DE3578263D1 - Verfahren zur herstellung einer halbleiteranordnung. - Google Patents
Verfahren zur herstellung einer halbleiteranordnung.Info
- Publication number
- DE3578263D1 DE3578263D1 DE8585201077T DE3578263T DE3578263D1 DE 3578263 D1 DE3578263 D1 DE 3578263D1 DE 8585201077 T DE8585201077 T DE 8585201077T DE 3578263 T DE3578263 T DE 3578263T DE 3578263 D1 DE3578263 D1 DE 3578263D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- semiconductor arrangement
- semiconductor
- arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66946—Charge transfer devices
- H01L29/66954—Charge transfer devices with an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42396—Gate electrodes for field effect devices for charge coupled devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/911—Differential oxidation and etching
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8402223A NL8402223A (nl) | 1984-07-13 | 1984-07-13 | Werkwijze ter vervaardiging van een halfgeleiderinrichting en inrichting, vervaardigd door toepassing daarvan. |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3578263D1 true DE3578263D1 (de) | 1990-07-19 |
Family
ID=19844211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585201077T Expired - Lifetime DE3578263D1 (de) | 1984-07-13 | 1985-07-04 | Verfahren zur herstellung einer halbleiteranordnung. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4619039A (de) |
EP (1) | EP0171105B1 (de) |
JP (1) | JPS6140059A (de) |
CA (1) | CA1230430A (de) |
DE (1) | DE3578263D1 (de) |
NL (1) | NL8402223A (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8501339A (nl) * | 1985-05-10 | 1986-12-01 | Philips Nv | Halfgeleiderinrichting en werkwijze ter vervaardiging daarvan. |
US5017515A (en) * | 1989-10-02 | 1991-05-21 | Texas Instruments Incorporated | Process for minimizing lateral distance between elements in an integrated circuit by using sidewall spacers |
JPH04212472A (ja) * | 1990-07-13 | 1992-08-04 | Toshiba Corp | 不揮発性半導体記憶装置の製造方法 |
US5236853A (en) * | 1992-02-21 | 1993-08-17 | United Microelectronics Corporation | Self-aligned double density polysilicon lines for ROM and EPROM |
EP0981164A3 (de) * | 1998-08-18 | 2003-10-15 | International Business Machines Corporation | Füllung mit niedrigem Widerstand für Kondensator in tiefem Graben |
WO2014107608A1 (en) | 2013-01-04 | 2014-07-10 | Carbo Ceramics Inc. | Electrically conductive proppant and methods for detecting, locating and characterizing the electrically conductive proppant |
US11008505B2 (en) | 2013-01-04 | 2021-05-18 | Carbo Ceramics Inc. | Electrically conductive proppant |
WO2018052473A2 (en) | 2016-09-15 | 2018-03-22 | Applied Materials, Inc. | Contact integration and selective silicide formation methods |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5427113A (en) * | 1977-08-02 | 1979-03-01 | Toshiba Corp | Arrangement for preventing axle-weight transfer of locomotive |
US4348804A (en) * | 1978-07-12 | 1982-09-14 | Vlsi Technology Research Association | Method of fabricating an integrated circuit device utilizing electron beam irradiation and selective oxidation |
CA1129118A (en) * | 1978-07-19 | 1982-08-03 | Tetsushi Sakai | Semiconductor devices and method of manufacturing the same |
US4328611A (en) * | 1980-04-28 | 1982-05-11 | Trw Inc. | Method for manufacture of an interdigitated collector structure utilizing etch and refill techniques |
US4402128A (en) * | 1981-07-20 | 1983-09-06 | Rca Corporation | Method of forming closely spaced lines or contacts in semiconductor devices |
NL8105559A (nl) * | 1981-12-10 | 1983-07-01 | Philips Nv | Werkwijze voor het aanbrengen van een smalle groef in een substraatgebied, in het bijzonder een halfgeleidersubstraatgebied. |
US4424621A (en) * | 1981-12-30 | 1984-01-10 | International Business Machines Corporation | Method to fabricate stud structure for self-aligned metallization |
NL8202686A (nl) * | 1982-07-05 | 1984-02-01 | Philips Nv | Werkwijze ter vervaardiging van een veldeffektinrichting met geisoleerde stuurelektrode, en inrichting vervaardigd volgens de werkwijze. |
NL8302541A (nl) * | 1983-07-15 | 1985-02-01 | Philips Nv | Werkwijze ter vervaardiging van een halfgeleiderinrichting, en halfgeleiderinrichting vervaardigd volgens de werkwijze. |
NL8400224A (nl) * | 1984-01-25 | 1985-08-16 | Philips Nv | Werkwijze ter vervaardiging van een halfgeleiderinrichting en inrichting vervaardigd door toepassing daarvan. |
-
1984
- 1984-07-13 NL NL8402223A patent/NL8402223A/nl not_active Application Discontinuation
- 1984-10-04 US US06/657,644 patent/US4619039A/en not_active Expired - Fee Related
-
1985
- 1985-06-27 CA CA000485716A patent/CA1230430A/en not_active Expired
- 1985-07-04 EP EP85201077A patent/EP0171105B1/de not_active Expired
- 1985-07-04 DE DE8585201077T patent/DE3578263D1/de not_active Expired - Lifetime
- 1985-07-10 JP JP15031285A patent/JPS6140059A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US4619039A (en) | 1986-10-28 |
EP0171105B1 (de) | 1990-06-13 |
NL8402223A (nl) | 1986-02-03 |
EP0171105A2 (de) | 1986-02-12 |
CA1230430A (en) | 1987-12-15 |
EP0171105A3 (en) | 1986-02-19 |
JPS6140059A (ja) | 1986-02-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3686315T2 (de) | Verfahren zur herstellung einer halbleiterstruktur. | |
DE3583183D1 (de) | Verfahren zur herstellung eines halbleitersubstrates. | |
DE3485924T2 (de) | Verfahren zur herstellung einer halbleiterlaservorrichtung. | |
DE3677750D1 (de) | Verfahren zur herstellung einer nockenwelle. | |
DE3777047D1 (de) | Verfahren zur herstellung einer anschlusselektrode einer halbleiteranordnung. | |
DE3587255D1 (de) | Verfahren zur herstellung einer halbleiteranordnung mit einer wanne, z.b. einer komplementaeren halbleiteranordnung. | |
DE3866735D1 (de) | Verfahren zur herstellung einer thiazepin-verbindung. | |
DE3280182D1 (de) | Verfahren zur herstellung einer monokristallinen schicht. | |
DE3788486D1 (de) | Verfahren zur Herstellung einer monolithischen Hochspannungshalbleiterschaltung. | |
DE3775459D1 (de) | Verfahren zur herstellung einer diamantenschicht. | |
DE68907507D1 (de) | Verfahren zur herstellung einer halbleitervorrichtung. | |
DE3575728D1 (de) | Verfahren zur herstellung kristallisierten maltitols. | |
DE3577239D1 (de) | Verfahren zur herstellung einer silberhalogenidemulsion. | |
DE3381126D1 (de) | Verfahren zur herstellung einer monokristallinen halbleiterschicht. | |
DE3582143D1 (de) | Verfahren zur herstellung einer halbleitervorrichtung. | |
DE3779802T2 (de) | Verfahren zur herstellung einer halbleiteranordnung. | |
DE3575373D1 (de) | Verfahren zur herstellung einer knoblauchpaste. | |
DE3484526D1 (de) | Verfahren zur herstellung einer halbleiteranordnung. | |
DE3580350D1 (de) | Verfahren zur herstellung einer frukto-oligosaccharose. | |
DE3486144T2 (de) | Verfahren zur herstellung einer halbleiteranordnung. | |
DE3578263D1 (de) | Verfahren zur herstellung einer halbleiteranordnung. | |
DE3868669D1 (de) | Verfahren zur herstellung einer polyglycidylamin-verbindung. | |
DE3783799D1 (de) | Verfahren zur herstellung einer halbleiteranordnung. | |
DE3785287D1 (de) | Verfahren zur herstellung einer duennschicht-halbleiterdiodenanordnung. | |
DE3685220D1 (de) | Verfahren zur herstellung einer abdichtung. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |