DE3876056D1 - Verfahren zur herstellung von mikrohohlraeumen und anwendung fuer einen elektrochemischen sensor und fuer einen gaschromatografen. - Google Patents

Verfahren zur herstellung von mikrohohlraeumen und anwendung fuer einen elektrochemischen sensor und fuer einen gaschromatografen.

Info

Publication number
DE3876056D1
DE3876056D1 DE8888402367T DE3876056T DE3876056D1 DE 3876056 D1 DE3876056 D1 DE 3876056D1 DE 8888402367 T DE8888402367 T DE 8888402367T DE 3876056 T DE3876056 T DE 3876056T DE 3876056 D1 DE3876056 D1 DE 3876056D1
Authority
DE
Germany
Prior art keywords
microholes
producing
application
electrochemical sensor
gas chromatographer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888402367T
Other languages
English (en)
Other versions
DE3876056T2 (de
Inventor
Didier Pribat
Joel Perret
Jean-Claude Rouffy
Gonzalo Velasco
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of DE3876056D1 publication Critical patent/DE3876056D1/de
Application granted granted Critical
Publication of DE3876056T2 publication Critical patent/DE3876056T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6052—Construction of the column body
    • G01N30/6073—Construction of the column body in open tubular form
    • G01N30/6078—Capillaries

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Carbon And Carbon Compounds (AREA)
DE8888402367T 1987-09-22 1988-09-20 Verfahren zur herstellung von mikrohohlraeumen und anwendung fuer einen elektrochemischen sensor und fuer einen gaschromatografen. Expired - Fee Related DE3876056T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8713058A FR2620868B1 (fr) 1987-09-22 1987-09-22 Procede de realisation de microcavites et application a un capteur electrochimique ainsi qu'a un chomatographe en phase gazeuse

Publications (2)

Publication Number Publication Date
DE3876056D1 true DE3876056D1 (de) 1992-12-24
DE3876056T2 DE3876056T2 (de) 1993-05-27

Family

ID=9355098

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888402367T Expired - Fee Related DE3876056T2 (de) 1987-09-22 1988-09-20 Verfahren zur herstellung von mikrohohlraeumen und anwendung fuer einen elektrochemischen sensor und fuer einen gaschromatografen.

Country Status (7)

Country Link
US (2) US4956073A (de)
EP (1) EP0309334B1 (de)
JP (1) JPH01132956A (de)
CA (1) CA1313898C (de)
DE (1) DE3876056T2 (de)
ES (1) ES2036273T3 (de)
FR (1) FR2620868B1 (de)

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US5246576A (en) * 1990-12-10 1993-09-21 Ppg Industries, Inc. Cathode in a layered circuit and electrochemical cell for a measurement of oxygen in fluids
US5544276A (en) * 1993-11-30 1996-08-06 Microsensors Technology, Inc. Miniature gas chromatograph with heated gas inlet fitting, heated tubing, and heated microvalve assembly
US5720798A (en) * 1996-04-30 1998-02-24 Hewlett-Packard Company Micromachined analyte trap for gas phase streams
FR2780808B1 (fr) 1998-07-03 2001-08-10 Thomson Csf Dispositif a emission de champ et procedes de fabrication
US6171378B1 (en) * 1999-08-05 2001-01-09 Sandia Corporation Chemical preconcentrator
US7410503B2 (en) * 2001-03-30 2008-08-12 Bioquest Prosthetics Llc Prosthetic foot with tunable performance
US6527835B1 (en) * 2001-12-21 2003-03-04 Sandia Corporation Chemical preconcentrator with integral thermal flow sensor
US6666907B1 (en) * 2002-01-31 2003-12-23 Sandia Corporation Temperature programmable microfabricated gas chromatography column
US7018343B2 (en) * 2002-04-05 2006-03-28 Allegiance Corporation Biopsy needle and biopsy device containing the same
US20040059186A1 (en) * 2002-09-19 2004-03-25 Amnon Weichselbaum Insemination device
US7147695B2 (en) * 2002-12-13 2006-12-12 New Jersey Institute Of Technology Microfabricated microconcentrator for sensors and gas chromatography
DE102004063084A1 (de) * 2004-12-28 2006-07-06 Robert Bosch Gmbh Sensorelement für einen Gassensor
DE102006062056A1 (de) * 2006-12-29 2008-07-03 Robert Bosch Gmbh Sensorelement mit unterdrückter Fettgasreaktion
JP2011203131A (ja) * 2010-03-25 2011-10-13 Keihin Corp 酸素濃度センサ入力装置
GB201018224D0 (en) * 2010-10-28 2010-12-15 Dna Electronics Chemical sensing device
US10307080B2 (en) 2014-03-07 2019-06-04 Spirosure, Inc. Respiratory monitor
US11300552B2 (en) 2017-03-01 2022-04-12 Caire Diagnostics Inc. Nitric oxide detection device with reducing gas

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA636078A (en) * 1962-02-06 Standard Oil Company Gas chromatography apparatus
DE1113319B (de) * 1959-03-09 1961-08-31 Nat Res Dev Trenneinrichtung fuer Gaschromatographen
CH399780A (fr) * 1963-04-30 1965-09-30 Interelectron S A Dispositif de chromatographie de partition en phase gazeuse
US3449938A (en) * 1967-08-03 1969-06-17 Univ Utah Method for separating and detecting fluid materials
US3417548A (en) * 1967-09-15 1968-12-24 Shell Oil Co Apparatus and method for performing a continuous chromatographic analysis
US3748833A (en) * 1972-03-14 1973-07-31 Foxboro Co Sample valve for chromatographic apparatus
US3949806A (en) * 1974-04-08 1976-04-13 Wolfgang Dunges Method and apparatus for refluxation in microliter scale
FR2441164A1 (fr) * 1978-11-07 1980-06-06 Thomson Csf Capteur electrochimique des concentrations relatives d'especes reactives dans un melange fluide
FR2444272A1 (fr) * 1978-12-12 1980-07-11 Thomson Csf Capteur electrochimique des concentrations d'especes dans un melange fluide du type a electrode de reference interne de pression partielle
JPS5593424A (en) * 1979-01-09 1980-07-15 Ogimura Sangyo Kk Method and apparatus for manufacturing meshed plastic film
FR2490021A1 (fr) * 1980-09-05 1982-03-12 Thomson Csf Dispositif du type cellule electrochimique a electrolyte solide et son procede de fabrication
FR2494445A1 (fr) * 1980-11-17 1982-05-21 Socapex Capteur electrochimique des concentrations d'especes dans un melange fluide et systeme de regulation de la richesse d'un melange air-carburant mettant en oeuvre un tel capteur
US4488920A (en) * 1982-05-18 1984-12-18 Williams International Corporation Process of making a ceramic heat exchanger element
JPS5958356A (ja) * 1982-09-28 1984-04-04 Fuji Electric Corp Res & Dev Ltd ガス分析機器の製造方法
JPS6086457A (ja) * 1983-10-19 1985-05-16 Hitachi Ltd エンジン制御用空燃比センサ
JPH0612354B2 (ja) * 1983-11-28 1994-02-16 株式会社日立製作所 酸素濃度測定装置の製造方法
JPS60142254A (ja) * 1983-12-28 1985-07-27 Sord Comput Corp ガス・クロマトグラフイ
US4575424A (en) * 1984-03-01 1986-03-11 Isco, Inc. Chromatographic flow cell and method of making it
JPS60229342A (ja) * 1984-04-27 1985-11-14 Sord Comput Corp 貫通孔を有するｎ形シリコンウエハ及びその製造方法
JPS60229340A (ja) * 1984-04-27 1985-11-14 Sord Comput Corp 貫通孔を有するｎ形シリコンウエハ及びその製造方法
JPS61233365A (ja) * 1984-12-15 1986-10-17 Sord Comput Corp キヤピラリイ・カラム用基板
JPS61233366A (ja) * 1984-12-15 1986-10-17 Sord Comput Corp キヤピラリイ・カラム用基板
JPS61142462A (ja) * 1984-12-15 1986-06-30 Sord Comput Corp キヤピラリイ・カラム用ガラス板
JPS61210631A (ja) * 1985-03-14 1986-09-18 Fujitsu Ltd 超微細管
JPS61212754A (ja) * 1985-03-18 1986-09-20 Hitachi Ltd 酸素センサの製造方法
DE3673563D1 (de) * 1985-04-19 1990-09-27 Hitachi Ltd Sauerstoffuehlerelement und verfahren zum herstellen desselben.
JPH0623727B2 (ja) * 1985-08-30 1994-03-30 日本碍子株式会社 電気化学的素子及びその製造方法
JPS62103569A (ja) * 1985-10-31 1987-05-14 Fujikura Ltd ガスクロマトグラフイ−用カラム
US4668374A (en) * 1986-07-07 1987-05-26 General Motors Corporation Gas sensor and method of fabricating same
US4935040A (en) * 1989-03-29 1990-06-19 The Perkin-Elmer Corporation Miniature devices useful for gas chromatography

Also Published As

Publication number Publication date
DE3876056T2 (de) 1993-05-27
FR2620868A1 (fr) 1989-03-24
EP0309334A1 (de) 1989-03-29
JPH01132956A (ja) 1989-05-25
EP0309334B1 (de) 1992-11-19
FR2620868B1 (fr) 1994-03-25
US5087275A (en) 1992-02-11
US4956073A (en) 1990-09-11
CA1313898C (fr) 1993-02-23
ES2036273T3 (es) 1993-05-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee