DE3875161T2 - Verfahren zur herstellung einer magnetischen aufzeichnungsplatte aus einem duennen film einer metallegierung mit einem hydrogenierten kohlenstoffueberzug. - Google Patents

Verfahren zur herstellung einer magnetischen aufzeichnungsplatte aus einem duennen film einer metallegierung mit einem hydrogenierten kohlenstoffueberzug.

Info

Publication number
DE3875161T2
DE3875161T2 DE8888107870T DE3875161T DE3875161T2 DE 3875161 T2 DE3875161 T2 DE 3875161T2 DE 8888107870 T DE8888107870 T DE 8888107870T DE 3875161 T DE3875161 T DE 3875161T DE 3875161 T2 DE3875161 T2 DE 3875161T2
Authority
DE
Germany
Prior art keywords
sputtering
magnetic layer
atmosphere
carbon
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888107870T
Other languages
German (de)
English (en)
Other versions
DE3875161D1 (de
Inventor
James Kent Howard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3875161D1 publication Critical patent/DE3875161D1/de
Publication of DE3875161T2 publication Critical patent/DE3875161T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/72—Protective coatings, e.g. anti-static or antifriction
    • G11B5/727—Inorganic carbon protective coating, e.g. graphite, diamond like carbon or doped carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
DE8888107870T 1987-06-02 1988-05-17 Verfahren zur herstellung einer magnetischen aufzeichnungsplatte aus einem duennen film einer metallegierung mit einem hydrogenierten kohlenstoffueberzug. Expired - Fee Related DE3875161T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/057,076 US4778582A (en) 1987-06-02 1987-06-02 Process for making a thin film metal alloy magnetic recording disk with a hydrogenated carbon overcoat
SG150994A SG150994G (en) 1987-06-02 1994-10-17 A process for making a thin film metal alloy magnetic recording disk with a hydrogenated carbon overcoat

Publications (2)

Publication Number Publication Date
DE3875161D1 DE3875161D1 (de) 1992-11-12
DE3875161T2 true DE3875161T2 (de) 1993-04-22

Family

ID=26664437

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888107870T Expired - Fee Related DE3875161T2 (de) 1987-06-02 1988-05-17 Verfahren zur herstellung einer magnetischen aufzeichnungsplatte aus einem duennen film einer metallegierung mit einem hydrogenierten kohlenstoffueberzug.

Country Status (6)

Country Link
US (1) US4778582A (enExample)
EP (1) EP0293662B1 (enExample)
JP (1) JPS63311626A (enExample)
DE (1) DE3875161T2 (enExample)
HK (1) HK139194A (enExample)
SG (1) SG150994G (enExample)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5275850A (en) * 1988-04-20 1994-01-04 Hitachi, Ltd. Process for producing a magnetic disk having a metal containing hard carbon coating by plasma chemical vapor deposition under a negative self bias
DE3821614A1 (de) * 1988-06-27 1989-12-28 Licentia Gmbh Deckschicht aus amorphem kohlenstoff auf einem substrat, verfahren zur herstellung der deckschicht und verwendung der deckschicht
US5030494A (en) * 1989-01-26 1991-07-09 International Business Machines Corporation Carbon overcoat for a thin film magnetic recording disk containing discrete clusters of tungsten (W) or tungsten carbide (WC) which project from the surface of the overcoat
US5074983A (en) * 1989-04-21 1991-12-24 Hmt Technology Corporation Thin film testing method
JP2623849B2 (ja) * 1989-08-25 1997-06-25 富士電機株式会社 磁気記録媒体の製造方法
JPH07110991B2 (ja) * 1989-10-02 1995-11-29 株式会社日立製作所 プラズマ処理装置およびプラズマ処理方法
US4960609A (en) * 1989-11-13 1990-10-02 International Business Machines Corporation Process for bonding lubricant to a thin film magnetic recording disk
US5045165A (en) * 1990-02-01 1991-09-03 Komag, Inc. Method for sputtering a hydrogen-doped carbon protective film on a magnetic disk
JP2566700B2 (ja) * 1991-04-08 1996-12-25 インターナショナル・ビジネス・マシーンズ・コーポレイション 薄膜記憶媒体上に潤滑剤を結合する方法
US5374463A (en) * 1991-10-22 1994-12-20 International Business Machines Corporation Magnetic recording disk having a contiguous fullerene film and a protective overcoat
JP2830544B2 (ja) * 1991-10-25 1998-12-02 松下電器産業株式会社 磁気記録媒体
JPH06145975A (ja) * 1992-03-20 1994-05-27 Komag Inc 炭素フィルムをスパタリングする方法及びその製造物
EP0576376B1 (en) * 1992-06-26 1998-05-06 Eastman Kodak Company Cobalt platinum magnetic film and method of fabrication thereof
US6287429B1 (en) * 1992-10-26 2001-09-11 Hoya Corporation Magnetic recording medium having an improved magnetic characteristic
US5637373A (en) * 1992-11-19 1997-06-10 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium
US6805941B1 (en) * 1992-11-19 2004-10-19 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium
US5525392A (en) * 1992-12-10 1996-06-11 International Business Machines Corporation Magnetic recording medium having a fluorinated polymeric protective layer formed by an ion beam
US5388017A (en) * 1993-01-29 1995-02-07 International Business Machines Corporation Disk file with air-bearing slider having skids
US5654850A (en) * 1993-05-18 1997-08-05 Applied Magnetics Corp. Carbon overcoat with electrically conductive adhesive layer for magnetic head sliders
US5336550A (en) * 1993-05-18 1994-08-09 Applied Magnetics Corporation Carbon overcoat for magnetic head sliders
EP0643385A3 (en) * 1993-09-12 1996-01-17 Fujitsu Ltd Magnetic recording medium, magnetic head and magnetic recording device.
US5569506A (en) * 1993-10-06 1996-10-29 International Business Machines Corporation Magnetic recording disk and disk drive with improved head-disk interface
US5830331A (en) * 1994-09-23 1998-11-03 Seagate Technology, Inc. Apparatus and method for sputtering carbon
US5785825A (en) * 1995-07-20 1998-07-28 Seagate Technology, Inc. Multi-phase overcoats for magnetic discs
US5729399A (en) * 1995-12-13 1998-03-17 International Business Machines Corporation Contact start/stop disk drive with minimized head-disk wear in textured landing zone
US5855746A (en) * 1996-02-28 1999-01-05 Western Digital Corporation Buffered nitrogenated carbon overcoat for data recording disks and method for manufacturing the same
US5942317A (en) * 1997-01-31 1999-08-24 International Business Machines Corporation Hydrogenated carbon thin films
JPH10330932A (ja) * 1997-05-28 1998-12-15 Anelva Corp スパッタリング装置
WO2000068941A1 (en) * 1999-05-11 2000-11-16 Hitachi Maxell, Ltd. Magnetic recording medium and its production method, and magnetic recorder
AU5611801A (en) * 2000-03-16 2001-09-24 Mat Gmbh Dresden Low-friction protective layers that reduce wear and tear and a method for depositing same
JP3892401B2 (ja) * 2003-01-20 2007-03-14 Ｈｏｙａ株式会社 垂直磁気記録媒体用ディスク基板の製造方法、並びに垂直磁気記録ディスクの製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4411963A (en) * 1976-10-29 1983-10-25 Aine Harry E Thin film recording and method of making
US4503125A (en) * 1979-10-01 1985-03-05 Xebec, Inc. Protective overcoating for magnetic recording discs and method for forming the same
JPS5987622A (ja) * 1982-11-09 1984-05-21 Ulvac Corp 磁気記録体並にその製造法
US4610911A (en) * 1983-11-03 1986-09-09 Hewlett-Packard Company Thin film magnetic recording media
JPS60155668A (ja) * 1984-01-26 1985-08-15 Denki Kagaku Kogyo Kk 磁気記憶媒体表面に炭化水素保護膜を形成する方法
JPS60156069A (ja) * 1984-01-26 1985-08-16 Matsushita Electric Ind Co Ltd 電子写真装置
JP2549361B2 (ja) * 1984-01-26 1996-10-30 電気化学工業株式会社 磁気記憶媒体
US4552820A (en) * 1984-04-25 1985-11-12 Lin Data Corporation Disc media
JPS6114102A (ja) * 1984-06-29 1986-01-22 Matsushita Electric Ind Co Ltd 水素化物の製造法
JP2594534B2 (ja) * 1984-11-13 1997-03-26 日本電気株式会社 磁気記憶体
US4774130A (en) * 1985-01-17 1988-09-27 Hitachi Metals, Ltd. Magnetic recording medium
CA1268250A (en) * 1985-02-11 1990-04-24 Anthony Wai Wu Overcoat for particulate magnetic recording disk
JPS61289530A (ja) * 1985-06-17 1986-12-19 Hitachi Ltd 磁気記録媒体
US4654276A (en) * 1986-04-29 1987-03-31 International Business Machines Corporation Magnetic recording medium with an underlayer and a cobalt-based magnetic layer

Also Published As

Publication number Publication date
SG150994G (en) 1995-03-17
JPH044658B2 (enExample) 1992-01-29
HK139194A (en) 1994-12-16
EP0293662B1 (en) 1992-10-07
EP0293662A3 (en) 1990-03-28
DE3875161D1 (de) 1992-11-12
JPS63311626A (ja) 1988-12-20
US4778582A (en) 1988-10-18
EP0293662A2 (en) 1988-12-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee