JPS5432766A - Inspecting system for pattern and like - Google Patents

Inspecting system for pattern and like

Info

Publication number
JPS5432766A
JPS5432766A JP9926777A JP9926777A JPS5432766A JP S5432766 A JPS5432766 A JP S5432766A JP 9926777 A JP9926777 A JP 9926777A JP 9926777 A JP9926777 A JP 9926777A JP S5432766 A JPS5432766 A JP S5432766A
Authority
JP
Japan
Prior art keywords
pattern
inspecting system
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9926777A
Other languages
Japanese (ja)
Inventor
Takao Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9926777A priority Critical patent/JPS5432766A/en
Publication of JPS5432766A publication Critical patent/JPS5432766A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP9926777A 1977-08-18 1977-08-18 Inspecting system for pattern and like Pending JPS5432766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9926777A JPS5432766A (en) 1977-08-18 1977-08-18 Inspecting system for pattern and like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9926777A JPS5432766A (en) 1977-08-18 1977-08-18 Inspecting system for pattern and like

Publications (1)

Publication Number Publication Date
JPS5432766A true JPS5432766A (en) 1979-03-10

Family

ID=14242907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9926777A Pending JPS5432766A (en) 1977-08-18 1977-08-18 Inspecting system for pattern and like

Country Status (1)

Country Link
JP (1) JPS5432766A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637625A (en) * 1979-09-05 1981-04-11 Fujitsu Ltd Inspection of mask
JPS60201630A (en) * 1984-03-23 1985-10-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming inspecting pattern
JPS6124233A (en) * 1984-07-13 1986-02-01 Oki Electric Ind Co Ltd Method for inspection of pattern
JPS62144169A (en) * 1985-12-19 1987-06-27 Canon Inc Mask structure body for lithograph

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5637625A (en) * 1979-09-05 1981-04-11 Fujitsu Ltd Inspection of mask
JPS60201630A (en) * 1984-03-23 1985-10-12 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming inspecting pattern
JPH032292B2 (en) * 1984-03-23 1991-01-14 Intaanashonaru Bijinesu Mashiinzu Corp
JPS6124233A (en) * 1984-07-13 1986-02-01 Oki Electric Ind Co Ltd Method for inspection of pattern
JPS62144169A (en) * 1985-12-19 1987-06-27 Canon Inc Mask structure body for lithograph

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