DE3465405D1 - Articulated arm transfer device - Google Patents

Articulated arm transfer device

Info

Publication number
DE3465405D1
DE3465405D1 DE8484901045T DE3465405T DE3465405D1 DE 3465405 D1 DE3465405 D1 DE 3465405D1 DE 8484901045 T DE8484901045 T DE 8484901045T DE 3465405 T DE3465405 T DE 3465405T DE 3465405 D1 DE3465405 D1 DE 3465405D1
Authority
DE
Germany
Prior art keywords
transfer device
articulated arm
arm transfer
articulated
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8484901045T
Other languages
English (en)
Inventor
James Davis
Norman Brooks
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aeronca Electronics Inc
Original Assignee
Aeronca Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aeronca Electronics Inc filed Critical Aeronca Electronics Inc
Application granted granted Critical
Publication of DE3465405D1 publication Critical patent/DE3465405D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
DE8484901045T 1983-02-14 1984-02-13 Articulated arm transfer device Expired DE3465405D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US46609183A 1983-02-14 1983-02-14
PCT/US1984/000185 WO1984003196A1 (en) 1983-02-14 1984-02-13 Articulated arm transfer device

Publications (1)

Publication Number Publication Date
DE3465405D1 true DE3465405D1 (en) 1987-09-17

Family

ID=23850425

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8484901045T Expired DE3465405D1 (en) 1983-02-14 1984-02-13 Articulated arm transfer device

Country Status (6)

Country Link
US (1) US4730976A (de)
EP (1) EP0137819B1 (de)
JP (1) JPS60183736A (de)
CA (1) CA1231357A (de)
DE (1) DE3465405D1 (de)
WO (1) WO1984003196A1 (de)

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EP0265517A1 (de) * 1986-05-16 1988-05-04 EASTMAN KODAK COMPANY (a New Jersey corporation) Fördervorrichtung für gegenstände
GB2194500B (en) * 1986-07-04 1991-01-23 Canon Kk A wafer handling apparatus
US4824359A (en) * 1986-12-15 1989-04-25 Hoover Universal, Inc. Dual injection mold preform transfer assembly
KR970004947B1 (ko) * 1987-09-10 1997-04-10 도오교오 에레구토론 가부시끼가이샤 핸들링장치
KR900006017B1 (ko) * 1987-12-18 1990-08-20 한국전기통신공사 가변직경형 웨이퍼운송장치
JP2592511B2 (ja) * 1988-12-03 1997-03-19 株式会社フレンドテック研究所 縦型半導体製造システム
US5013210A (en) * 1989-05-08 1991-05-07 Bond Irvin D Workpiece transfer apparatus with folding arms
ES2130295T3 (es) * 1989-10-20 1999-07-01 Applied Materials Inc Aparato de tipo robot.
US5447409A (en) * 1989-10-20 1995-09-05 Applied Materials, Inc. Robot assembly
JP2938160B2 (ja) * 1990-07-20 1999-08-23 東京エレクトロン株式会社 真空処理装置
JP2919065B2 (ja) * 1990-11-29 1999-07-12 株式会社東芝 搬送装置
JPH04199730A (ja) * 1990-11-29 1992-07-20 Toshiba Corp 搬送装置
JP3196218B2 (ja) * 1991-01-10 2001-08-06 ソニー株式会社 ウエハ搬送装置とウエハ搬送方法
JP3030667B2 (ja) * 1991-07-29 2000-04-10 東京エレクトロン株式会社 搬送装置
JP2598353B2 (ja) * 1991-12-04 1997-04-09 アネルバ株式会社 基板処理装置、基板搬送装置及び基板交換方法
US5516732A (en) * 1992-12-04 1996-05-14 Sony Corporation Wafer processing machine vacuum front end method and apparatus
US5376862A (en) * 1993-01-28 1994-12-27 Applied Materials, Inc. Dual coaxial magnetic couplers for vacuum chamber robot assembly
US5643366A (en) * 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
US5655060A (en) * 1995-03-31 1997-08-05 Brooks Automation Time optimal trajectory for cluster tool robots
US5609459A (en) * 1995-07-06 1997-03-11 Brooks Automation, Inc. Door drive mechanisms for substrate carrier and load lock
US5607276A (en) * 1995-07-06 1997-03-04 Brooks Automation, Inc. Batchloader for substrate carrier on load lock
US5613821A (en) * 1995-07-06 1997-03-25 Brooks Automation, Inc. Cluster tool batchloader of substrate carrier
US5664925A (en) * 1995-07-06 1997-09-09 Brooks Automation, Inc. Batchloader for load lock
US5588789A (en) * 1995-07-06 1996-12-31 Brooks Automation Load arm for load lock
JP4231552B2 (ja) 1995-12-15 2009-03-04 ブルックス オートメーション インコーポレイテッド 幅広リスト・屈曲アームを有する物体移送装置
JP3769802B2 (ja) * 1996-02-09 2006-04-26 株式会社日立製作所 半導体装置の製造方法
US5765983A (en) * 1996-05-30 1998-06-16 Brooks Automation, Inc. Robot handling apparatus
US6123502A (en) * 1997-07-08 2000-09-26 Brooks Automation, Inc. Substrate holder having vacuum holding and gravity holding
US6120229A (en) * 1999-02-01 2000-09-19 Brooks Automation Inc. Substrate carrier as batchloader
MXPA01012436A (es) 1999-06-04 2003-09-10 Distributed Robotics Llc Dispositivo de manejo de material.
JP4364634B2 (ja) 2001-07-13 2009-11-18 ブルックス オートメーション インコーポレイテッド 二次元３自由度ロボットアームの軌道プラニング及び移動制御戦略
US6990430B2 (en) * 2002-12-20 2006-01-24 Brooks Automation, Inc. System and method for on-the-fly eccentricity recognition
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US20070269297A1 (en) 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
US20050113976A1 (en) * 2003-11-10 2005-05-26 Blueshift Technologies, Inc. Software controller for handling system
KR101505062B1 (ko) * 2010-05-25 2015-03-23 시스테만틱스 인디아 피브이티. 엘티디 직렬-병렬 링크 기구 기반의 하이브리드 6 자유도 로봇 매니퓰레이터
CN103237634B (zh) 2010-10-08 2016-12-14 布鲁克斯自动化公司 同轴驱动的真空机器人
TWI586500B (zh) * 2010-10-08 2017-06-11 布魯克斯自動機械公司 機器人運送裝置及基板處理裝置
US9186799B2 (en) 2011-07-13 2015-11-17 Brooks Automation, Inc. Compact direct drive spindle
US9202733B2 (en) 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
US9401296B2 (en) 2011-11-29 2016-07-26 Persimmon Technologies Corporation Vacuum robot adapted to grip and transport a substrate and method thereof with passive bias

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DE7716749U1 (de) * 1900-01-01 Valentin, Otto, 7987 Weingarten
US629698A (en) * 1899-02-07 1899-07-25 Ludvic M Miller Drawer-equalizer.
US1204276A (en) * 1915-08-18 1916-11-07 Hi Lo Jack Company Jack.
US2580829A (en) * 1950-01-16 1952-01-01 William J Peck Automobile jack
US3522838A (en) * 1968-04-30 1970-08-04 Respond Inc Die casting extractor
US3730595A (en) * 1971-11-30 1973-05-01 Ibm Linear carrier sender and receiver
US3823836A (en) * 1973-05-22 1974-07-16 Plat General Inc Vacuum apparatus for handling sheets
US3874525A (en) * 1973-06-29 1975-04-01 Ibm Method and apparatus for handling workpieces
US3921788A (en) * 1974-05-21 1975-11-25 Macronetics Inc Processing apparatus for thin disc-like workpieces
US4139104A (en) * 1975-07-25 1979-02-13 George Mink Material handling apparatus
JPS5244985A (en) * 1975-10-06 1977-04-08 Maeda Kogyo Kk Lateral shifting equipmnt of load supporting table
US4062463A (en) * 1976-05-11 1977-12-13 Machine Technology, Inc. Automated single cassette load mechanism for scrubber
US4208159A (en) * 1977-07-18 1980-06-17 Tokyo Ohka Kogyo Kabushiki Kaisha Apparatus for the treatment of a wafer by plasma reaction
FR2398347A1 (fr) * 1977-07-19 1979-02-16 Crouzet Sa Perfectionnements aux robots
JPS608890B2 (ja) * 1978-09-24 1985-03-06 富士エンヂニアリング株式会社 プレスワ−クの自動搬入、搬出装置
US4275978A (en) * 1979-02-15 1981-06-30 Brooks Norman B Transport apparatus
JPS5720445A (en) * 1980-07-11 1982-02-02 Citizen Watch Co Ltd Handling device for wafer

Also Published As

Publication number Publication date
US4730976A (en) 1988-03-15
EP0137819B1 (de) 1987-08-12
EP0137819A1 (de) 1985-04-24
WO1984003196A1 (en) 1984-08-16
CA1231357A (en) 1988-01-12
JPS60183736A (ja) 1985-09-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

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