DE3832185A1 - Feuchtesensor und messanordnung zur messung der feuchte - Google Patents
Feuchtesensor und messanordnung zur messung der feuchteInfo
- Publication number
- DE3832185A1 DE3832185A1 DE3832185A DE3832185A DE3832185A1 DE 3832185 A1 DE3832185 A1 DE 3832185A1 DE 3832185 A DE3832185 A DE 3832185A DE 3832185 A DE3832185 A DE 3832185A DE 3832185 A1 DE3832185 A1 DE 3832185A1
- Authority
- DE
- Germany
- Prior art keywords
- refractive index
- moisture sensor
- light
- moisture
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 13
- 230000001419 dependent effect Effects 0.000 claims abstract description 5
- 238000002310 reflectometry Methods 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 125000006850 spacer group Chemical group 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000013461 design Methods 0.000 claims description 7
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 239000000835 fiber Substances 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 229920003023 plastic Polymers 0.000 claims description 3
- 230000010287 polarization Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 3
- 238000010168 coupling process Methods 0.000 claims 3
- 238000005859 coupling reaction Methods 0.000 claims 3
- 239000012876 carrier material Substances 0.000 claims 2
- 239000011358 absorbing material Substances 0.000 claims 1
- 230000001427 coherent effect Effects 0.000 claims 1
- 239000005304 optical glass Substances 0.000 claims 1
- 230000001629 suppression Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 239000003365 glass fiber Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000003570 air Substances 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 208000032365 Electromagnetic interference Diseases 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000004566 building material Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000035764 nutrition Effects 0.000 description 1
- 235000016709 nutrition Nutrition 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000004753 textile Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
- G01N21/81—Indicating humidity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3832185A DE3832185A1 (de) | 1988-09-22 | 1988-09-22 | Feuchtesensor und messanordnung zur messung der feuchte |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3832185A DE3832185A1 (de) | 1988-09-22 | 1988-09-22 | Feuchtesensor und messanordnung zur messung der feuchte |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3832185A1 true DE3832185A1 (de) | 1990-03-29 |
DE3832185C2 DE3832185C2 (enrdf_load_stackoverflow) | 1990-10-25 |
Family
ID=6363477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3832185A Granted DE3832185A1 (de) | 1988-09-22 | 1988-09-22 | Feuchtesensor und messanordnung zur messung der feuchte |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3832185A1 (enrdf_load_stackoverflow) |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0536656A1 (de) * | 1991-10-05 | 1993-04-14 | ULTRAKUST electronic GmbH | Feuchtesensor |
DE4200088A1 (de) * | 1992-01-04 | 1993-07-15 | Nahm Werner | Verfahren und vorrichtung zum nachweis physikalisch-chemischer oder biochemischer wechselwirkungen |
US5262842A (en) * | 1990-10-19 | 1993-11-16 | IOT Entwicklungsgesellschaft fur integrierte Optiktechnologie mbH | Optical sensor having a wave guide substrate with interferometer integrated therein |
EP0598341A1 (en) * | 1992-11-17 | 1994-05-25 | Hoechst Aktiengesellschaft | Optical sensor for detecting chemical species |
WO1997021092A1 (de) * | 1995-12-06 | 1997-06-12 | Ultrakust Electronic Gmbh | Optisches sensorelement |
DE19608428A1 (de) * | 1996-03-05 | 1997-09-11 | Forschungszentrum Juelich Gmbh | Analyseverfahren unter Verwendung von porösem Silicium zur Erfassung einer Substanz oder der Konzentration einer Substanz in Lösungen sowie eine Analyseeinrichtung für ein solches Verfahren |
EP0805970A4 (en) * | 1994-10-21 | 1998-11-04 | Protimeter Inc | PERIODICALLY COOLED DEW POINT MIRROR HYGROMETER WITH AN OPTICAL MIRROR MADE OF SAPPHIRE |
FR2813121A1 (fr) * | 2000-08-21 | 2002-02-22 | Claude Weisbuch | Dispositif perfectionne de support d'elements chromophores |
DE10148778A1 (de) * | 2001-10-02 | 2003-04-17 | Univ Braunschweig Tech | Verfahren und Anordnung zur Bestimmung der Beschaffenheit einer Probe |
WO2005111588A1 (en) * | 2004-03-24 | 2005-11-24 | 3M Innovative Properties Company | Colorimetric sensor |
WO2006042746A1 (de) * | 2004-10-19 | 2006-04-27 | Universität Tübingen | Verfahren zur untersuchung physikalischer, chemischer und biochemischer wechselwirkungen |
WO2009123836A1 (en) * | 2008-03-31 | 2009-10-08 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on mechanical membranes |
US7767143B2 (en) | 2006-06-27 | 2010-08-03 | 3M Innovative Properties Company | Colorimetric sensors |
US7787171B2 (en) | 2008-03-31 | 2010-08-31 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
US7787130B2 (en) | 2008-03-31 | 2010-08-31 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
US7929196B2 (en) | 2004-09-27 | 2011-04-19 | Qualcomm Mems Technologies, Inc. | System and method of implementation of interferometric modulators for display mirrors |
US8506902B2 (en) | 2002-09-30 | 2013-08-13 | 3M Innovative Properties Company | Colorimetric sensor |
CN103822903A (zh) * | 2014-03-10 | 2014-05-28 | 天津理工大学 | 一种基于无芯光纤的空气相对湿度测量仪 |
CN114649630A (zh) * | 2020-12-17 | 2022-06-21 | 保时捷股份公司 | 容纳高压电池的电池壳体、机动车辆及检查电池的方法 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4133125C1 (enrdf_load_stackoverflow) * | 1991-10-05 | 1993-02-18 | Ultrakust Electronic Gmbh, 8375 Gotteszell, De | |
DE19747343A1 (de) * | 1997-10-27 | 1999-05-06 | Jenoptik Jena Gmbh | Partialdrucksensor |
US7583429B2 (en) | 2004-09-27 | 2009-09-01 | Idc, Llc | Ornamental display device |
US8077326B1 (en) | 2008-03-31 | 2011-12-13 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
US8711361B2 (en) | 2009-11-05 | 2014-04-29 | Qualcomm, Incorporated | Methods and devices for detecting and measuring environmental conditions in high performance device packages |
DE102015115657B3 (de) | 2015-09-17 | 2017-02-09 | Harting Ag & Co. Kg | elektrisches Kontaktelement |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1983002327A1 (en) * | 1981-12-30 | 1983-07-07 | Kroo, Norbert | Procedure for the production of a humidity-sensitive interference mirror, and procedure and equipment for the measurement of the humidity using said mirror |
DE2112059C2 (de) * | 1970-03-12 | 1984-08-16 | Stanley Bennett Bedford Ohio Elliott | Vorrichtung zur Messung des Feuchtigkeitsgehaltes von Gasen und Verwendung der Vorrichtung als Thermometer |
DE3619017A1 (de) * | 1985-08-15 | 1987-02-26 | Kms Fusion Inc | Optisch-dielektrischer feuchtigkeitsmesser |
-
1988
- 1988-09-22 DE DE3832185A patent/DE3832185A1/de active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2112059C2 (de) * | 1970-03-12 | 1984-08-16 | Stanley Bennett Bedford Ohio Elliott | Vorrichtung zur Messung des Feuchtigkeitsgehaltes von Gasen und Verwendung der Vorrichtung als Thermometer |
WO1983002327A1 (en) * | 1981-12-30 | 1983-07-07 | Kroo, Norbert | Procedure for the production of a humidity-sensitive interference mirror, and procedure and equipment for the measurement of the humidity using said mirror |
DE3619017A1 (de) * | 1985-08-15 | 1987-02-26 | Kms Fusion Inc | Optisch-dielektrischer feuchtigkeitsmesser |
Cited By (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5262842A (en) * | 1990-10-19 | 1993-11-16 | IOT Entwicklungsgesellschaft fur integrierte Optiktechnologie mbH | Optical sensor having a wave guide substrate with interferometer integrated therein |
EP0536656A1 (de) * | 1991-10-05 | 1993-04-14 | ULTRAKUST electronic GmbH | Feuchtesensor |
DE4200088A1 (de) * | 1992-01-04 | 1993-07-15 | Nahm Werner | Verfahren und vorrichtung zum nachweis physikalisch-chemischer oder biochemischer wechselwirkungen |
EP0598341A1 (en) * | 1992-11-17 | 1994-05-25 | Hoechst Aktiengesellschaft | Optical sensor for detecting chemical species |
US5563707A (en) * | 1992-11-17 | 1996-10-08 | Hoechst Aktiengesellschaft | Interference enhanced optical sensor for detecting chemical species |
EP0805970A4 (en) * | 1994-10-21 | 1998-11-04 | Protimeter Inc | PERIODICALLY COOLED DEW POINT MIRROR HYGROMETER WITH AN OPTICAL MIRROR MADE OF SAPPHIRE |
US6007904A (en) * | 1995-12-06 | 1999-12-28 | Bartec Componenete Und Systeme Gmbh | Optical sensor element |
WO1997021092A1 (de) * | 1995-12-06 | 1997-06-12 | Ultrakust Electronic Gmbh | Optisches sensorelement |
DE19608428A1 (de) * | 1996-03-05 | 1997-09-11 | Forschungszentrum Juelich Gmbh | Analyseverfahren unter Verwendung von porösem Silicium zur Erfassung einer Substanz oder der Konzentration einer Substanz in Lösungen sowie eine Analyseeinrichtung für ein solches Verfahren |
US6130748A (en) * | 1996-03-05 | 2000-10-10 | Forschungszentrum Julich Gmbh | Chemical sensor based on porous silicon |
DE19608428C2 (de) * | 1996-03-05 | 2000-10-19 | Forschungszentrum Juelich Gmbh | Chemischer Sensor |
FR2813121A1 (fr) * | 2000-08-21 | 2002-02-22 | Claude Weisbuch | Dispositif perfectionne de support d'elements chromophores |
WO2002016912A1 (fr) * | 2000-08-21 | 2002-02-28 | Genewave | Dispositif de support d'elements chromophores |
US6867900B2 (en) | 2000-08-21 | 2005-03-15 | Genewave | Support for chromophoric elements |
DE10148778C2 (de) * | 2001-10-02 | 2003-10-09 | Univ Braunschweig Tech | Verfahren zur Bestimmung der Beschaffenheit einer Probe |
DE10148778A1 (de) * | 2001-10-02 | 2003-04-17 | Univ Braunschweig Tech | Verfahren und Anordnung zur Bestimmung der Beschaffenheit einer Probe |
US8506902B2 (en) | 2002-09-30 | 2013-08-13 | 3M Innovative Properties Company | Colorimetric sensor |
US7449146B2 (en) | 2002-09-30 | 2008-11-11 | 3M Innovative Properties Company | Colorimetric sensor |
WO2005111588A1 (en) * | 2004-03-24 | 2005-11-24 | 3M Innovative Properties Company | Colorimetric sensor |
US7929196B2 (en) | 2004-09-27 | 2011-04-19 | Qualcomm Mems Technologies, Inc. | System and method of implementation of interferometric modulators for display mirrors |
WO2006042746A1 (de) * | 2004-10-19 | 2006-04-27 | Universität Tübingen | Verfahren zur untersuchung physikalischer, chemischer und biochemischer wechselwirkungen |
US7767143B2 (en) | 2006-06-27 | 2010-08-03 | 3M Innovative Properties Company | Colorimetric sensors |
US7787171B2 (en) | 2008-03-31 | 2010-08-31 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
US7787130B2 (en) | 2008-03-31 | 2010-08-31 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
US7852491B2 (en) | 2008-03-31 | 2010-12-14 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on micro-mechanical membranes |
WO2009123836A1 (en) * | 2008-03-31 | 2009-10-08 | Qualcomm Mems Technologies, Inc. | Human-readable, bi-state environmental sensors based on mechanical membranes |
CN103822903A (zh) * | 2014-03-10 | 2014-05-28 | 天津理工大学 | 一种基于无芯光纤的空气相对湿度测量仪 |
CN114649630A (zh) * | 2020-12-17 | 2022-06-21 | 保时捷股份公司 | 容纳高压电池的电池壳体、机动车辆及检查电池的方法 |
Also Published As
Publication number | Publication date |
---|---|
DE3832185C2 (enrdf_load_stackoverflow) | 1990-10-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |