DE3686089T2 - Verfahren zur herstellung eines metall-halbleiter-feldeffekttransistors und dadurch hergestellter transistor. - Google Patents
Verfahren zur herstellung eines metall-halbleiter-feldeffekttransistors und dadurch hergestellter transistor.Info
- Publication number
- DE3686089T2 DE3686089T2 DE8686106310T DE3686089T DE3686089T2 DE 3686089 T2 DE3686089 T2 DE 3686089T2 DE 8686106310 T DE8686106310 T DE 8686106310T DE 3686089 T DE3686089 T DE 3686089T DE 3686089 T2 DE3686089 T2 DE 3686089T2
- Authority
- DE
- Germany
- Prior art keywords
- transistor
- producing
- field effect
- semiconductor field
- metal semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005669 field effect Effects 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002184 metal Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/2654—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/2654—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds
- H01L21/26546—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds of electrically active species
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/2654—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds
- H01L21/26546—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds of electrically active species
- H01L21/26553—Through-implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/2654—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds
- H01L21/2656—Bombardment with radiation with high-energy radiation producing ion implantation in AIIIBV compounds characterised by the implantation of both electrically active and inactive species in the same semiconductor region to be doped
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66893—Unipolar field-effect transistors with a PN junction gate, i.e. JFET
- H01L29/66924—Unipolar field-effect transistors with a PN junction gate, i.e. JFET with an active layer made of a group 13/15 material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/945—Special, e.g. metal
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60098293A JPS61256675A (ja) | 1985-05-09 | 1985-05-09 | シヨツトキゲ−ト電界効果トランジスタの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3686089D1 DE3686089D1 (de) | 1992-08-27 |
DE3686089T2 true DE3686089T2 (de) | 1993-01-07 |
Family
ID=14215875
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686106310T Expired - Fee Related DE3686089T2 (de) | 1985-05-09 | 1986-05-09 | Verfahren zur herstellung eines metall-halbleiter-feldeffekttransistors und dadurch hergestellter transistor. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4717685A (de) |
EP (1) | EP0201873B1 (de) |
JP (1) | JPS61256675A (de) |
DE (1) | DE3686089T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4889817A (en) * | 1985-08-08 | 1989-12-26 | Oki Electric Industry Co., Ltd. | Method of manufacturing schottky gate field transistor by ion implantation method |
US4847550A (en) * | 1987-01-16 | 1989-07-11 | Hitachi, Ltd. | Semiconductor circuit |
US5276340A (en) * | 1989-11-21 | 1994-01-04 | Fujitsu Limited | Semiconductor integrated circuit having a reduced side gate effect |
EP0437702B1 (de) * | 1989-11-21 | 1998-08-12 | Fujitsu Limited | Integrierte Halbleiterschaltung mit Isolationszonen zwischen Komponenten aus Verbindungshalbleitern und Methode zu deren Herstellung |
US5183767A (en) * | 1991-02-14 | 1993-02-02 | International Business Machines Corporation | Method for internal gettering of oxygen in iii-v compound semiconductors |
US5272373A (en) * | 1991-02-14 | 1993-12-21 | International Business Machines Corporation | Internal gettering of oxygen in III-V compound semiconductors |
US5453630A (en) * | 1992-11-12 | 1995-09-26 | The United States Of America As Represented By The Secretary Of The Army | Variable gain optical detector |
KR0144821B1 (ko) * | 1994-05-16 | 1998-07-01 | 양승택 | 저전원전압으로 작동가능한 갈륨비소 반도체 전력소자의 제조 방법 |
US5411902A (en) * | 1994-06-06 | 1995-05-02 | The United States Of America As Represented By The Secretary Of The Air Force | Process for improving gallium arsenide field effect transistor performance using an aluminum arsenide or an aluminum gallium arsenide buffer layer |
US6458640B1 (en) * | 2001-06-04 | 2002-10-01 | Anadigics, Inc. | GaAs MESFET having LDD and non-uniform P-well doping profiles |
US6830953B1 (en) * | 2002-09-17 | 2004-12-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Suppression of MOSFET gate leakage current |
US7485514B2 (en) * | 2006-01-05 | 2009-02-03 | Winslow Thomas A | Method for fabricating a MESFET |
JP5453892B2 (ja) * | 2009-04-15 | 2014-03-26 | トヨタ自動車株式会社 | 窒化物半導体装置 |
JP5601848B2 (ja) | 2010-02-09 | 2014-10-08 | 三菱電機株式会社 | SiC半導体装置の製造方法 |
CN106910775B (zh) * | 2017-03-20 | 2020-01-10 | 西安电子科技大学 | 一种具有多凹陷缓冲层的4H-SiC金属半导体场效应晶体管 |
FR3104808A1 (fr) * | 2019-12-12 | 2021-06-18 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procédé de réalisation d'une couche semiconductrice dopée |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3901738A (en) * | 1973-12-20 | 1975-08-26 | Hughes Aircraft Co | Ion implanted junction laser and process for making same |
JPS55151349A (en) * | 1979-05-15 | 1980-11-25 | Matsushita Electronics Corp | Forming method of insulation isolating region |
JPS5633817A (en) * | 1979-08-29 | 1981-04-04 | Fujitsu Ltd | Preparation of semiconductor device |
JPS56155531A (en) * | 1980-04-30 | 1981-12-01 | Fujitsu Ltd | Manufacture of semiconductor device |
US4389768A (en) * | 1981-04-17 | 1983-06-28 | International Business Machines Corporation | Self-aligned process for fabricating gallium arsenide metal-semiconductor field effect transistors |
JPS594085A (ja) * | 1982-06-30 | 1984-01-10 | Fujitsu Ltd | 半導体装置 |
EP0112657B1 (de) * | 1982-11-29 | 1990-06-20 | Fujitsu Limited | Feldeffekttransistor und Verfahren zu seiner Herstellung |
-
1985
- 1985-05-09 JP JP60098293A patent/JPS61256675A/ja active Granted
-
1986
- 1986-05-07 US US06/860,425 patent/US4717685A/en not_active Expired - Fee Related
- 1986-05-09 EP EP86106310A patent/EP0201873B1/de not_active Expired - Lifetime
- 1986-05-09 DE DE8686106310T patent/DE3686089T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0260063B2 (de) | 1990-12-14 |
US4717685A (en) | 1988-01-05 |
EP0201873A3 (en) | 1989-10-18 |
EP0201873B1 (de) | 1992-07-22 |
JPS61256675A (ja) | 1986-11-14 |
EP0201873A2 (de) | 1986-11-20 |
DE3686089D1 (de) | 1992-08-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |