DE60041906D1 - Kombinatorisches röntgendiffraktometer - Google Patents

Kombinatorisches röntgendiffraktometer

Info

Publication number
DE60041906D1
DE60041906D1 DE60041906T DE60041906T DE60041906D1 DE 60041906 D1 DE60041906 D1 DE 60041906D1 DE 60041906 T DE60041906 T DE 60041906T DE 60041906 T DE60041906 T DE 60041906T DE 60041906 D1 DE60041906 D1 DE 60041906D1
Authority
DE
Germany
Prior art keywords
gradometer
combinational
ray
ray gradometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60041906T
Other languages
English (en)
Inventor
Hideomi Koinuma
Masashi Kawasaki
Kazuhiko Omote
Tetsuo Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Japan Science and Technology Agency
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Science and Technology Agency, Rigaku Denki Co Ltd, Rigaku Corp filed Critical Japan Science and Technology Agency
Application granted granted Critical
Publication of DE60041906D1 publication Critical patent/DE60041906D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00277—Apparatus
    • B01J2219/00497—Features relating to the solid phase supports
    • B01J2219/00527—Sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00585—Parallel processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00596—Solid-phase processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00605—Making arrays on substantially continuous surfaces the compounds being directly bound or immobilised to solid supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00605—Making arrays on substantially continuous surfaces the compounds being directly bound or immobilised to solid supports
    • B01J2219/00612—Making arrays on substantially continuous surfaces the compounds being directly bound or immobilised to solid supports the surface being inorganic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00659—Two-dimensional arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/0068—Means for controlling the apparatus of the process
    • B01J2219/00686—Automatic
    • B01J2219/00689—Automatic using computers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/0068—Means for controlling the apparatus of the process
    • B01J2219/00702—Processes involving means for analysing and characterising the products
    • B01J2219/00707—Processes involving means for analysing and characterising the products separated from the reactor apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718—Type of compounds synthesised
    • B01J2219/00756—Compositions, e.g. coatings, crystals, formulations

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
DE60041906T 1999-05-28 2000-05-22 Kombinatorisches röntgendiffraktometer Expired - Lifetime DE60041906D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14921399A JP3373803B2 (ja) 1999-05-28 1999-05-28 コンビナトリアルｘ線回折装置
PCT/JP2000/003258 WO2000073773A1 (fr) 1999-05-28 2000-05-22 Appareil de diffraction a rayons x combinatoire

Publications (1)

Publication Number Publication Date
DE60041906D1 true DE60041906D1 (de) 2009-05-14

Family

ID=15470324

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60041906T Expired - Lifetime DE60041906D1 (de) 1999-05-28 2000-05-22 Kombinatorisches röntgendiffraktometer

Country Status (5)

Country Link
US (1) US6459763B1 (de)
EP (1) EP1102061B1 (de)
JP (1) JP3373803B2 (de)
DE (1) DE60041906D1 (de)
WO (1) WO2000073773A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6751287B1 (en) * 1998-05-15 2004-06-15 The Trustees Of The Stevens Institute Of Technology Method and apparatus for x-ray analysis of particle size (XAPS)
CA2424893A1 (en) * 2000-10-19 2002-07-25 Structural Genomix, Inc. Apparatus and method for identification of crystals by in-situ x-ray diffraction
US7130747B1 (en) * 2001-05-31 2006-10-31 Los Alamos National Security, Llc High throughput screening of ligand binding to macromolecules using high resolution powder diffraction
WO2003081222A1 (en) * 2002-03-19 2003-10-02 X-Ray Optical Systems, Inc. Screening of combinatorial library using x-ray analysis
US6718008B1 (en) * 2002-04-22 2004-04-06 Bruker Axs, Inc. X-ray diffraction screening system with retractable x-ray shield
JP2005534927A (ja) * 2002-08-06 2005-11-17 エスエスシーアイ，インコーポレイティド ファンダメンタルパラメータ法を用いたｘ線回折パターンの比較法
DE10317678A1 (de) * 2003-04-17 2004-11-18 Bruker Axs Gmbh Röntgen-optisches System zum kombinatorischen Screening einer Probenbibliothek
US7076026B2 (en) * 2003-06-13 2006-07-11 Osmic, Inc. Beam conditioning system
US7023955B2 (en) 2003-08-12 2006-04-04 X-Ray Optical System, Inc. X-ray fluorescence system with apertured mask for analyzing patterned surfaces
US7269245B2 (en) * 2004-07-30 2007-09-11 Bruker Axs, Inc. Combinatorial screening system and X-ray diffraction and Raman spectroscopy
JP3912606B2 (ja) * 2004-10-26 2007-05-09 株式会社リガク Ｘ線薄膜検査装置と、プロダクトウエーハの薄膜検査装置およびその方法
JP4590601B2 (ja) * 2005-03-08 2010-12-01 独立行政法人物質・材料研究機構 ライブラリ分析装置
JP4994375B2 (ja) * 2005-08-01 2012-08-08 ザ リサーチ ファウンデーション オブ ステート ユニバーシティ オブ ニューヨーク 点焦点湾曲モノクロメータ光学体を使用するｘ線結像系
JP4688668B2 (ja) * 2005-10-07 2011-05-25 独立行政法人物質・材料研究機構 ライブラリ分析方法及びライブラリ分析装置
US8068582B2 (en) * 2007-02-23 2011-11-29 Passport Systems, Inc. Methods and systems for the directing and energy filtering of X-rays for non-intrusive inspection
US7801272B2 (en) * 2007-09-28 2010-09-21 Rigaku Corporation X-ray diffraction apparatus and X-ray diffraction method
JP5237186B2 (ja) * 2009-04-30 2013-07-17 株式会社リガク Ｘ線散乱測定装置およびｘ線散乱測定方法
US8243878B2 (en) * 2010-01-07 2012-08-14 Jordan Valley Semiconductors Ltd. High-resolution X-ray diffraction measurement with enhanced sensitivity
US8687766B2 (en) 2010-07-13 2014-04-01 Jordan Valley Semiconductors Ltd. Enhancing accuracy of fast high-resolution X-ray diffractometry
US8437450B2 (en) 2010-12-02 2013-05-07 Jordan Valley Semiconductors Ltd. Fast measurement of X-ray diffraction from tilted layers
US8903044B2 (en) * 2011-01-31 2014-12-02 Rigaku Corporation X-ray diffraction apparatus
US8781070B2 (en) 2011-08-11 2014-07-15 Jordan Valley Semiconductors Ltd. Detection of wafer-edge defects
JP6270214B2 (ja) * 2013-11-25 2018-01-31 株式会社リガク Ｘ線分析装置の光軸調整方法及びｘ線分析装置
JP6025211B2 (ja) * 2013-11-28 2016-11-16 株式会社リガク Ｘ線トポグラフィ装置
US9726624B2 (en) 2014-06-18 2017-08-08 Bruker Jv Israel Ltd. Using multiple sources/detectors for high-throughput X-ray topography measurement
KR102303973B1 (ko) 2014-12-22 2021-09-23 삼성전자주식회사 박막 형성 장치 및 이를 이용한 박막 형성 방법
JP6905748B2 (ja) * 2017-10-25 2021-07-21 株式会社リガク ソーラースリット、ｘ線回折装置および方法
JP7165400B2 (ja) * 2019-03-19 2022-11-04 株式会社リガク Ｘ線分析装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3663812A (en) * 1969-02-27 1972-05-16 Mc Donnell Douglas Corp X-ray spectrographic means having fixed analyzing and detecting means
DE2933047C2 (de) * 1979-08-16 1982-12-30 Stoe & Cie. GmbH, 6100 Darmstadt Verfahren und Vorrichtung der Röntgendiffraktion
US4821303A (en) * 1986-12-05 1989-04-11 The Dow Chemical Company Combined thermal analyzer and x-ray diffractometer
JP2720131B2 (ja) * 1992-05-15 1998-02-25 株式会社日立製作所 Ｘ線反射プロファイル測定方法及び装置
AU685950B2 (en) * 1994-06-25 1998-01-29 Panalytical B.V. Analysing a material sample
JPH1114561A (ja) * 1997-04-30 1999-01-22 Rigaku Corp Ｘ線測定装置およびその方法

Also Published As

Publication number Publication date
EP1102061A1 (de) 2001-05-23
US6459763B1 (en) 2002-10-01
EP1102061A4 (de) 2003-02-05
EP1102061B1 (de) 2009-04-01
JP3373803B2 (ja) 2003-02-04
WO2000073773A1 (fr) 2000-12-07
JP2000338061A (ja) 2000-12-08

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