DE60000562D1 - Siliciumnitridkeramik und Zusammensetzung auf Siliciumbasis sowie ihr Herstellungsverfahren - Google Patents

Siliciumnitridkeramik und Zusammensetzung auf Siliciumbasis sowie ihr Herstellungsverfahren

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Publication number
DE60000562D1
DE60000562D1 DE60000562T DE60000562T DE60000562D1 DE 60000562 D1 DE60000562 D1 DE 60000562D1 DE 60000562 T DE60000562 T DE 60000562T DE 60000562 T DE60000562 T DE 60000562T DE 60000562 D1 DE60000562 D1 DE 60000562D1
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Germany
Prior art keywords
silicon
manufacturing process
based composition
nitride ceramic
silicon nitride
Prior art date
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Expired - Fee Related
Application number
DE60000562T
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English (en)
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DE60000562T2 (de
Inventor
Michimasa Miyanaga
Seiji Nakahata
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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Publication of DE60000562D1 publication Critical patent/DE60000562D1/de
Publication of DE60000562T2 publication Critical patent/DE60000562T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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DE60000562T 1999-09-06 2000-09-06 Siliciumnitridkeramik und Zusammensetzung auf Siliciumbasis sowie ihr Herstellungsverfahren Expired - Fee Related DE60000562T2 (de)

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