DE69021925T3 - Feuchtigkeitsempfindliches Element. - Google Patents

Feuchtigkeitsempfindliches Element.

Info

Publication number
DE69021925T3
DE69021925T3 DE69021925T DE69021925T DE69021925T3 DE 69021925 T3 DE69021925 T3 DE 69021925T3 DE 69021925 T DE69021925 T DE 69021925T DE 69021925 T DE69021925 T DE 69021925T DE 69021925 T3 DE69021925 T3 DE 69021925T3
Authority
DE
Germany
Prior art keywords
sensitive element
moisture sensitive
moisture
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69021925T
Other languages
English (en)
Other versions
DE69021925D1 (de
DE69021925T2 (de
Inventor
Toru Abe
Takaaki Kuroiwa
Tetsuya Miyagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26445034&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69021925(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP10459489A external-priority patent/JP2719830B2/ja
Priority claimed from JP1105871A external-priority patent/JPH0692953B2/ja
Application filed by Azbil Corp filed Critical Azbil Corp
Publication of DE69021925D1 publication Critical patent/DE69021925D1/de
Application granted granted Critical
Publication of DE69021925T2 publication Critical patent/DE69021925T2/de
Publication of DE69021925T3 publication Critical patent/DE69021925T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE69021925T 1989-04-26 1990-04-24 Feuchtigkeitsempfindliches Element. Expired - Lifetime DE69021925T3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10459489A JP2719830B2 (ja) 1989-04-26 1989-04-26 感湿素子
JP1105871A JPH0692953B2 (ja) 1989-04-27 1989-04-27 感湿素子

Publications (3)

Publication Number Publication Date
DE69021925D1 DE69021925D1 (de) 1995-10-05
DE69021925T2 DE69021925T2 (de) 1996-03-14
DE69021925T3 true DE69021925T3 (de) 2000-01-20

Family

ID=26445034

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69021925T Expired - Lifetime DE69021925T3 (de) 1989-04-26 1990-04-24 Feuchtigkeitsempfindliches Element.

Country Status (3)

Country Link
US (1) US5069069A (de)
EP (1) EP0395349B2 (de)
DE (1) DE69021925T3 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3919864A1 (de) * 1989-06-19 1990-12-20 Testoterm Mestechnik Gmbh & Co Kapazitiver feuchtesensor
JPH0599877A (ja) * 1991-06-25 1993-04-23 Yamatake Honeywell Co Ltd 感湿装置
US5177662A (en) * 1992-02-05 1993-01-05 Johnson Service Company Capacitance humidity sensor
JPH0786493B2 (ja) * 1992-04-24 1995-09-20 松下電器産業株式会社 湿度センサー
US5717947A (en) * 1993-03-31 1998-02-10 Motorola, Inc. Data processing system and method thereof
US6001253A (en) * 1995-05-16 1999-12-14 Dyax Corporation Liquid chromatography column
US6066806A (en) * 1997-08-19 2000-05-23 The Furukawa Electric Co., Ltd. Insulated wire
MY119908A (en) * 1997-08-20 2005-08-30 Furukawa Electric Co Ltd Insulated wire.
AU1399899A (en) 1997-11-14 1999-06-07 Dyax Corporation Liquid chromatography column
US6783673B2 (en) 2002-08-23 2004-08-31 Biotage, Inc. Composite chromatography column
US6938482B2 (en) * 2003-06-03 2005-09-06 General Electric Co. Humidity sensor element containing polyphenylsulfone
US7295126B2 (en) * 2005-01-05 2007-11-13 Honeywell International Inc. Perforated plane moisture sensor
JP4860793B2 (ja) * 2005-05-19 2012-01-25 株式会社日本自動車部品総合研究所 湿度センサの製造方法
US20070039385A1 (en) * 2005-08-18 2007-02-22 Mujie Yang Resistive thin film humidity sensitive device based on silicone-containing copolymer and its preparation method
JP5112639B2 (ja) * 2006-03-06 2013-01-09 トウプラスエンジニアリング株式会社 湿度センサ
US20080173089A1 (en) * 2007-01-19 2008-07-24 Seagate Technology Llc Transducing system with integrated environmental sensors
EP2321632B1 (de) 2008-09-11 2017-03-01 ams International AG Sensor mit kombinierter koplanarer und paralleler elektrodenanordnung
DE102009004393A1 (de) * 2009-01-08 2010-11-11 Eads Deutschland Gmbh Akkumulierender Feuchtesensor
EP3078964B1 (de) 2015-04-09 2017-05-24 Honeywell International Inc. Sensoren der relativen feuchtigkeit und verfahren

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3582728A (en) * 1969-03-06 1971-06-01 Johnson Service Co Capacitance humidity sensing element
DE2848034A1 (de) * 1978-11-06 1980-05-14 Siemens Ag Kapazitiver feuchtefuehler
EP0057728B1 (de) * 1980-07-21 1986-05-28 Hitachi, Ltd. Feuchtigkeitsempfindliches element, feuchtigkeitsempfindliches material sowie verfahren zu deren herstellung
DE3224920C2 (de) * 1981-07-08 1986-11-20 Sharp K.K., Osaka Feuchtigkeitsempfindliches Widerstandselement
EP0076131B1 (de) * 1981-09-28 1986-04-09 Hitachi, Ltd. Feuchtigkeitssensor und Verfahren zur Herstellung eines Feuchtigkeitssensors
US4520341A (en) * 1981-12-08 1985-05-28 Sharp Kabushiki Kaisha Moisture responsive element with crosslinked organic membrane and protective layering
US4681855A (en) * 1985-08-05 1987-07-21 The United States Of America As Represented By The Secretary Of Commerce Humidity sensing and measurement employing halogenated organic polymer membranes
JPS6288951A (ja) * 1985-10-16 1987-04-23 Shinei Kk 感湿素子とその製造方法
US4761710A (en) * 1987-06-23 1988-08-02 Industrial Technology Research Institute Polyimide capacitive humidity sensing element
US4920451A (en) * 1988-05-23 1990-04-24 Yamatake-Honeywell Co., Ltd. Moisture-sensitive element
US4965698A (en) * 1989-09-27 1990-10-23 Johnson Service Company Capacitance humidity sensor

Also Published As

Publication number Publication date
EP0395349B2 (de) 1998-06-10
EP0395349B1 (de) 1995-08-30
DE69021925D1 (de) 1995-10-05
EP0395349A3 (de) 1991-02-06
EP0395349A2 (de) 1990-10-31
DE69021925T2 (de) 1996-03-14
US5069069A (en) 1991-12-03

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8332 No legal effect for de
8327 Change in the person/name/address of the patent owner

Owner name: YAMATAKE CORP., TOKIO/TOKYO, JP