DE3826710C2 - - Google Patents

Info

Publication number
DE3826710C2
DE3826710C2 DE3826710A DE3826710A DE3826710C2 DE 3826710 C2 DE3826710 C2 DE 3826710C2 DE 3826710 A DE3826710 A DE 3826710A DE 3826710 A DE3826710 A DE 3826710A DE 3826710 C2 DE3826710 C2 DE 3826710C2
Authority
DE
Germany
Prior art keywords
gas
pump
vacuum pump
backing
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3826710A
Other languages
German (de)
English (en)
Other versions
DE3826710A1 (de
Inventor
Tetsuya Naka Ibaraki Jp Abe
Yoshio Mito Ibaraki Jp Murakami
Kazuo Hikita
Harushige Osawa
Yuji Otani
Satoshi Hiroshima Jp Hata
Fushiki Chiyoda Tokio/Tokyo Jp Matsuoka
Kimihiro Minato Tokio/Tokyo Jp Ioki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Original Assignee
Japan Atomic Energy Research Institute
Mitsubishi Atomic Power Industries Inc
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP19646487A external-priority patent/JPH0674796B2/ja
Priority claimed from JP8739588A external-priority patent/JPH0819917B2/ja
Application filed by Japan Atomic Energy Research Institute, Mitsubishi Atomic Power Industries Inc, Mitsubishi Heavy Industries Ltd filed Critical Japan Atomic Energy Research Institute
Publication of DE3826710A1 publication Critical patent/DE3826710A1/de
Application granted granted Critical
Publication of DE3826710C2 publication Critical patent/DE3826710C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/04—Units comprising pumps and their driving means the pump being fluid-driven
    • F04D25/045—Units comprising pumps and their driving means the pump being fluid-driven the pump wheel carrying the fluid driving means, e.g. turbine blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F04D29/0513—Axial thrust balancing hydrostatic; hydrodynamic thrust bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE3826710A 1987-08-07 1988-08-05 Vakuumpumpe Granted DE3826710A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19646487A JPH0674796B2 (ja) 1987-08-07 1987-08-07 マルチチヤンネル型真空ポンプ
JP8739588A JPH0819917B2 (ja) 1988-04-11 1988-04-11 マルチチヤンネル型真空ポンプ

Publications (2)

Publication Number Publication Date
DE3826710A1 DE3826710A1 (de) 1989-02-16
DE3826710C2 true DE3826710C2 (enExample) 1990-08-16

Family

ID=26428678

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3826710A Granted DE3826710A1 (de) 1987-08-07 1988-08-05 Vakuumpumpe

Country Status (1)

Country Link
DE (1) DE3826710A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4206972A1 (de) * 1991-03-05 1992-09-10 Japan Atomic Energy Res Inst Mehrturbinen-vakuumpumpe
DE4317205A1 (de) * 1992-06-05 1993-12-09 Zaidan Houjin Shinku Kagaku Ke Turbomolekularpumpe

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408792B1 (de) * 1989-07-20 1993-09-29 Leybold Aktiengesellschaft Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
IT1297347B1 (it) * 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP4159239B2 (ja) * 2000-11-07 2008-10-01 株式会社荏原製作所 複合モータとその運転方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0759956B2 (ja) * 1986-09-19 1995-06-28 三菱重工業株式会社 真空ポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4206972A1 (de) * 1991-03-05 1992-09-10 Japan Atomic Energy Res Inst Mehrturbinen-vakuumpumpe
DE4317205A1 (de) * 1992-06-05 1993-12-09 Zaidan Houjin Shinku Kagaku Ke Turbomolekularpumpe

Also Published As

Publication number Publication date
DE3826710A1 (de) 1989-02-16

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: JAPAN ATOMIC ENERGY RESEARCH INSTITUTE, TOKIO/TOKY

8339 Ceased/non-payment of the annual fee