DE50012305D1 - Monochromatische Röntgenstrahlenquelle - Google Patents
Monochromatische RöntgenstrahlenquelleInfo
- Publication number
- DE50012305D1 DE50012305D1 DE50012305T DE50012305T DE50012305D1 DE 50012305 D1 DE50012305 D1 DE 50012305D1 DE 50012305 T DE50012305 T DE 50012305T DE 50012305 T DE50012305 T DE 50012305T DE 50012305 D1 DE50012305 D1 DE 50012305D1
- Authority
- DE
- Germany
- Prior art keywords
- monochromatic
- ray source
- ray
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
- H01J35/186—Windows used as targets or X-ray converters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/08—Targets (anodes) and X-ray converters
- H01J2235/081—Target material
- H01J2235/082—Fluids, e.g. liquids, gases
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE50012305T DE50012305D1 (de) | 1999-11-18 | 2000-11-09 | Monochromatische Röntgenstrahlenquelle |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19955392A DE19955392A1 (de) | 1999-11-18 | 1999-11-18 | Monochromatische Röntgenstrahlenquelle |
DE50012305T DE50012305D1 (de) | 1999-11-18 | 2000-11-09 | Monochromatische Röntgenstrahlenquelle |
Publications (1)
Publication Number | Publication Date |
---|---|
DE50012305D1 true DE50012305D1 (de) | 2006-04-27 |
Family
ID=7929407
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19955392A Withdrawn DE19955392A1 (de) | 1999-11-18 | 1999-11-18 | Monochromatische Röntgenstrahlenquelle |
DE50012305T Expired - Lifetime DE50012305D1 (de) | 1999-11-18 | 2000-11-09 | Monochromatische Röntgenstrahlenquelle |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19955392A Withdrawn DE19955392A1 (de) | 1999-11-18 | 1999-11-18 | Monochromatische Röntgenstrahlenquelle |
Country Status (4)
Country | Link |
---|---|
US (1) | US6560313B1 (de) |
EP (1) | EP1102302B1 (de) |
JP (1) | JP2001155670A (de) |
DE (2) | DE19955392A1 (de) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10129463A1 (de) * | 2001-06-19 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit einem Flüssigmetall-Target |
DE10130070A1 (de) * | 2001-06-21 | 2003-01-02 | Philips Corp Intellectual Pty | Röntgenstrahler mit Flüssigmetall-Target |
DE10147473C2 (de) * | 2001-09-25 | 2003-09-25 | Siemens Ag | Drehanodenröntgenröhre |
AU2003252819A1 (en) * | 2002-03-08 | 2003-09-22 | Koninklijke Philips Electronics N.V. | A device for generating x-rays having a liquid metal anode |
US7180981B2 (en) * | 2002-04-08 | 2007-02-20 | Nanodynamics-88, Inc. | High quantum energy efficiency X-ray tube and targets |
JP2007503703A (ja) * | 2003-05-19 | 2007-02-22 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 蛍光x線源 |
GB2403388A (en) * | 2003-06-24 | 2004-12-29 | Secr Defence | X-ray inspection system having X-ray source with compound fluorescent secondary target |
DE102004013620B4 (de) * | 2004-03-19 | 2008-12-04 | GE Homeland Protection, Inc., Newark | Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers |
DE102004013618B4 (de) * | 2004-03-19 | 2007-07-26 | Yxlon International Security Gmbh | Verfahren zum Betrieb einer magnetohydrodynamischen Pumpe, Flüssigmetallanode für eine Röntgenquelle sowie Röntgenstrahler |
DE102004015590B4 (de) * | 2004-03-30 | 2008-10-09 | GE Homeland Protection, Inc., Newark | Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul |
WO2005101450A1 (en) * | 2004-04-13 | 2005-10-27 | Koninklijke Philips Electronics N.V. | A device for generating x-rays having a liquid metal anode |
JP4337648B2 (ja) | 2004-06-24 | 2009-09-30 | 株式会社ニコン | Euv光源、euv露光装置、及び半導体デバイスの製造方法 |
JP4683231B2 (ja) | 2004-06-24 | 2011-05-18 | 株式会社ニコン | Euv光源、euv露光装置、及び半導体デバイスの製造方法 |
US7319733B2 (en) * | 2004-09-27 | 2008-01-15 | General Electric Company | System and method for imaging using monoenergetic X-ray sources |
EP1988564A4 (de) | 2006-02-01 | 2011-04-20 | Toshiba Electron Tubes & Devic | Röntgenquelle und fluoreszenz-röntgenanalysevorrichtung |
US7634052B2 (en) * | 2006-10-24 | 2009-12-15 | Thermo Niton Analyzers Llc | Two-stage x-ray concentrator |
US7629593B2 (en) * | 2007-06-28 | 2009-12-08 | Asml Netherlands B.V. | Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method |
DE102008026938A1 (de) * | 2008-06-05 | 2009-12-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung |
EP2420112B1 (de) | 2009-04-16 | 2017-03-01 | Eric H. Silver | Monochromatische röntgenvorrichtung |
US20150117599A1 (en) | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
US9390881B2 (en) | 2013-09-19 | 2016-07-12 | Sigray, Inc. | X-ray sources using linear accumulation |
US10269528B2 (en) | 2013-09-19 | 2019-04-23 | Sigray, Inc. | Diverging X-ray sources using linear accumulation |
US9570265B1 (en) | 2013-12-05 | 2017-02-14 | Sigray, Inc. | X-ray fluorescence system with high flux and high flux density |
US9449781B2 (en) | 2013-12-05 | 2016-09-20 | Sigray, Inc. | X-ray illuminators with high flux and high flux density |
US10297359B2 (en) | 2013-09-19 | 2019-05-21 | Sigray, Inc. | X-ray illumination system with multiple target microstructures |
US9448190B2 (en) | 2014-06-06 | 2016-09-20 | Sigray, Inc. | High brightness X-ray absorption spectroscopy system |
US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
DE102013220189A1 (de) * | 2013-10-07 | 2015-04-23 | Siemens Aktiengesellschaft | Röntgenquelle und Verfahren zur Erzeugung von Röntgenstrahlung |
USRE48612E1 (en) | 2013-10-31 | 2021-06-29 | Sigray, Inc. | X-ray interferometric imaging system |
US10304580B2 (en) | 2013-10-31 | 2019-05-28 | Sigray, Inc. | Talbot X-ray microscope |
US9823203B2 (en) | 2014-02-28 | 2017-11-21 | Sigray, Inc. | X-ray surface analysis and measurement apparatus |
US9594036B2 (en) | 2014-02-28 | 2017-03-14 | Sigray, Inc. | X-ray surface analysis and measurement apparatus |
US10401309B2 (en) | 2014-05-15 | 2019-09-03 | Sigray, Inc. | X-ray techniques using structured illumination |
US10352880B2 (en) | 2015-04-29 | 2019-07-16 | Sigray, Inc. | Method and apparatus for x-ray microscopy |
US10295486B2 (en) | 2015-08-18 | 2019-05-21 | Sigray, Inc. | Detector for X-rays with high spatial and high spectral resolution |
US10247683B2 (en) | 2016-12-03 | 2019-04-02 | Sigray, Inc. | Material measurement techniques using multiple X-ray micro-beams |
WO2018175570A1 (en) | 2017-03-22 | 2018-09-27 | Sigray, Inc. | Method of performing x-ray spectroscopy and x-ray absorption spectrometer system |
KR20240055138A (ko) | 2017-05-19 | 2024-04-26 | 이매진 싸이언티픽, 인크. | 단색 엑스선 영상 시스템 및 방법 |
CA3129632A1 (en) * | 2018-02-09 | 2019-08-15 | Imagine Scientific, Inc. | Monochromatic x-ray imaging systems and methods |
US10818467B2 (en) | 2018-02-09 | 2020-10-27 | Imagine Scientific, Inc. | Monochromatic x-ray imaging systems and methods |
US10578566B2 (en) | 2018-04-03 | 2020-03-03 | Sigray, Inc. | X-ray emission spectrometer system |
US10845491B2 (en) | 2018-06-04 | 2020-11-24 | Sigray, Inc. | Energy-resolving x-ray detection system |
GB2591630B (en) | 2018-07-26 | 2023-05-24 | Sigray Inc | High brightness x-ray reflection source |
US10656105B2 (en) | 2018-08-06 | 2020-05-19 | Sigray, Inc. | Talbot-lau x-ray source and interferometric system |
DE112019004433T5 (de) | 2018-09-04 | 2021-05-20 | Sigray, Inc. | System und verfahren für röntgenstrahlfluoreszenz mit filterung |
CN112823280A (zh) | 2018-09-07 | 2021-05-18 | 斯格瑞公司 | 用于深度可选x射线分析的系统和方法 |
WO2020056281A1 (en) | 2018-09-14 | 2020-03-19 | Imagine Scientific, Inc. | Monochromatic x-ray component systems and methods |
WO2021011209A1 (en) | 2019-07-15 | 2021-01-21 | Sigray, Inc. | X-ray source with rotating anode at atmospheric pressure |
US11170965B2 (en) | 2020-01-14 | 2021-11-09 | King Fahd University Of Petroleum And Minerals | System for generating X-ray beams from a liquid target |
US11882642B2 (en) | 2021-12-29 | 2024-01-23 | Innovicum Technology Ab | Particle based X-ray source |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB957506A (en) * | 1960-01-15 | 1964-05-06 | Cav Ltd | Cooling fans for vehicle engines |
US4048496A (en) * | 1972-05-08 | 1977-09-13 | Albert Richard D | Selectable wavelength X-ray source, spectrometer and assay method |
US3894239A (en) * | 1973-09-04 | 1975-07-08 | Raytheon Co | Monochromatic x-ray generator |
US3867637A (en) * | 1973-09-04 | 1975-02-18 | Raytheon Co | Extended monochromatic x-ray source |
US3919548A (en) * | 1974-07-24 | 1975-11-11 | David E Porter | X-Ray energy spectrometer system |
DE3586244T2 (de) * | 1984-12-26 | 2000-04-20 | Toshiba Kawasaki Kk | Vorrichtung zur Erzeugung von Weich-Röntgenstrahlen durch ein Hochenergiebündel. |
US4953191A (en) * | 1989-07-24 | 1990-08-28 | The United States Of America As Represented By The United States Department Of Energy | High intensity x-ray source using liquid gallium target |
DE19639241C2 (de) * | 1996-09-24 | 1998-07-23 | Siemens Ag | Monochromatische Röntgenstrahlenquelle |
DE19808342C1 (de) * | 1998-02-27 | 1999-08-19 | Siemens Ag | Abschaltbare Fluoreszenz-Röntgenstrahlenquelle |
DE19805290C2 (de) * | 1998-02-10 | 1999-12-09 | Siemens Ag | Monochromatische Röntgenstrahlenquelle |
DE19821939A1 (de) * | 1998-05-15 | 1999-11-18 | Philips Patentverwaltung | Röntgenstrahler mit einem Flüssigmetall-Target |
-
1999
- 1999-11-18 DE DE19955392A patent/DE19955392A1/de not_active Withdrawn
-
2000
- 2000-11-09 DE DE50012305T patent/DE50012305D1/de not_active Expired - Lifetime
- 2000-11-09 EP EP00203920A patent/EP1102302B1/de not_active Expired - Lifetime
- 2000-11-15 JP JP2000348545A patent/JP2001155670A/ja active Pending
- 2000-11-16 US US09/713,877 patent/US6560313B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6560313B1 (en) | 2003-05-06 |
JP2001155670A (ja) | 2001-06-08 |
EP1102302A1 (de) | 2001-05-23 |
DE19955392A1 (de) | 2001-05-23 |
EP1102302B1 (de) | 2006-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PANALYTICAL B.V., ALMELO, NL |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: PATENTANWAELTE RUFF, WILHELM, BEIER, DAUSTER & PAR |