DE50012305D1 - Monochromatische Röntgenstrahlenquelle - Google Patents

Monochromatische Röntgenstrahlenquelle

Info

Publication number
DE50012305D1
DE50012305D1 DE50012305T DE50012305T DE50012305D1 DE 50012305 D1 DE50012305 D1 DE 50012305D1 DE 50012305 T DE50012305 T DE 50012305T DE 50012305 T DE50012305 T DE 50012305T DE 50012305 D1 DE50012305 D1 DE 50012305D1
Authority
DE
Germany
Prior art keywords
monochromatic
ray source
ray
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE50012305T
Other languages
English (en)
Inventor
Geoffrey Prof Harding
Bernd Ulmer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Malvern Panalytical BV
Original Assignee
Philips Intellectual Property and Standards GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Intellectual Property and Standards GmbH filed Critical Philips Intellectual Property and Standards GmbH
Priority to DE50012305T priority Critical patent/DE50012305D1/de
Application granted granted Critical
Publication of DE50012305D1 publication Critical patent/DE50012305D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/16Vessels; Containers; Shields associated therewith
    • H01J35/18Windows
    • H01J35/186Windows used as targets or X-ray converters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00X-ray tubes
    • H01J2235/08Targets (anodes) and X-ray converters
    • H01J2235/081Target material
    • H01J2235/082Fluids, e.g. liquids, gases
DE50012305T 1999-11-18 2000-11-09 Monochromatische Röntgenstrahlenquelle Expired - Lifetime DE50012305D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE50012305T DE50012305D1 (de) 1999-11-18 2000-11-09 Monochromatische Röntgenstrahlenquelle

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19955392A DE19955392A1 (de) 1999-11-18 1999-11-18 Monochromatische Röntgenstrahlenquelle
DE50012305T DE50012305D1 (de) 1999-11-18 2000-11-09 Monochromatische Röntgenstrahlenquelle

Publications (1)

Publication Number Publication Date
DE50012305D1 true DE50012305D1 (de) 2006-04-27

Family

ID=7929407

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19955392A Withdrawn DE19955392A1 (de) 1999-11-18 1999-11-18 Monochromatische Röntgenstrahlenquelle
DE50012305T Expired - Lifetime DE50012305D1 (de) 1999-11-18 2000-11-09 Monochromatische Röntgenstrahlenquelle

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19955392A Withdrawn DE19955392A1 (de) 1999-11-18 1999-11-18 Monochromatische Röntgenstrahlenquelle

Country Status (4)

Country Link
US (1) US6560313B1 (de)
EP (1) EP1102302B1 (de)
JP (1) JP2001155670A (de)
DE (2) DE19955392A1 (de)

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DE10129463A1 (de) * 2001-06-19 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit einem Flüssigmetall-Target
DE10130070A1 (de) * 2001-06-21 2003-01-02 Philips Corp Intellectual Pty Röntgenstrahler mit Flüssigmetall-Target
DE10147473C2 (de) * 2001-09-25 2003-09-25 Siemens Ag Drehanodenröntgenröhre
AU2003252819A1 (en) * 2002-03-08 2003-09-22 Koninklijke Philips Electronics N.V. A device for generating x-rays having a liquid metal anode
US7180981B2 (en) * 2002-04-08 2007-02-20 Nanodynamics-88, Inc. High quantum energy efficiency X-ray tube and targets
JP2007503703A (ja) * 2003-05-19 2007-02-22 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 蛍光x線源
GB2403388A (en) * 2003-06-24 2004-12-29 Secr Defence X-ray inspection system having X-ray source with compound fluorescent secondary target
DE102004013620B4 (de) * 2004-03-19 2008-12-04 GE Homeland Protection, Inc., Newark Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers
DE102004013618B4 (de) * 2004-03-19 2007-07-26 Yxlon International Security Gmbh Verfahren zum Betrieb einer magnetohydrodynamischen Pumpe, Flüssigmetallanode für eine Röntgenquelle sowie Röntgenstrahler
DE102004015590B4 (de) * 2004-03-30 2008-10-09 GE Homeland Protection, Inc., Newark Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul
WO2005101450A1 (en) * 2004-04-13 2005-10-27 Koninklijke Philips Electronics N.V. A device for generating x-rays having a liquid metal anode
JP4337648B2 (ja) 2004-06-24 2009-09-30 株式会社ニコン Euv光源、euv露光装置、及び半導体デバイスの製造方法
JP4683231B2 (ja) 2004-06-24 2011-05-18 株式会社ニコン Euv光源、euv露光装置、及び半導体デバイスの製造方法
US7319733B2 (en) * 2004-09-27 2008-01-15 General Electric Company System and method for imaging using monoenergetic X-ray sources
EP1988564A4 (de) 2006-02-01 2011-04-20 Toshiba Electron Tubes & Devic Röntgenquelle und fluoreszenz-röntgenanalysevorrichtung
US7634052B2 (en) * 2006-10-24 2009-12-15 Thermo Niton Analyzers Llc Two-stage x-ray concentrator
US7629593B2 (en) * 2007-06-28 2009-12-08 Asml Netherlands B.V. Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method
DE102008026938A1 (de) * 2008-06-05 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungsquelle und Verfahren zum Erzeugen von Röntgenstrahlung
EP2420112B1 (de) 2009-04-16 2017-03-01 Eric H. Silver Monochromatische röntgenvorrichtung
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US9390881B2 (en) 2013-09-19 2016-07-12 Sigray, Inc. X-ray sources using linear accumulation
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
DE102013220189A1 (de) * 2013-10-07 2015-04-23 Siemens Aktiengesellschaft Röntgenquelle und Verfahren zur Erzeugung von Röntgenstrahlung
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
WO2018175570A1 (en) 2017-03-22 2018-09-27 Sigray, Inc. Method of performing x-ray spectroscopy and x-ray absorption spectrometer system
KR20240055138A (ko) 2017-05-19 2024-04-26 이매진 싸이언티픽, 인크. 단색 엑스선 영상 시스템 및 방법
CA3129632A1 (en) * 2018-02-09 2019-08-15 Imagine Scientific, Inc. Monochromatic x-ray imaging systems and methods
US10818467B2 (en) 2018-02-09 2020-10-27 Imagine Scientific, Inc. Monochromatic x-ray imaging systems and methods
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
DE112019004433T5 (de) 2018-09-04 2021-05-20 Sigray, Inc. System und verfahren für röntgenstrahlfluoreszenz mit filterung
CN112823280A (zh) 2018-09-07 2021-05-18 斯格瑞公司 用于深度可选x射线分析的系统和方法
WO2020056281A1 (en) 2018-09-14 2020-03-19 Imagine Scientific, Inc. Monochromatic x-ray component systems and methods
WO2021011209A1 (en) 2019-07-15 2021-01-21 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
US11170965B2 (en) 2020-01-14 2021-11-09 King Fahd University Of Petroleum And Minerals System for generating X-ray beams from a liquid target
US11882642B2 (en) 2021-12-29 2024-01-23 Innovicum Technology Ab Particle based X-ray source

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GB957506A (en) * 1960-01-15 1964-05-06 Cav Ltd Cooling fans for vehicle engines
US4048496A (en) * 1972-05-08 1977-09-13 Albert Richard D Selectable wavelength X-ray source, spectrometer and assay method
US3894239A (en) * 1973-09-04 1975-07-08 Raytheon Co Monochromatic x-ray generator
US3867637A (en) * 1973-09-04 1975-02-18 Raytheon Co Extended monochromatic x-ray source
US3919548A (en) * 1974-07-24 1975-11-11 David E Porter X-Ray energy spectrometer system
DE3586244T2 (de) * 1984-12-26 2000-04-20 Toshiba Kawasaki Kk Vorrichtung zur Erzeugung von Weich-Röntgenstrahlen durch ein Hochenergiebündel.
US4953191A (en) * 1989-07-24 1990-08-28 The United States Of America As Represented By The United States Department Of Energy High intensity x-ray source using liquid gallium target
DE19639241C2 (de) * 1996-09-24 1998-07-23 Siemens Ag Monochromatische Röntgenstrahlenquelle
DE19808342C1 (de) * 1998-02-27 1999-08-19 Siemens Ag Abschaltbare Fluoreszenz-Röntgenstrahlenquelle
DE19805290C2 (de) * 1998-02-10 1999-12-09 Siemens Ag Monochromatische Röntgenstrahlenquelle
DE19821939A1 (de) * 1998-05-15 1999-11-18 Philips Patentverwaltung Röntgenstrahler mit einem Flüssigmetall-Target

Also Published As

Publication number Publication date
US6560313B1 (en) 2003-05-06
JP2001155670A (ja) 2001-06-08
EP1102302A1 (de) 2001-05-23
DE19955392A1 (de) 2001-05-23
EP1102302B1 (de) 2006-03-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANALYTICAL B.V., ALMELO, NL

8328 Change in the person/name/address of the agent

Representative=s name: PATENTANWAELTE RUFF, WILHELM, BEIER, DAUSTER & PAR