DE4439519C1 - Vorrichtung und Verfahren zum Vakuumbedampfen von Folien - Google Patents
Vorrichtung und Verfahren zum Vakuumbedampfen von FolienInfo
- Publication number
- DE4439519C1 DE4439519C1 DE4439519A DE4439519A DE4439519C1 DE 4439519 C1 DE4439519 C1 DE 4439519C1 DE 4439519 A DE4439519 A DE 4439519A DE 4439519 A DE4439519 A DE 4439519A DE 4439519 C1 DE4439519 C1 DE 4439519C1
- Authority
- DE
- Germany
- Prior art keywords
- steam
- sources
- heating
- source
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 title description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 56
- 239000000463 material Substances 0.000 claims abstract description 32
- 238000007740 vapor deposition Methods 0.000 claims description 35
- 238000001704 evaporation Methods 0.000 claims description 22
- 230000008020 evaporation Effects 0.000 claims description 20
- 239000011888 foil Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- 230000006698 induction Effects 0.000 claims description 11
- 230000001681 protective effect Effects 0.000 claims description 10
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 238000010025 steaming Methods 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 4
- 238000009834 vaporization Methods 0.000 claims description 4
- 230000008016 vaporization Effects 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
- 239000003779 heat-resistant material Substances 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000005019 vapor deposition process Methods 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 230000001965 increasing effect Effects 0.000 description 8
- 239000007788 liquid Substances 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 238000005192 partition Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 238000000859 sublimation Methods 0.000 description 5
- 230000008022 sublimation Effects 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- 229910003862 HfB2 Inorganic materials 0.000 description 1
- 229910033181 TiB2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000011850 initial investigation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical group 0.000 description 1
- 239000010847 non-recyclable waste Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Medicines Containing Plant Substances (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4439519A DE4439519C1 (de) | 1994-11-04 | 1994-11-04 | Vorrichtung und Verfahren zum Vakuumbedampfen von Folien |
| IT95MI002254A IT1276064B1 (it) | 1994-11-04 | 1995-10-31 | Apparecchio e procedimento per la vaporizzazione sotto vuoto di lamine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE4439519A DE4439519C1 (de) | 1994-11-04 | 1994-11-04 | Vorrichtung und Verfahren zum Vakuumbedampfen von Folien |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE4439519C1 true DE4439519C1 (de) | 1996-04-25 |
Family
ID=6532547
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE4439519A Expired - Fee Related DE4439519C1 (de) | 1994-11-04 | 1994-11-04 | Vorrichtung und Verfahren zum Vakuumbedampfen von Folien |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE4439519C1 (ja) |
| IT (1) | IT1276064B1 (ja) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19720026A1 (de) * | 1997-05-13 | 1998-11-19 | Ruckh Martin Dr Ing | Linienförmige Verdampferquelle für Vakuum-Aufdampfanlagen |
| EP1466030A1 (en) * | 2001-12-18 | 2004-10-13 | Advanced Technology Materials, Inc. | Vaporiser/delivery vessel for volatile/thermally sensitive solid and liquid compounds |
| EP1662017A1 (de) * | 2004-11-20 | 2006-05-31 | Applied Films GmbH & Co. KG | Vorrichtung zum Verdampfen von Materialien |
| DE102004051290B4 (de) * | 2004-10-13 | 2007-07-12 | Creavac-Creative Vakuumbeschichtung Gmbh | Einrichtung zum Beschichten von Substraten durch Aufdampfen in einer evakuierbaren Bearbeitungskammer |
| DE10249151B4 (de) * | 2001-10-11 | 2009-11-05 | Creavac - Creative Vakuumbeschichtung Gmbh | Vorrichtung zur ein- oder mehrschichtigen Bedampfung von Substraten in einem einzigen Bedampfungsprozeß |
| US7905961B2 (en) | 2005-08-31 | 2011-03-15 | Samsung Mobile Display Co., Ltd. | Linear type deposition source |
| US7914621B2 (en) * | 2005-01-31 | 2011-03-29 | Samsung Mobile Display Co., Ltd. | Vapor deposition source and vapor deposition apparatus having the same |
| US8048229B2 (en) * | 2005-08-31 | 2011-11-01 | Samsung Mobile Display Co., Ltd. | Apparatus for depositing an organic layer and method for controlling a heating unit thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1021776A (ja) * | 1963-12-23 | 1966-03-09 | International Business Machines Corporation | |
| DE3530106A1 (de) * | 1985-08-23 | 1987-02-26 | Kempten Elektroschmelz Gmbh | Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen |
| DE3632027C1 (de) * | 1986-09-20 | 1988-02-18 | Rudnay Andre Dr De | Verfahren und Vakuumbedampfungsanlage zum Metallisieren von Folienoberflaechen |
| DE4104415C1 (ja) * | 1991-02-14 | 1992-06-04 | 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De |
-
1994
- 1994-11-04 DE DE4439519A patent/DE4439519C1/de not_active Expired - Fee Related
-
1995
- 1995-10-31 IT IT95MI002254A patent/IT1276064B1/it active IP Right Grant
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1021776A (ja) * | 1963-12-23 | 1966-03-09 | International Business Machines Corporation | |
| DE3530106A1 (de) * | 1985-08-23 | 1987-02-26 | Kempten Elektroschmelz Gmbh | Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen |
| DE3632027C1 (de) * | 1986-09-20 | 1988-02-18 | Rudnay Andre Dr De | Verfahren und Vakuumbedampfungsanlage zum Metallisieren von Folienoberflaechen |
| EP0282540A1 (de) * | 1986-09-20 | 1988-09-21 | Andre De Rudnay | Verfahren und vorrichtung zum metallisieren von folienoberflächen. |
| DE4104415C1 (ja) * | 1991-02-14 | 1992-06-04 | 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De |
Non-Patent Citations (3)
| Title |
|---|
| DE-Z: Coating 1984, S. 274-280 * |
| GB-Z: Vacuum 42(1991), No.10/11, S. 649-655 * |
| GB-Z: Vacuum 6(1959), S. 161-172 (Holland) * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19720026A1 (de) * | 1997-05-13 | 1998-11-19 | Ruckh Martin Dr Ing | Linienförmige Verdampferquelle für Vakuum-Aufdampfanlagen |
| DE19720026C2 (de) * | 1997-05-13 | 2000-08-10 | Martin Ruckh | Linienförmige Verdampferquelle für Vakuum-Aufdampfanlagen |
| DE10249151B4 (de) * | 2001-10-11 | 2009-11-05 | Creavac - Creative Vakuumbeschichtung Gmbh | Vorrichtung zur ein- oder mehrschichtigen Bedampfung von Substraten in einem einzigen Bedampfungsprozeß |
| EP1466030A1 (en) * | 2001-12-18 | 2004-10-13 | Advanced Technology Materials, Inc. | Vaporiser/delivery vessel for volatile/thermally sensitive solid and liquid compounds |
| EP1466030A4 (en) * | 2001-12-18 | 2008-07-23 | Advanced Tech Materials | SPRAYER / DISPENSER FOR SOLID COMPOUNDS AND VOLATILE / THERMOSENSITIVE LIQUIDS |
| DE102004051290B4 (de) * | 2004-10-13 | 2007-07-12 | Creavac-Creative Vakuumbeschichtung Gmbh | Einrichtung zum Beschichten von Substraten durch Aufdampfen in einer evakuierbaren Bearbeitungskammer |
| EP1662017A1 (de) * | 2004-11-20 | 2006-05-31 | Applied Films GmbH & Co. KG | Vorrichtung zum Verdampfen von Materialien |
| US7914621B2 (en) * | 2005-01-31 | 2011-03-29 | Samsung Mobile Display Co., Ltd. | Vapor deposition source and vapor deposition apparatus having the same |
| US7905961B2 (en) | 2005-08-31 | 2011-03-15 | Samsung Mobile Display Co., Ltd. | Linear type deposition source |
| US8048229B2 (en) * | 2005-08-31 | 2011-11-01 | Samsung Mobile Display Co., Ltd. | Apparatus for depositing an organic layer and method for controlling a heating unit thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| ITMI952254A0 (ja) | 1995-10-31 |
| ITMI952254A1 (it) | 1997-05-01 |
| IT1276064B1 (it) | 1997-10-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8100 | Publication of patent without earlier publication of application | ||
| D1 | Grant (no unexamined application published) patent law 81 | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |