DE3379115D1 - X-ray analysis apparatus comprising a four-crystal monochromator - Google Patents

X-ray analysis apparatus comprising a four-crystal monochromator

Info

Publication number
DE3379115D1
DE3379115D1 DE8383201641T DE3379115T DE3379115D1 DE 3379115 D1 DE3379115 D1 DE 3379115D1 DE 8383201641 T DE8383201641 T DE 8383201641T DE 3379115 T DE3379115 T DE 3379115T DE 3379115 D1 DE3379115 D1 DE 3379115D1
Authority
DE
Germany
Prior art keywords
analysis apparatus
ray analysis
crystal monochromator
monochromator
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383201641T
Other languages
English (en)
Inventor
Willem Jan Bartels
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of DE3379115D1 publication Critical patent/DE3379115D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE8383201641T 1982-11-25 1983-11-17 X-ray analysis apparatus comprising a four-crystal monochromator Expired DE3379115D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8204584A NL8204584A (nl) 1982-11-25 1982-11-25 Roentgen analyse apparaat met een vier-kristal monochromator.

Publications (1)

Publication Number Publication Date
DE3379115D1 true DE3379115D1 (en) 1989-03-09

Family

ID=19840648

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383201641T Expired DE3379115D1 (en) 1982-11-25 1983-11-17 X-ray analysis apparatus comprising a four-crystal monochromator

Country Status (5)

Country Link
US (1) US4567605A (de)
EP (1) EP0110469B1 (de)
JP (1) JPS59108945A (de)
DE (1) DE3379115D1 (de)
NL (1) NL8204584A (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6193936A (ja) * 1984-10-13 1986-05-12 Furukawa Electric Co Ltd:The 放射線による被測定物の組成分析方法
US4821301A (en) * 1986-02-28 1989-04-11 Duke University X-ray reflection method and apparatus for chemical analysis of thin surface layers
DE3785763T2 (de) * 1986-08-15 1993-10-21 Commw Scient Ind Res Org Instrumente zur konditionierung von röntgen- oder neutronenstrahlen.
JP2695165B2 (ja) * 1987-10-09 1997-12-24 株式会社日立製作所 結晶構造解析法
GB8926998D0 (en) * 1989-11-29 1990-01-17 Fisons Plc Analysis crystal
JPH0485300U (de) * 1990-11-30 1992-07-24
US5173930A (en) * 1991-11-22 1992-12-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration X-ray monochromator
BE1007349A3 (nl) * 1993-07-19 1995-05-23 Philips Electronics Nv Asymmetrische 4-kristalmonochromator.
US5524040A (en) * 1993-12-17 1996-06-04 The United States Of America As Represented By The United States Department Of Energy High energy resolution, high angular acceptance crystal monochromator
DE4407278A1 (de) * 1994-03-04 1995-09-07 Siemens Ag Röntgen-Analysegerät
WO1996000382A1 (en) * 1994-06-25 1996-01-04 Philips Electronics N.V. Analysing a material sample
DE19833524B4 (de) 1998-07-25 2004-09-23 Bruker Axs Gmbh Röntgen-Analysegerät mit Gradienten-Vielfachschicht-Spiegel
ES2160546B1 (es) * 2000-03-07 2003-04-16 Univ Madrid Autonoma Utilizacion de estructuras cuasicristalinas en aplicaciones opticas de rayos - x
JP4313844B2 (ja) 2000-05-31 2009-08-12 株式会社リガク チャンネルカットモノクロメータ
JP4660712B2 (ja) * 2000-11-30 2011-03-30 財団法人新産業創造研究機構 Ｘ線マイクロビーム生成装置
JP2007010483A (ja) * 2005-06-30 2007-01-18 Rigaku Corp Ｘ線ビーム処理装置及びｘ線分析装置
JP4773899B2 (ja) * 2006-06-29 2011-09-14 株式会社リガク Ｘ線分光測定方法およびｘ線分光装置
US9269468B2 (en) * 2012-04-30 2016-02-23 Jordan Valley Semiconductors Ltd. X-ray beam conditioning
JP6260125B2 (ja) * 2013-07-08 2018-01-17 富士通株式会社 分析装置、分析方法、成膜装置及び成膜方法
CN103940837A (zh) * 2014-04-01 2014-07-23 中国科学院物理研究所 一种SiC晶体单色器
JP2019191167A (ja) 2018-04-23 2019-10-31 ブルカー ジェイヴィ イスラエル リミテッドＢｒｕｋｅｒ Ｊｖ Ｉｓｒａｅｌ Ｌｔｄ． 小角ｘ線散乱測定用のｘ線源光学系
KR102710484B1 (ko) 2018-07-05 2024-09-27 브루커 테크놀로지스 리미티드 소각 ｘ선 산란 계측
US11781999B2 (en) 2021-09-05 2023-10-10 Bruker Technologies Ltd. Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
US12249059B2 (en) 2022-03-31 2025-03-11 Bruker Technologies Ltd. Navigation accuracy using camera coupled with detector assembly

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4524957Y1 (de) * 1965-12-09 1970-09-30
US3518427A (en) * 1968-06-05 1970-06-30 Atomic Energy Commission Universal planar x-ray resonator
JPS5599050A (en) * 1979-01-23 1980-07-28 Nippon X Sen Kk Xxray spectroscope
SU817553A1 (ru) * 1979-06-29 1981-03-30 Институт Кристаллографии Им.А.В.Шуб-Никова Ah Cccp Рентгеновский спектрометр дл СиНХРОТРОННОгО иСТОчНиКА излучЕНи
JPS57156600A (en) * 1981-03-20 1982-09-27 Rigaku Denki Co Ltd X-ray monochromater

Also Published As

Publication number Publication date
NL8204584A (nl) 1984-06-18
US4567605A (en) 1986-01-28
EP0110469A2 (de) 1984-06-13
JPS59108945A (ja) 1984-06-23
EP0110469A3 (en) 1985-04-10
EP0110469B1 (de) 1989-02-01
JPH0430541B2 (de) 1992-05-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS N.V., EINDHOVEN, NL

8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8339 Ceased/non-payment of the annual fee