DE3826710A1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE3826710A1
DE3826710A1 DE3826710A DE3826710A DE3826710A1 DE 3826710 A1 DE3826710 A1 DE 3826710A1 DE 3826710 A DE3826710 A DE 3826710A DE 3826710 A DE3826710 A DE 3826710A DE 3826710 A1 DE3826710 A1 DE 3826710A1
Authority
DE
Germany
Prior art keywords
gas
pump
rotary
vacuum pump
pipeline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE3826710A
Other languages
German (de)
English (en)
Other versions
DE3826710C2 (enExample
Inventor
Tetsuya Abe
Yoshio Murakami
Kazuo Hikita
Harushige Osawa
Yuji Otani
Satoshi Hata
Fushiki Matsuoka
Kimihiro Ioki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Atomic Energy Agency
Original Assignee
Japan Atomic Energy Research Institute
Mitsubishi Atomic Power Industries Inc
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP19646487A external-priority patent/JPH0674796B2/ja
Priority claimed from JP8739588A external-priority patent/JPH0819917B2/ja
Application filed by Japan Atomic Energy Research Institute, Mitsubishi Atomic Power Industries Inc, Mitsubishi Heavy Industries Ltd filed Critical Japan Atomic Energy Research Institute
Publication of DE3826710A1 publication Critical patent/DE3826710A1/de
Application granted granted Critical
Publication of DE3826710C2 publication Critical patent/DE3826710C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/04—Units comprising pumps and their driving means the pump being fluid-driven
    • F04D25/045—Units comprising pumps and their driving means the pump being fluid-driven the pump wheel carrying the fluid driving means, e.g. turbine blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F04D29/0513—Axial thrust balancing hydrostatic; hydrodynamic thrust bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE3826710A 1987-08-07 1988-08-05 Vakuumpumpe Granted DE3826710A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19646487A JPH0674796B2 (ja) 1987-08-07 1987-08-07 マルチチヤンネル型真空ポンプ
JP8739588A JPH0819917B2 (ja) 1988-04-11 1988-04-11 マルチチヤンネル型真空ポンプ

Publications (2)

Publication Number Publication Date
DE3826710A1 true DE3826710A1 (de) 1989-02-16
DE3826710C2 DE3826710C2 (enExample) 1990-08-16

Family

ID=26428678

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3826710A Granted DE3826710A1 (de) 1987-08-07 1988-08-05 Vakuumpumpe

Country Status (1)

Country Link
DE (1) DE3826710A1 (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408792A1 (de) * 1989-07-20 1991-01-23 Leybold Aktiengesellschaft Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe
EP0435291A1 (fr) * 1989-12-28 1991-07-03 Alcatel Cit Pompe à vide turbomoléculaire mixte, à deux arbres de rotation et à refoulement à la pression atmosphérique
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
EP0931939A3 (en) * 1997-12-24 2000-08-30 VARIAN S.p.A. Vacuum pump
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP1207309A3 (en) * 2000-11-07 2003-01-02 Ebara Corporation A compound motor and operational method thereof

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2865888B2 (ja) * 1991-03-05 1999-03-08 日本原子力研究所 マルチターボ型真空ポンプ
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6375390A (ja) * 1986-09-19 1988-04-05 Mitsubishi Heavy Ind Ltd 真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6375390A (ja) * 1986-09-19 1988-04-05 Mitsubishi Heavy Ind Ltd 真空ポンプ

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408792A1 (de) * 1989-07-20 1991-01-23 Leybold Aktiengesellschaft Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe
EP0435291A1 (fr) * 1989-12-28 1991-07-03 Alcatel Cit Pompe à vide turbomoléculaire mixte, à deux arbres de rotation et à refoulement à la pression atmosphérique
FR2656658A1 (fr) * 1989-12-28 1991-07-05 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
EP0931939A3 (en) * 1997-12-24 2000-08-30 VARIAN S.p.A. Vacuum pump
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
AU754944B2 (en) * 1998-05-14 2002-11-28 Leybold Vakuum Gmbh Friction vacuum pump with a stator and a rotor
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP1067290A3 (de) * 1999-07-05 2001-04-11 Pfeiffer Vacuum GmbH Vakuumpumpe
EP1207309A3 (en) * 2000-11-07 2003-01-02 Ebara Corporation A compound motor and operational method thereof

Also Published As

Publication number Publication date
DE3826710C2 (enExample) 1990-08-16

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: JAPAN ATOMIC ENERGY RESEARCH INSTITUTE, TOKIO/TOKY

8339 Ceased/non-payment of the annual fee