DE3586435T2 - Verfahren zur ueberwachung der konzentrationen von metallischen ionen in metallisierbaedern. - Google Patents

Verfahren zur ueberwachung der konzentrationen von metallischen ionen in metallisierbaedern.

Info

Publication number
DE3586435T2
DE3586435T2 DE8585100107T DE3586435T DE3586435T2 DE 3586435 T2 DE3586435 T2 DE 3586435T2 DE 8585100107 T DE8585100107 T DE 8585100107T DE 3586435 T DE3586435 T DE 3586435T DE 3586435 T2 DE3586435 T2 DE 3586435T2
Authority
DE
Germany
Prior art keywords
concentrations
monitoring
metallic ions
metalizing
baths
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8585100107T
Other languages
English (en)
Other versions
DE3586435D1 (de
Inventor
Perminder Nmi Bindra
Solomon Leon Levine
David Noel Light
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE3586435D1 publication Critical patent/DE3586435D1/de
Application granted granted Critical
Publication of DE3586435T2 publication Critical patent/DE3586435T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/48—Systems using polarography, i.e. measuring changes in current under a slowly-varying voltage
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/49—Systems involving the determination of the current at a single specific value, or small range of values, of applied voltage for producing selective measurement of one or more particular ionic species

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
DE8585100107T 1984-02-13 1985-01-11 Verfahren zur ueberwachung der konzentrationen von metallischen ionen in metallisierbaedern. Expired - Fee Related DE3586435T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/579,733 US4725339A (en) 1984-02-13 1984-02-13 Method for monitoring metal ion concentrations in plating baths

Publications (2)

Publication Number Publication Date
DE3586435D1 DE3586435D1 (de) 1992-09-10
DE3586435T2 true DE3586435T2 (de) 1993-03-18

Family

ID=24318124

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585100107T Expired - Fee Related DE3586435T2 (de) 1984-02-13 1985-01-11 Verfahren zur ueberwachung der konzentrationen von metallischen ionen in metallisierbaedern.

Country Status (4)

Country Link
US (1) US4725339A (de)
EP (1) EP0151926B1 (de)
JP (1) JPS60187856A (de)
DE (1) DE3586435T2 (de)

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DE3813429A1 (de) * 1988-04-18 1989-10-26 Schering Ag Chronoamperometrische und chronopotentiometrische messungen zur kontrolle und steuerung von galvanischen kupferabscheidungen
US4928065A (en) * 1989-03-31 1990-05-22 E. I. Du Pont De Nemours And Company Voltammetry in low-permitivity suspensions
US5223118A (en) * 1991-03-08 1993-06-29 Shipley Company Inc. Method for analyzing organic additives in an electroplating bath
US5192403A (en) * 1991-05-16 1993-03-09 International Business Machines Corporation Cyclic voltammetric method for the measurement of concentrations of subcomponents of plating solution additive mixtures
US5262022A (en) * 1991-05-28 1993-11-16 Rockwell International Corporation Method of assessing solderability
US5425859A (en) * 1991-05-28 1995-06-20 Rockwell International Corporation Method and apparatus for assessing and restoring solderability
US5298145A (en) * 1992-10-13 1994-03-29 Hughes Aircraft Company Signal subtraction apparatus and method
IL112018A (en) * 1994-12-19 2001-04-30 Israel State A device containing a micro-cell for removal by design injection for a volumetric test of metal traces
US6306283B1 (en) * 1998-11-02 2001-10-23 Eastman Kodak Company Method for screening chemical sensitizers
DE10108716A1 (de) * 2001-02-23 2002-09-19 Clariant Gmbh Verfahren und Vorrichtung zur kontinuierlichen Redox-Regelung bei Azokupplungen
WO2003060154A2 (en) * 2002-01-15 2003-07-24 Agamatrix, Inc. Method and apparatus for processing electrochemical signals
US6808611B2 (en) * 2002-06-27 2004-10-26 Applied Materials, Inc. Methods in electroanalytical techniques to analyze organic components in plating baths
TW555880B (en) * 2002-11-22 2003-10-01 Univ Feng Chia Oxygen removal method of copper wire replacement deposition
US20060266648A1 (en) * 2002-12-17 2006-11-30 King Mackenzie E Process analyzer for monitoring electrochemical deposition solutions
US7205153B2 (en) 2003-04-11 2007-04-17 Applied Materials, Inc. Analytical reagent for acid copper sulfate solutions
WO2004109256A2 (en) * 2003-06-06 2004-12-16 Case Western Reserve University Deposition and detection of zinc and other metals in solution
US20050067304A1 (en) * 2003-09-26 2005-03-31 King Mackenzie E. Electrode assembly for analysis of metal electroplating solution, comprising self-cleaning mechanism, plating optimization mechanism, and/or voltage limiting mechanism
US8221610B2 (en) * 2003-10-10 2012-07-17 Ohio University Electrochemical method for providing hydrogen using ammonia and ethanol
US8216437B2 (en) * 2003-10-10 2012-07-10 Ohio University Electrochemical cell for oxidation of ammonia and ethanol
WO2005035444A2 (en) * 2003-10-10 2005-04-21 Ohio University Electro-catalysts for the oxidation of ammonia in alkaline media
US8216956B2 (en) 2003-10-10 2012-07-10 Ohio University Layered electrocatalyst for oxidation of ammonia and ethanol
US20090081500A1 (en) * 2003-10-10 2009-03-26 Ohio University Fuel cell utilizing ammonia, ethanol or combinations thereof
US20050109624A1 (en) * 2003-11-25 2005-05-26 Mackenzie King On-wafer electrochemical deposition plating metrology process and apparatus
DE102005024910A1 (de) * 2005-05-31 2006-12-07 Advanced Micro Devices, Inc., Sunnyvale Verfahren und System zur In-Line-Steuerung der Lothöcker-Abscheidung
US7851222B2 (en) * 2005-07-26 2010-12-14 Applied Materials, Inc. System and methods for measuring chemical concentrations of a plating solution
JP2009515036A (ja) * 2005-10-14 2009-04-09 オハイオ ユニバーシティ アルカリ媒体中におけるアンモニア及びエタノールを酸化するためのカーボンファイバー電極触媒、ならびに水素生成、燃料電池および精製プロセスへのその適用
US20070261963A1 (en) * 2006-02-02 2007-11-15 Advanced Technology Materials, Inc. Simultaneous inorganic, organic and byproduct analysis in electrochemical deposition solutions
WO2007133534A2 (en) * 2006-05-08 2007-11-22 Ohio University Electrochemical technique to measure concentration of multivalent cations simultaneously
JP4682285B2 (ja) * 2007-08-30 2011-05-11 日立電線株式会社 配線及び層間接続ビアの形成方法
ITTO20070704A1 (it) * 2007-10-05 2009-04-06 Create New Technology S R L Sistema e metodo di placcatura di leghe metalliche mediante tecnologia galvanica
WO2014145477A1 (en) 2013-03-15 2014-09-18 Case Western Reserve University System and method for removal of metals from solution
US9964518B2 (en) * 2014-11-21 2018-05-08 Hioki Denki Kabushiki Kaisha Electroplating solution analyzing apparatus
US10234419B2 (en) 2016-05-23 2019-03-19 Hong Kong Applied Science and Technology Research Institute Company Limited Static disk electrode for electroplating bath analysis
CN106461603B (zh) * 2016-05-23 2019-11-08 香港应用科技研究院有限公司 用于电镀液分析的静态圆盘电极

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428532A (en) * 1964-02-06 1969-02-18 Continental Oil Co Method for identifying metals and alloys
US3925168A (en) * 1972-07-26 1975-12-09 Anaconda American Brass Co Method of monitoring the active roughening agent in a copper plating bath
DE2521282C2 (de) * 1975-05-13 1977-03-03 Siemens Ag Prozessteueranlage zum selbsttaetigen analysieren und auffrischen von galvanischen baedern
CA1064852A (en) * 1975-12-31 1979-10-23 Cominco Ltd. Method for evaluating a system for electrodeposition of metals
US4132605A (en) * 1976-12-27 1979-01-02 Rockwell International Corporation Method for evaluating the quality of electroplating baths
US4153521A (en) * 1977-08-05 1979-05-08 Litvak Rafael S Method of automatic control and optimization of electrodeposition conditions
US4336111A (en) * 1978-11-02 1982-06-22 The Boeing Company Method for determining the strength of a metal processing solution
US4324621A (en) * 1979-12-26 1982-04-13 Cominco Ltd. Method and apparatus for controlling the quality of electrolytes
US4353933A (en) * 1979-11-14 1982-10-12 C. Uyemura & Co., Ltd. Method for controlling electroless plating bath
US4406249A (en) * 1979-11-14 1983-09-27 C. Uyemura & Co., Ltd. Apparatus for controlling electroless plating bath
US4276323A (en) * 1979-12-21 1981-06-30 Hitachi, Ltd. Process for controlling of chemical copper plating solution
JPS5764749A (en) * 1980-10-09 1982-04-20 Canon Inc Control method and device of copying machine
JPS59197850A (ja) * 1983-04-26 1984-11-09 Shinko Electric Ind Co Ltd めつき液中の金属濃度の分析方法
FR2566535B1 (fr) * 1984-06-22 1986-09-12 Elf Aquitaine Procede pour la determination et l'ajustement de la concentration des brillanteurs dans les bains de cuivrage, ainsi que dispositif pour la mise en oeuvre de ce procede, notamment pour application a l'industrie des circuits imprimes

Also Published As

Publication number Publication date
EP0151926A3 (en) 1988-08-31
EP0151926B1 (de) 1992-08-05
JPS60187856A (ja) 1985-09-25
US4725339A (en) 1988-02-16
DE3586435D1 (de) 1992-09-10
EP0151926A2 (de) 1985-08-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee