DE3731127C2 - - Google Patents

Info

Publication number
DE3731127C2
DE3731127C2 DE3731127A DE3731127A DE3731127C2 DE 3731127 C2 DE3731127 C2 DE 3731127C2 DE 3731127 A DE3731127 A DE 3731127A DE 3731127 A DE3731127 A DE 3731127A DE 3731127 C2 DE3731127 C2 DE 3731127C2
Authority
DE
Germany
Prior art keywords
target
titanium
arc
composition
doping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3731127A
Other languages
German (de)
English (en)
Other versions
DE3731127A1 (de
Inventor
Harbhajan S. Randhawa
Lonni R. Boulder Col. Us Erickson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VAC-TEC SYSTEMS Inc BOULDER COL US
Original Assignee
VAC-TEC SYSTEMS Inc BOULDER COL US
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VAC-TEC SYSTEMS Inc BOULDER COL US filed Critical VAC-TEC SYSTEMS Inc BOULDER COL US
Publication of DE3731127A1 publication Critical patent/DE3731127A1/de
Application granted granted Critical
Publication of DE3731127C2 publication Critical patent/DE3731127C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE19873731127 1987-03-12 1987-09-16 Verfahren und vorrichtung zur vakuum-lichtbogenplasma-ablagerung dekorativer und abnutzungsfester beschichtungen Granted DE3731127A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2520787A 1987-03-12 1987-03-12

Publications (2)

Publication Number Publication Date
DE3731127A1 DE3731127A1 (de) 1988-09-22
DE3731127C2 true DE3731127C2 (fr) 1990-11-15

Family

ID=21824663

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19873731127 Granted DE3731127A1 (de) 1987-03-12 1987-09-16 Verfahren und vorrichtung zur vakuum-lichtbogenplasma-ablagerung dekorativer und abnutzungsfester beschichtungen

Country Status (6)

Country Link
JP (1) JPS63223161A (fr)
KR (1) KR880011362A (fr)
CH (1) CH675258A5 (fr)
DE (1) DE3731127A1 (fr)
FR (1) FR2612204A1 (fr)
NL (1) NL8702404A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19517120A1 (de) * 1994-05-13 1995-11-16 Kobe Steel Ltd Beschichtetes Teil mit ausgezeichneter Härte und Haftung
DE10001381A1 (de) * 2000-01-14 2001-07-19 Hauzer Techno Coating Europ B PVD-Verfahren zur Herstellung einer gefärbten, gegenüber Fingerabdrücken unempfindlichen Beschichtung auf Gegenständen sowie Gegenstände mit einer solchen Beschichtung
WO2014207154A1 (fr) 2013-06-26 2014-12-31 Oerlikon Trading Ag, Truebbach Couches décoratives de substance dure appliquées par hipims

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0404973A1 (fr) * 1989-06-27 1991-01-02 Hauzer Holding B.V. Procédé et appareillage pour le revêtement de substrats
DE4006456C1 (en) * 1990-03-01 1991-05-29 Balzers Ag, Balzers, Li Appts. for vaporising material in vacuum - has electron beam gun or laser guided by electromagnet to form cloud or pre-melted spot on the target surface
EP0586702A4 (en) * 1991-04-29 1994-06-01 N Proizv Predprivatie Novatekh Electric arc evaporator of metals
DE19745407C2 (de) * 1996-07-31 2003-02-27 Fraunhofer Ges Forschung Verfahren zur Glanzbeschichtung von Kunststoffteilen, vorzugsweise für Fahrzeuge, und danach beschichtetes Kunststoffteil
DE19809409A1 (de) * 1998-03-05 1999-09-09 Leybold Systems Gmbh Messingfarbige Beschichtung mit einer farbgebenden nitridischen Schicht
DE19905881A1 (de) * 1999-01-22 2000-08-03 Muerrle Norbert Verfahren zur Beschichtung eines aus Edelmetall oder einem Nicht-Edelmetall gefertigten Schmuckstücks sowie ein derartiges Schmuckstück
US9997338B2 (en) * 2005-03-24 2018-06-12 Oerlikon Surface Solutions Ag, Pfäffikon Method for operating a pulsed arc source
JP5073998B2 (ja) * 2006-08-28 2012-11-14 眞 八藤 銀器類の改良方法
RU2495150C1 (ru) * 2012-06-26 2013-10-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
US20210087404A1 (en) * 2017-12-19 2021-03-25 Nisshin Engineering Inc. Composite particles and method for producing composite particles

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3625848A (en) * 1968-12-26 1971-12-07 Alvin A Snaper Arc deposition process and apparatus
US3793179A (en) * 1971-07-19 1974-02-19 L Sablev Apparatus for metal evaporation coating
US3900592A (en) * 1973-07-25 1975-08-19 Airco Inc Method for coating a substrate to provide a titanium or zirconium nitride or carbide deposit having a hardness gradient which increases outwardly from the substrate
JPS50123579A (fr) * 1974-03-19 1975-09-29
CH619344B (de) * 1977-12-23 Balzers Hochvakuum Verfahren zur herstellung goldfarbener ueberzuege.
CH624817B (de) * 1979-09-04 Balzers Hochvakuum Verfahren zur herstellung goldfarbener ueberzuege.
US4351855A (en) * 1981-02-24 1982-09-28 Eduard Pinkhasov Noncrucible method of and apparatus for the vapor deposition of material upon a substrate using voltaic arc in vacuum
DE3107914A1 (de) * 1981-03-02 1982-09-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zum beschichten von formteilen durch katodenzerstaeubung
GB2105729B (en) * 1981-09-15 1985-06-12 Itt Ind Ltd Surface processing of a substrate material
US4415521A (en) * 1982-03-15 1983-11-15 Celanese Corporation Process for achieving higher orientation in partially oriented yarns
SU1128618A1 (ru) * 1982-10-10 1987-03-07 Всесоюзный Научно-Исследовательский Инструментальный Институт Материал износостойкого покрыти металлорежущего инструмента
US4540596A (en) * 1983-05-06 1985-09-10 Smith International, Inc. Method of producing thin, hard coating
US4430184A (en) * 1983-05-09 1984-02-07 Vac-Tec Systems, Inc. Evaporation arc stabilization
US4556471A (en) * 1983-10-14 1985-12-03 Multi-Arc Vacuum Systems Inc. Physical vapor deposition apparatus
IL71530A (en) * 1984-04-12 1987-09-16 Univ Ramot Method and apparatus for surface-treating workpieces
DE3428951A1 (de) * 1984-08-06 1986-02-13 Leybold-Heraeus GmbH, 5000 Köln Mit einer deckschicht aus gold oder einem goldhaltigen material ueberzogener dekorativer gebrauchsgegenstand und verfahren zu seiner herstellung
JPS61183458A (ja) * 1985-02-08 1986-08-16 Citizen Watch Co Ltd 黒色イオンプレ−テイング膜
EP0211413A3 (fr) * 1985-08-09 1989-03-15 The Perkin-Elmer Corporation Dispositif d'allumage d'arc

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19517120A1 (de) * 1994-05-13 1995-11-16 Kobe Steel Ltd Beschichtetes Teil mit ausgezeichneter Härte und Haftung
DE19517120C2 (de) * 1994-05-13 1998-07-02 Kobe Steel Ltd Beschichtetes Teil mit ausgezeichneter Härte und Haftung, seine Verwendung und Verfahren zur Herstellung
DE10001381A1 (de) * 2000-01-14 2001-07-19 Hauzer Techno Coating Europ B PVD-Verfahren zur Herstellung einer gefärbten, gegenüber Fingerabdrücken unempfindlichen Beschichtung auf Gegenständen sowie Gegenstände mit einer solchen Beschichtung
WO2014207154A1 (fr) 2013-06-26 2014-12-31 Oerlikon Trading Ag, Truebbach Couches décoratives de substance dure appliquées par hipims
US11060181B2 (en) 2013-06-26 2021-07-13 Oerlikon Surface Solutions Ag, Pfaffikon Decorative HIPIMS hard material layers

Also Published As

Publication number Publication date
FR2612204A1 (fr) 1988-09-16
JPH045750B2 (fr) 1992-02-03
NL8702404A (nl) 1988-10-03
DE3731127A1 (de) 1988-09-22
CH675258A5 (fr) 1990-09-14
KR880011362A (ko) 1988-10-28
JPS63223161A (ja) 1988-09-16

Similar Documents

Publication Publication Date Title
DE69306690T2 (de) Niederschlag von Material mittels Plasma unterstützte Magnetronzerstäubung
DE3731127C2 (fr)
DE102005004402B4 (de) Hartstoff-Schichtsystem und Verfahren zu dessen Bildung
DE3107914C2 (fr)
DE19522331B4 (de) Verfahren zum Beschichten mindestens eines Werkstückes, Anlage hierfür sowie Verfahren zum Betrieb einer kathodischen Bogenentladung und Verwendung desselben
EP0812368B1 (fr) Procede de pulverisation reactive
EP0885981B1 (fr) Procédé et appareillage de traitement de substrats au moyen d'ions issus d'une décharge en arc à basse tension
DE3852500T2 (de) Physikalische dampfniederschlag-doppelbeschichtungsvorrichtung und verfahren.
DE68910731T2 (de) Verfahren zum Aufbringen einer schwarzen Beschichtung auf ein Substrat, sowie dadurch erhaltene schwarze Beschichtung.
EP2653583A1 (fr) Procédé de revêtement destiné à la séparation d'un système de couche sur un substrat, ainsi que le substrat avec un système de couche
EP2036998B1 (fr) Procédé pour produire un ensemble mutlicouches et dispositif pour mettre en oeuvre ledit procédé
EP0432090B1 (fr) Procédé de production d'un revêtement et article revêtu par le procédé
DE4430363A1 (de) Optische Linse aus einem klarsichtigen Kunststoff
DE4115616A1 (de) Oberflaechenschicht fuer substrate insbesondere fuer arbeitswerkzeuge
EP0734459B1 (fr) Procede et dispositif de metallisation en phase vapeur activee au plasma
EP0438627B1 (fr) Dispositif d'évaporation par décharge d'arc ayant plusieurs creusets d'évaporation
EP0430872A2 (fr) Outil ou instrument ayant un revêtement dur résistant à l'usure pour l'usinage de matériaux organiques
EP1697555B1 (fr) Procede et dispositif de pulverisation au magnetron
DE102008022145B4 (de) Vorrichtung und Verfahren zum Hochleistungs-Puls-Gasfluß-Sputtern
DE102004032635A1 (de) Verfahren zur Herstellung eines Titan-Suboxid-basierten Beschichtungswerkstoff, entsprechend hergestellter Beschichtungswerkstoff und damit versehenes Sputtertarget
DE2909804A1 (de) Verfahren zum herstellen duenner, dotierter metallschichten durch reaktives aufstaeuben
DE3741127C2 (fr)
EP0580837B1 (fr) Procede et dispositif pour l'obtention de couches minces par pulverisation cathodique reactive
WO2019223959A1 (fr) Dispositif de pulvérisation cathodique à magnétron
DE4421045C2 (de) Einrichtung zur plamagestützten Beschichtung von Substraten, insbesondere mit elektrisch isolierendem Material

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8363 Opposition against the patent
8330 Complete disclaimer