DE3785295D1 - Verfahren zur herstellung eines films aus ultrafeinen teilchen. - Google Patents
Verfahren zur herstellung eines films aus ultrafeinen teilchen.Info
- Publication number
- DE3785295D1 DE3785295D1 DE8787115669T DE3785295T DE3785295D1 DE 3785295 D1 DE3785295 D1 DE 3785295D1 DE 8787115669 T DE8787115669 T DE 8787115669T DE 3785295 T DE3785295 T DE 3785295T DE 3785295 D1 DE3785295 D1 DE 3785295D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- film
- ultrafine particles
- ultrafine
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000011882 ultra-fine particle Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0521—Processes for depositing or forming copper oxide superconductor layers by pulsed laser deposition, e.g. laser sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25381786 | 1986-10-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3785295D1 true DE3785295D1 (de) | 1993-05-13 |
DE3785295T2 DE3785295T2 (de) | 1993-07-22 |
Family
ID=17256546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787115669T Expired - Fee Related DE3785295T2 (de) | 1986-10-27 | 1987-10-26 | Verfahren zur herstellung eines films aus ultrafeinen teilchen. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0265886B1 (de) |
JP (1) | JPS63227766A (de) |
DE (1) | DE3785295T2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01224298A (ja) * | 1988-01-27 | 1989-09-07 | Siemens Ag | 金属酸化物超伝導材料層の製造方法 |
US4966887A (en) * | 1988-06-24 | 1990-10-30 | The Research Foundation Of State University Of Ny | Method for the production of oxide superconducting films by laser assisted molecular beam epitaxy |
US5075281A (en) * | 1989-01-03 | 1991-12-24 | Testardi Louis R | Methods of making a high dielectric constant, resistive phase of YBA2 CU3 OX and methods of using the same |
DE3921127A1 (de) * | 1989-06-28 | 1991-01-03 | Leybold Ag | Verfahren fuer die herstellung supraleitender keramiken |
DE4000690A1 (de) * | 1990-01-12 | 1991-07-18 | Philips Patentverwaltung | Verfahren zum herstellen von ultrafeinen partikeln und deren verwendung |
JPH0532493A (ja) * | 1991-07-29 | 1993-02-09 | Sumitomo Electric Ind Ltd | 複合酸化物超電導薄膜の成膜方法 |
JPH06302897A (ja) * | 1993-04-19 | 1994-10-28 | Sumitomo Electric Ind Ltd | レーザ装置、その運転方法およびその応用 |
DE4322533A1 (de) * | 1993-07-07 | 1995-01-12 | Leybold Durferrit Gmbh | Verfahren zur Herstellung supraleitender Keramiken und die Kermiken selbst |
US6017630A (en) * | 1996-05-22 | 2000-01-25 | Research Development Corporation | Ultrafine particle and production method thereof, production method of ultrafine particle bonded body, and fullerene and production method thereof |
AUPR026100A0 (en) * | 2000-09-20 | 2000-10-12 | Tamanyan, Astghik | Deposition of thin films by laser ablation |
CA2599157A1 (en) * | 2005-02-23 | 2006-08-31 | Picodeon Ltd Oy | Pulsed laser deposition method |
CN109759708A (zh) * | 2019-01-25 | 2019-05-17 | 大连理工大学 | 热弧与激光复合热源蒸发金属/碳纳米粉体连续生产方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5339274A (en) * | 1976-09-22 | 1978-04-11 | Hitachi Ltd | Vacuum evaporating method for forming aluminum oxide film by means of laser as heat source |
JPS5348088A (en) * | 1976-10-15 | 1978-05-01 | Hitachi Ltd | Preparation of evaporation source for laser evaporation |
US4281030A (en) * | 1980-05-12 | 1981-07-28 | Bell Telephone Laboratories, Incorporated | Implantation of vaporized material on melted substrates |
JPS5846198B2 (ja) * | 1980-07-25 | 1983-10-14 | 日本電信電話株式会社 | 酸化物超伝導体ジョセフソン素子の製造方法 |
JPS59116373A (ja) * | 1982-12-22 | 1984-07-05 | Agency Of Ind Science & Technol | レ−ザ蒸着装置 |
JPS60194066A (ja) * | 1984-03-16 | 1985-10-02 | Agency Of Ind Science & Technol | 硬質膜被覆材料の製造方法 |
JPS6179765A (ja) * | 1984-09-28 | 1986-04-23 | Mitsubishi Heavy Ind Ltd | レ−ザ蒸着装置 |
-
1987
- 1987-09-18 JP JP62232205A patent/JPS63227766A/ja active Granted
- 1987-10-26 DE DE8787115669T patent/DE3785295T2/de not_active Expired - Fee Related
- 1987-10-26 EP EP87115669A patent/EP0265886B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0524988B2 (de) | 1993-04-09 |
JPS63227766A (ja) | 1988-09-22 |
EP0265886A2 (de) | 1988-05-04 |
EP0265886B1 (de) | 1993-04-07 |
EP0265886A3 (en) | 1990-10-03 |
DE3785295T2 (de) | 1993-07-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |