DE3878228D1 - Verfahren zur reinigung von stickstoff-fluorid. - Google Patents

Verfahren zur reinigung von stickstoff-fluorid.

Info

Publication number
DE3878228D1
DE3878228D1 DE8888909616T DE3878228T DE3878228D1 DE 3878228 D1 DE3878228 D1 DE 3878228D1 DE 8888909616 T DE8888909616 T DE 8888909616T DE 3878228 T DE3878228 T DE 3878228T DE 3878228 D1 DE3878228 D1 DE 3878228D1
Authority
DE
Germany
Prior art keywords
nitrogen fluoride
purifying nitrogen
purifying
fluoride
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888909616T
Other languages
English (en)
Other versions
DE3878228T2 (de
Inventor
Yabe-Cho Hyakutake
Sako-Machi -Chome Hikos Harada
Sako-Machi -Chome Iwanaga
Sako-Machi -Chome Nishitsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Application granted granted Critical
Publication of DE3878228D1 publication Critical patent/DE3878228D1/de
Publication of DE3878228T2 publication Critical patent/DE3878228T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J1/00—Processes or apparatus for liquefying or solidifying gases or gaseous mixtures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/082—Compounds containing nitrogen and non-metals and optionally metals
    • C01B21/083—Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms
    • C01B21/0832—Binary compounds of nitrogen with halogens
    • C01B21/0835—Nitrogen trifluoride
    • C01B21/0837—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
DE8888909616T 1987-11-04 1988-11-04 Verfahren zur reinigung von stickstoff-fluorid. Expired - Lifetime DE3878228T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62277514A JPH0755807B2 (ja) 1987-11-04 1987-11-04 三弗化窒素の製造方法
PCT/JP1988/001120 WO1989004444A1 (en) 1987-11-04 1988-11-04 Process for liquefying, concentrating and purifying nitrogen trifluoride

Publications (2)

Publication Number Publication Date
DE3878228D1 true DE3878228D1 (de) 1993-03-18
DE3878228T2 DE3878228T2 (de) 1993-08-26

Family

ID=17584659

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888909616T Expired - Lifetime DE3878228T2 (de) 1987-11-04 1988-11-04 Verfahren zur reinigung von stickstoff-fluorid.

Country Status (6)

Country Link
US (1) US4975259A (de)
EP (1) EP0345354B1 (de)
JP (1) JPH0755807B2 (de)
KR (1) KR940001383B1 (de)
DE (1) DE3878228T2 (de)
WO (1) WO1989004444A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01261208A (ja) * 1988-04-11 1989-10-18 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
DE69018761T2 (de) * 1989-10-26 1995-12-07 Mitsui Toatsu Chemicals Methode zur Herstellung von Stickstofftrifluorid.
US5069690A (en) * 1991-02-21 1991-12-03 Air Products And Chemicals, Inc. Process for kinetic gas-solid chromatographic separations
US5426944A (en) * 1993-08-31 1995-06-27 American Air Liquide, Inc. Chemical purification for semiconductor processing by partial condensation
US5502969A (en) * 1995-02-16 1996-04-02 Praxair Technology, Inc. Cryogenic rectification system for fluorine compound recovery
JPH0929002A (ja) * 1995-07-17 1997-02-04 Teisan Kk ガス回収装置
JP3532345B2 (ja) * 1996-05-14 2004-05-31 日本エア・リキード株式会社 超高純度三弗化窒素製造方法及びその装置
US6458249B2 (en) * 1997-11-10 2002-10-01 E. I. Du Pont De Nemours And Company Process for purifying perfluorinated products
US5910294A (en) * 1997-11-17 1999-06-08 Air Products And Chemicals, Inc. Abatement of NF3 with metal oxalates
JP4357046B2 (ja) * 1999-10-01 2009-11-04 株式会社東芝 ガス回収装置
JP3905433B2 (ja) * 2002-07-11 2007-04-18 レール・リキード−ソシエテ・アノニム・ア・ディレクトワール・エ・コンセイユ・ドゥ・スールベイランス・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード フッ素ガス生成装置
US7413722B2 (en) * 2005-08-04 2008-08-19 Foosung Co., Ltd. Method and apparatus for manufacturing nitrogen trifluoride
KR100703875B1 (ko) * 2005-09-07 2007-04-04 주식회사 소디프신소재 삼불화질소의 정제방법
KR100742484B1 (ko) * 2005-12-02 2007-07-24 주식회사 효성 기화되는 불산을 최소화한 고순도 삼불화질소 제조용전해조 및 이를 이용한 삼불화 질소의 제조방법
FR2901713B1 (fr) * 2006-06-01 2008-07-11 Air Liquide Procede de distribution de produits precurseurs, notamment pyrophoriques
US8163262B1 (en) 2011-01-04 2012-04-24 Omotowa Bamidele A Method for production of nitrogen trifluoride from trimethylsilylamines
KR101245497B1 (ko) * 2011-10-27 2013-03-25 오씨아이머티리얼즈 주식회사 고비점 물질에 포함된 삼불화질소 가스의 회수장치 및 회수방법
JP5316656B2 (ja) 2012-01-27 2013-10-16 ダイキン工業株式会社 電力変換回路
JP5201276B1 (ja) 2012-01-27 2013-06-05 ダイキン工業株式会社 電力変換回路
KR101411733B1 (ko) * 2012-07-02 2014-06-25 최병구 삼불화질소 제조 방법
KR101462752B1 (ko) * 2013-01-24 2014-11-21 최병구 배가스 중의 삼불화질소 회수 방법
WO2015030761A1 (en) * 2013-08-29 2015-03-05 Halliburton Energy Services, Inc. Methods and systems for generating reactive fluoride species from a gaseous precursor in a subterranean formation for stimulation thereof
CN111056540B (zh) * 2019-12-25 2023-09-15 中船(邯郸)派瑞特种气体股份有限公司 一种电解nf3连续预纯化装置及连续预纯化方法
CN111039267B (zh) * 2019-12-29 2023-09-08 中船(邯郸)派瑞特种气体股份有限公司 一种预纯化电解制备的三氟化氮粗品的装置及方法
CN113606820B (zh) * 2021-08-27 2022-09-23 中船(邯郸)派瑞特种气体股份有限公司 一种直接与间接制冷相结合的三氟化氮电解气超低温冷阱装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3235474A (en) * 1961-10-02 1966-02-15 Air Prod & Chem Electrolytic method of producing nitrogen trifluoride
US3181305A (en) * 1963-04-10 1965-05-04 Carl W Schoenfelder Method for isolating nitrogen trifluoride from nitrous oxide and tetrafluorohydrazine
DE1963297C3 (de) * 1969-12-17 1975-04-30 Linde Ag, 6200 Wiesbaden Verfahren zum Erzeugen von Kälte
US4078907A (en) * 1970-02-18 1978-03-14 The United States Of America As Represented By The United States Department Of Energy Separation and purification of xenon
JPS5136759B2 (de) * 1971-12-13 1976-10-12
US4091081A (en) * 1977-04-19 1978-05-23 Air Products And Chemicals, Inc. Preparation of nitrogen trifluoride
JPS558926A (en) * 1978-07-03 1980-01-22 Bridgestone Corp Pneumatic tire for vehicle
JPS6071503A (ja) * 1983-09-27 1985-04-23 Central Glass Co Ltd Νｆ↓３の製造法
JPS61247609A (ja) * 1985-04-26 1986-11-04 Showa Denko Kk 三弗化窒素の精製方法
JPS6221724A (ja) * 1985-07-19 1987-01-30 Furukawa Electric Co Ltd:The ガラスパイプの内面研磨方法
JPS63306383A (ja) * 1987-06-04 1988-12-14 三井東圧化学株式会社 フッ化窒素の精製方法
DE3722163A1 (de) * 1987-07-04 1989-01-12 Kali Chemie Ag Verfahren zur herstellung von nf(pfeil abwaerts)3(pfeil abwaerts)

Also Published As

Publication number Publication date
DE3878228T2 (de) 1993-08-26
EP0345354A4 (de) 1990-03-12
JPH01122910A (ja) 1989-05-16
KR890701967A (ko) 1989-12-22
KR940001383B1 (ko) 1994-02-21
WO1989004444A1 (en) 1989-05-18
JPH0755807B2 (ja) 1995-06-14
EP0345354A1 (de) 1989-12-13
EP0345354B1 (de) 1993-02-03
US4975259A (en) 1990-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: MITSUI CHEMICALS, INC., TOKIO/TOKYO, JP