DE3578261D1 - Pruefmuster-herstellungsmethode. - Google Patents

Pruefmuster-herstellungsmethode.

Info

Publication number
DE3578261D1
DE3578261D1 DE8585103275T DE3578261T DE3578261D1 DE 3578261 D1 DE3578261 D1 DE 3578261D1 DE 8585103275 T DE8585103275 T DE 8585103275T DE 3578261 T DE3578261 T DE 3578261T DE 3578261 D1 DE3578261 D1 DE 3578261D1
Authority
DE
Germany
Prior art keywords
production method
test pattern
pattern production
test
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585103275T
Other languages
German (de)
English (en)
Inventor
Wallace Joseph Guillaume
John Farley Loughran
Jan Rogoyski
Edward Victor Weber
Robert Arthur Simpson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3578261D1 publication Critical patent/DE3578261D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/44—Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3005—Observing the objects or the point of impact on the object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
DE8585103275T 1984-03-23 1985-03-21 Pruefmuster-herstellungsmethode. Expired - Lifetime DE3578261D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/592,986 US4581537A (en) 1984-03-23 1984-03-23 Method for generating inspection patterns

Publications (1)

Publication Number Publication Date
DE3578261D1 true DE3578261D1 (de) 1990-07-19

Family

ID=24372883

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585103275T Expired - Lifetime DE3578261D1 (de) 1984-03-23 1985-03-21 Pruefmuster-herstellungsmethode.

Country Status (4)

Country Link
US (1) US4581537A (enExample)
EP (1) EP0155687B1 (enExample)
JP (1) JPS60201630A (enExample)
DE (1) DE3578261D1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0508151B1 (en) * 1991-03-13 1998-08-12 Fujitsu Limited Charged particle beam exposure system and charged particle beam exposure method
KR0144489B1 (ko) * 1995-10-04 1998-07-01 김주용 반도체소자의 공정결함 검사방법
JP4076644B2 (ja) 1997-12-05 2008-04-16 株式会社ルネサステクノロジ パターン歪検出装置及び検出方法
JP7111496B2 (ja) * 2018-04-12 2022-08-02 株式会社ニューフレアテクノロジー パターン検査装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5432766A (en) * 1977-08-18 1979-03-10 Fujitsu Ltd Inspecting system for pattern and like
JPS5481075A (en) * 1977-11-24 1979-06-28 Cho Lsi Gijutsu Kenkyu Kumiai Method of detecting article image using electron beam
JPS55105329A (en) * 1978-12-28 1980-08-12 Fujitsu Ltd Inspecting method for pattern
US4494004A (en) * 1980-11-28 1985-01-15 International Business Machines Corporation Electron beam system
DE3070433D1 (en) * 1980-12-18 1985-05-09 Ibm Method for the inspection and automatic sorting of objects with configurations of fixed dimensional tolerances, and device for carrying out the method
US4357540A (en) * 1980-12-19 1982-11-02 International Business Machines Corporation Semiconductor device array mask inspection method and apparatus
US4365163A (en) * 1980-12-19 1982-12-21 International Business Machines Corporation Pattern inspection tool - method and apparatus
EP0054710B1 (de) * 1980-12-19 1986-02-05 International Business Machines Corporation Verfahren zum Ausrichten und Prüfen eines mit Mustern versehenen Werkstücks, z.B. einer Maske für die Herstellung von Halbleiterelementen
JPS57198628A (en) * 1981-05-30 1982-12-06 Toshiba Corp Inspecting device for pattern
US4475037A (en) * 1982-05-11 1984-10-02 International Business Machines Corporation Method of inspecting a mask using an electron beam vector scan system

Also Published As

Publication number Publication date
EP0155687A2 (en) 1985-09-25
JPH032292B2 (enExample) 1991-01-14
EP0155687B1 (en) 1990-06-13
EP0155687A3 (en) 1987-12-16
JPS60201630A (ja) 1985-10-12
US4581537A (en) 1986-04-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee