IT1276064B1 - Apparecchio e procedimento per la vaporizzazione sotto vuoto di lamine - Google Patents

Apparecchio e procedimento per la vaporizzazione sotto vuoto di lamine

Info

Publication number
IT1276064B1
IT1276064B1 IT95MI002254A ITMI952254A IT1276064B1 IT 1276064 B1 IT1276064 B1 IT 1276064B1 IT 95MI002254 A IT95MI002254 A IT 95MI002254A IT MI952254 A ITMI952254 A IT MI952254A IT 1276064 B1 IT1276064 B1 IT 1276064B1
Authority
IT
Italy
Prior art keywords
foils
procedure
vacuum vaporization
vaporization
vacuum
Prior art date
Application number
IT95MI002254A
Other languages
English (en)
Inventor
Rudnay Andre De
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Publication of ITMI952254A0 publication Critical patent/ITMI952254A0/it
Publication of ITMI952254A1 publication Critical patent/ITMI952254A1/it
Application granted granted Critical
Publication of IT1276064B1 publication Critical patent/IT1276064B1/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Medicines Containing Plant Substances (AREA)
IT95MI002254A 1994-11-04 1995-10-31 Apparecchio e procedimento per la vaporizzazione sotto vuoto di lamine IT1276064B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4439519A DE4439519C1 (de) 1994-11-04 1994-11-04 Vorrichtung und Verfahren zum Vakuumbedampfen von Folien

Publications (3)

Publication Number Publication Date
ITMI952254A0 ITMI952254A0 (it) 1995-10-31
ITMI952254A1 ITMI952254A1 (it) 1997-05-01
IT1276064B1 true IT1276064B1 (it) 1997-10-24

Family

ID=6532547

Family Applications (1)

Application Number Title Priority Date Filing Date
IT95MI002254A IT1276064B1 (it) 1994-11-04 1995-10-31 Apparecchio e procedimento per la vaporizzazione sotto vuoto di lamine

Country Status (2)

Country Link
DE (1) DE4439519C1 (it)
IT (1) IT1276064B1 (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19720026C2 (de) * 1997-05-13 2000-08-10 Martin Ruckh Linienförmige Verdampferquelle für Vakuum-Aufdampfanlagen
DE10249151B4 (de) * 2001-10-11 2009-11-05 Creavac - Creative Vakuumbeschichtung Gmbh Vorrichtung zur ein- oder mehrschichtigen Bedampfung von Substraten in einem einzigen Bedampfungsprozeß
US20030111014A1 (en) * 2001-12-18 2003-06-19 Donatucci Matthew B. Vaporizer/delivery vessel for volatile/thermally sensitive solid and liquid compounds
DE102004051290B4 (de) * 2004-10-13 2007-07-12 Creavac-Creative Vakuumbeschichtung Gmbh Einrichtung zum Beschichten von Substraten durch Aufdampfen in einer evakuierbaren Bearbeitungskammer
ATE364098T1 (de) * 2004-11-20 2007-06-15 Applied Materials Gmbh & Co Kg Vorrichtung zum verdampfen von materialien
JP4440837B2 (ja) * 2005-01-31 2010-03-24 三星モバイルディスプレイ株式會社 蒸発源及びこれを採用した蒸着装置
KR100711885B1 (ko) * 2005-08-31 2007-04-25 삼성에스디아이 주식회사 유기 증착원 및 이의 가열원 제어방법
KR100645689B1 (ko) 2005-08-31 2006-11-14 삼성에스디아이 주식회사 선형 증착원

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3244857A (en) * 1963-12-23 1966-04-05 Ibm Vapor deposition source
DE3530106A1 (de) * 1985-08-23 1987-02-26 Kempten Elektroschmelz Gmbh Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen
DE3632027C1 (de) * 1986-09-20 1988-02-18 Rudnay Andre Dr De Verfahren und Vakuumbedampfungsanlage zum Metallisieren von Folienoberflaechen
DE4104415C1 (it) * 1991-02-14 1992-06-04 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De

Also Published As

Publication number Publication date
ITMI952254A1 (it) 1997-05-01
ITMI952254A0 (it) 1995-10-31
DE4439519C1 (de) 1996-04-25

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