Verfahren zum Erfassen mechanischer Lasten auf Schubelementen
DE102010030878B4 (de) * 2010-07-02 2023-08-17 Robert Bosch Gmbh Mikromechanische Sensorvorrichtung zur Messung einer Beschleunigung, eines Drucks und dergleichen
JP5252016B2 (ja) * 2011-03-18 2013-07-31 横河電機株式会社 振動式トランスデューサ
US8887567B2 (en) * 2011-12-20 2014-11-18 Honeywell International Inc. Double-ended tuning fork with outrigger excitation
CN103116037B (zh) * 2013-01-21 2015-06-03 东南大学 石英振梁加速度计及其制作方法
US9527733B2 (en) 2014-11-07 2016-12-27 The Chinese University Of Hong Kong Method and apparatus for dynamic-tuning
US10823754B2 (en) 2014-11-14 2020-11-03 Honeywell International Inc. Accelerometer with strain compensation
US9689888B2 (en) * 2014-11-14 2017-06-27 Honeywell International Inc. In-plane vibrating beam accelerometer
CN106290982B (zh) * 2016-07-29 2019-05-17 中国科学技术大学 一种加速度计及其制作方法
GB2556040A (en) * 2016-11-10 2018-05-23 Geometric Design Ltd Vibrating-element force transducer
CN109617435A (zh) * 2019-01-28 2019-04-12 北京航空航天大学 一种基于机械振动的电能变换电路和变换方法

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Also Published As

Publication number Publication date
EP0412140A1 (de) 1991-02-13
JP2501096Y2 (ja) 1996-06-12
EP0412140A4 (en) 1992-01-15
DE69009340D1 (de) 1994-07-07
EP0412140B1 (de) 1994-06-01
CN1054485A (zh) 1991-09-11
IL93412A0 (en) 1990-11-29
WO1990010205A1 (en) 1990-09-07
US4901586A (en) 1990-02-20
CA2010242A1 (en) 1990-08-27
JPH03501529A (ja) 1991-04-04
JPH0744828U (ja) 1995-11-28

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Legal Events

Date Code Title Description
8380 Miscellaneous part iii

Free format text: DER INHABER IST ZU AENDERN IN: ALLIEDSIGNAL, INC., MORRISTOWN, N.J., US

8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF