DE3468789D1 - Electrostriction transducer comprising electrostriction layers of axially varied thicknesses - Google Patents
Electrostriction transducer comprising electrostriction layers of axially varied thicknessesInfo
- Publication number
- DE3468789D1 DE3468789D1 DE8484112592T DE3468789T DE3468789D1 DE 3468789 D1 DE3468789 D1 DE 3468789D1 DE 8484112592 T DE8484112592 T DE 8484112592T DE 3468789 T DE3468789 T DE 3468789T DE 3468789 D1 DE3468789 D1 DE 3468789D1
- Authority
- DE
- Germany
- Prior art keywords
- electrostriction
- transducer
- layers
- varied thicknesses
- axially varied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58195739A JPS6086880A (ja) | 1983-10-19 | 1983-10-19 | 電歪効果素子 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3468789D1 true DE3468789D1 (en) | 1988-02-18 |
Family
ID=16346158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8484112592T Expired DE3468789D1 (en) | 1983-10-19 | 1984-10-18 | Electrostriction transducer comprising electrostriction layers of axially varied thicknesses |
Country Status (7)
Country | Link |
---|---|
US (1) | US4633120A (de) |
EP (1) | EP0144655B1 (de) |
JP (1) | JPS6086880A (de) |
KR (1) | KR900000834B1 (de) |
AU (1) | AU564329B2 (de) |
CA (1) | CA1239965A (de) |
DE (1) | DE3468789D1 (de) |
Families Citing this family (69)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61205100A (ja) * | 1985-03-08 | 1986-09-11 | Murata Mfg Co Ltd | 圧電発音体 |
JPH0314056Y2 (de) * | 1985-06-19 | 1991-03-28 | ||
JPS6240859U (de) * | 1985-08-29 | 1987-03-11 | ||
JPH0732273B2 (ja) * | 1986-05-22 | 1995-04-10 | 日本電気株式会社 | 電歪効果素子 |
JPS63207185A (ja) * | 1987-02-23 | 1988-08-26 | Toyota Motor Corp | 圧電アクチユエ−タ |
JP2676393B2 (ja) * | 1988-11-30 | 1997-11-12 | 富士電機株式会社 | 積層型圧電素子 |
JPH02205082A (ja) * | 1989-02-02 | 1990-08-14 | Fuji Electric Co Ltd | 積層型圧電素子の駆動方法 |
SG83626A1 (en) * | 1989-07-11 | 2001-10-16 | Seiko Epson Corp | Piezoelectric/electrostrictive actuator having at least one piezoelectric/electrostrictive film |
US5165809A (en) * | 1990-03-06 | 1992-11-24 | Brother Kogyo Kabushiki Kaisha | Piezoelectric actuator and print head using the actuator, having means for increasing durability of laminar piezoelectric driver |
US5089739A (en) * | 1990-03-19 | 1992-02-18 | Brother Kogyo Kabushiki Kaisha | Laminate type piezoelectric actuator element |
US5210455A (en) * | 1990-07-26 | 1993-05-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion |
JP2545639B2 (ja) * | 1990-07-30 | 1996-10-23 | 富士通株式会社 | 積層型圧電素子 |
WO1992006511A1 (en) * | 1990-09-28 | 1992-04-16 | Caterpillar Inc. | Piezoelectric solid state motor stack |
JPH04159785A (ja) * | 1990-10-23 | 1992-06-02 | Nec Corp | 電歪効果素子 |
JPH0487253U (de) * | 1990-11-30 | 1992-07-29 | ||
DE4201937C2 (de) * | 1991-01-25 | 1997-05-22 | Murata Manufacturing Co | Piezoelektrisches laminiertes Stellglied |
JP2692396B2 (ja) * | 1991-02-22 | 1997-12-17 | 日本電気株式会社 | 圧電アクチュエータおよびその製造方法 |
DE69223096T2 (de) * | 1991-07-18 | 1998-05-28 | Ngk Insulators Ltd | Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid |
US5168189A (en) * | 1991-09-18 | 1992-12-01 | Caterpillar Inc. | Solderless connector for a solid state motor stack |
US5367500A (en) * | 1992-09-30 | 1994-11-22 | The United States Of America As Represented By The Secretary Of The Navy | Transducer structure |
JP2586371B2 (ja) * | 1992-12-22 | 1997-02-26 | 日本電気株式会社 | 圧電アクチュエータ |
JPH08153914A (ja) * | 1994-11-25 | 1996-06-11 | Philips Japan Ltd | 圧電磁器トランス |
JP3432974B2 (ja) * | 1995-10-13 | 2003-08-04 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
EP0784349B1 (de) * | 1996-01-11 | 2005-06-01 | Wac Data Services Co. Ltd. | Laminierter piezoelektrischer Antrieb und Verfahren |
JP3218972B2 (ja) * | 1996-04-01 | 2001-10-15 | 株式会社村田製作所 | ラダー形フィルタ |
JP3266031B2 (ja) * | 1996-04-18 | 2002-03-18 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
US6016024A (en) * | 1996-04-05 | 2000-01-18 | Murata Manufacturing Co., Ltd. | Piezoelectric component |
JP3271517B2 (ja) * | 1996-04-05 | 2002-04-02 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
US5939819A (en) * | 1996-04-18 | 1999-08-17 | Murata Manufacturing Co., Ltd. | Electronic component and ladder filter |
JPH1079639A (ja) * | 1996-07-10 | 1998-03-24 | Murata Mfg Co Ltd | 圧電共振子およびそれを用いた電子部品 |
JPH1084244A (ja) * | 1996-07-18 | 1998-03-31 | Murata Mfg Co Ltd | 圧電共振子およびそれを用いた電子部品 |
JP3271541B2 (ja) * | 1996-07-26 | 2002-04-02 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
JP3577170B2 (ja) * | 1996-08-05 | 2004-10-13 | 株式会社村田製作所 | 圧電共振子とその製造方法およびそれを用いた電子部品 |
JPH10107579A (ja) * | 1996-08-06 | 1998-04-24 | Murata Mfg Co Ltd | 圧電部品 |
JPH10126203A (ja) * | 1996-08-27 | 1998-05-15 | Murata Mfg Co Ltd | 圧電共振子およびそれを用いた電子部品 |
JP3267171B2 (ja) * | 1996-09-12 | 2002-03-18 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
JPH10126202A (ja) * | 1996-10-23 | 1998-05-15 | Murata Mfg Co Ltd | 圧電共振子およびそれを用いた電子部品 |
JP3271538B2 (ja) * | 1996-11-28 | 2002-04-02 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
CN1198037A (zh) * | 1997-04-25 | 1998-11-04 | 株式会社村田制作所 | 压电谐振器和使用它的电子元件 |
JP3456380B2 (ja) * | 1997-09-02 | 2003-10-14 | 株式会社村田製作所 | 圧電アクチュエータ |
JP3147834B2 (ja) * | 1997-10-03 | 2001-03-19 | 株式会社村田製作所 | 圧電共振子の製造方法 |
JP3948089B2 (ja) * | 1998-01-22 | 2007-07-25 | セイコーエプソン株式会社 | 圧電体素子及びそれを用いたインクジェット式記録ヘッド |
JP4578596B2 (ja) * | 1998-09-18 | 2010-11-10 | セイコーインスツル株式会社 | 振動子、圧電アクチュエータおよびこれらを用いた電子機器 |
TW432731B (en) * | 1998-12-01 | 2001-05-01 | Murata Manufacturing Co | Multilayer piezoelectric part |
DE19856201A1 (de) * | 1998-12-05 | 2000-06-15 | Bosch Gmbh Robert | Piezoelektrischer Aktor |
DE19928176A1 (de) * | 1999-06-19 | 2001-01-04 | Bosch Gmbh Robert | Piezoaktor |
DE10024701A1 (de) * | 2000-05-18 | 2001-11-29 | Bosch Gmbh Robert | Piezoaktor |
GB0023412D0 (en) * | 2000-09-23 | 2000-11-08 | Khaghani Asghar | Aortic counterpulsator |
DE10201943A1 (de) * | 2001-02-15 | 2002-10-24 | Ceramtec Ag | Vielschichtaktor mit versetzt angeordneten Kontaktflächen gleich gepolter Innenelektroden für ihre Außenelektrode |
DE10202574A1 (de) * | 2001-02-15 | 2002-09-12 | Ceramtec Ag | Piezokeramischer Vielschichtaktor mit einem Übergangsbereich zwischen dem aktiven Bereich und den inaktiven Kopf- und Fußbereichen |
DE10147666B4 (de) * | 2001-09-27 | 2011-03-10 | Robert Bosch Gmbh | Piezoelement und Verfahren zur Herstellung eines Piezoelements |
DE10148603B4 (de) * | 2001-10-02 | 2004-02-19 | Siemens Ag | Aktoreinheit mit wenigstens zwei Aktorelementen |
US6614144B2 (en) * | 2001-10-04 | 2003-09-02 | Force International, Corp. | Multilayer piezoelectric transformer |
DE102004002133A1 (de) | 2004-01-15 | 2005-08-04 | Robert Bosch Gmbh | Piezoelektrischer Aktor |
JP4876467B2 (ja) * | 2004-12-06 | 2012-02-15 | 株式会社デンソー | 積層型圧電素子 |
JP4803039B2 (ja) * | 2005-01-06 | 2011-10-26 | 株式会社村田製作所 | 圧電アクチュエータの製造方法及び圧電アクチュエータ |
US8441174B2 (en) | 2005-06-15 | 2013-05-14 | Kyocera Corporation | Multilayer piezoelectric element and injector using the same |
EP1942532B1 (de) | 2005-09-29 | 2015-03-18 | Kyocera Corporation | Laminiertes piezoelektrisches element und einspritzvorrichtung damit |
DE102006021945A1 (de) | 2006-05-11 | 2007-11-15 | Robert Bosch Gmbh | Piezoelektrischer Aktor und Injektor mit einem piezoelektrischen Aktor für eine Brennkraftmaschine |
DE102006032218A1 (de) * | 2006-07-12 | 2008-01-17 | Robert Bosch Gmbh | Brennstoffeinspritzventil |
JP5025661B2 (ja) | 2006-12-15 | 2012-09-12 | 京セラ株式会社 | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム |
WO2010110291A1 (ja) * | 2009-03-25 | 2010-09-30 | 京セラ株式会社 | 積層型圧電素子およびそれを用いた噴射装置ならびに燃料噴射システム |
EP2452375A4 (de) * | 2009-07-10 | 2014-04-30 | Viking At Llc | Kleinflächiger aktuator mit einem intelligenten material und energiegewinnungsvorrichtung damit |
US8669689B2 (en) * | 2009-07-10 | 2014-03-11 | Viking At, Llc | Mountable arm smart material actuator and energy harvesting apparatus |
JP2013520157A (ja) | 2010-02-17 | 2013-05-30 | ヴァイキング エーティー,エルエルシー | 取り囲まれた補償器を持つスマート材料アクチュエータ |
WO2015100280A1 (en) | 2013-12-24 | 2015-07-02 | Viking At, Llc | Mechanically amplified smart material actuator utilizing layered web assembly |
US10734531B2 (en) | 2017-06-22 | 2020-08-04 | The Penn State Research Foundation | Two-dimensional electrostrictive field effect transistor (2D-EFET) |
US11632063B1 (en) * | 2019-08-27 | 2023-04-18 | Meta Platforms Technologies, Llc | Structured actuators |
JP7164847B2 (ja) * | 2020-02-28 | 2022-11-02 | 日本特殊陶業株式会社 | 圧電アクチュエータ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE899770C (de) * | 1937-05-28 | 1953-12-17 | Atlas Werke Ag | Piezoelektrischer Biegeschwinger |
US3154700A (en) * | 1961-01-09 | 1964-10-27 | Joseph T Mcnaney | Piezoelectric transducer force to motion converter |
US4229812A (en) * | 1971-11-24 | 1980-10-21 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus for securing a ferroelectric stack to a weighted projection surface |
JPS5235994A (en) * | 1975-09-16 | 1977-03-18 | Nippon Telegr & Teleph Corp <Ntt> | Piezo electric type digital quivering element |
US4342935A (en) * | 1980-04-10 | 1982-08-03 | Discovision Associates | Binary piezoelectric drive for lens focusing system |
US4384230A (en) * | 1980-11-06 | 1983-05-17 | United Technologies Corporation | Digital piezoelectric actuator |
US4435666A (en) * | 1981-05-26 | 1984-03-06 | Nippon Electric Co., Ltd. | Lever actuator comprising a longitudinal-effect electroexpansive transducer and designed to prevent actuation from degrading the actuator |
US4438364A (en) * | 1981-07-13 | 1984-03-20 | The Garrett Corporation | Piezoelectric actuator |
JPS5943582A (ja) * | 1982-09-03 | 1984-03-10 | Toshiba Corp | 圧電変位装置 |
-
1983
- 1983-10-19 JP JP58195739A patent/JPS6086880A/ja active Granted
-
1984
- 1984-10-18 DE DE8484112592T patent/DE3468789D1/de not_active Expired
- 1984-10-18 AU AU34454/84A patent/AU564329B2/en not_active Expired
- 1984-10-18 US US06/662,113 patent/US4633120A/en not_active Expired - Lifetime
- 1984-10-18 EP EP84112592A patent/EP0144655B1/de not_active Expired
- 1984-10-19 CA CA000465838A patent/CA1239965A/en not_active Expired
- 1984-10-19 KR KR8406520A patent/KR900000834B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPS6086880A (ja) | 1985-05-16 |
EP0144655B1 (de) | 1988-01-13 |
EP0144655A1 (de) | 1985-06-19 |
AU564329B2 (en) | 1987-08-06 |
KR850003466A (ko) | 1985-06-17 |
CA1239965A (en) | 1988-08-02 |
US4633120A (en) | 1986-12-30 |
KR900000834B1 (en) | 1990-02-17 |
JPS6310596B2 (de) | 1988-03-08 |
AU3445484A (en) | 1985-04-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: NEC TOKIN CORP., SENDAI, MIYAGI, JP |