DE3368349D1 - Apparatus for inspecting a circuit pattern drawn on a photomask used in manufacturing large scale integrated circuits - Google Patents

Apparatus for inspecting a circuit pattern drawn on a photomask used in manufacturing large scale integrated circuits

Info

Publication number
DE3368349D1
DE3368349D1 DE8383305534T DE3368349T DE3368349D1 DE 3368349 D1 DE3368349 D1 DE 3368349D1 DE 8383305534 T DE8383305534 T DE 8383305534T DE 3368349 T DE3368349 T DE 3368349T DE 3368349 D1 DE3368349 D1 DE 3368349D1
Authority
DE
Germany
Prior art keywords
inspecting
integrated circuits
large scale
circuit pattern
scale integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383305534T
Other languages
English (en)
Inventor
Ryoichi Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3368349D1 publication Critical patent/DE3368349D1/de
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE8383305534T 1982-10-05 1983-09-20 Apparatus for inspecting a circuit pattern drawn on a photomask used in manufacturing large scale integrated circuits Expired DE3368349D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57173980A JPS5963725A (ja) 1982-10-05 1982-10-05 パタ−ン検査装置

Publications (1)

Publication Number Publication Date
DE3368349D1 true DE3368349D1 (en) 1987-01-22

Family

ID=15970570

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383305534T Expired DE3368349D1 (en) 1982-10-05 1983-09-20 Apparatus for inspecting a circuit pattern drawn on a photomask used in manufacturing large scale integrated circuits

Country Status (5)

Country Link
US (1) US4559603A (de)
EP (1) EP0105661B1 (de)
JP (1) JPS5963725A (de)
DD (1) DD212619A5 (de)
DE (1) DE3368349D1 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6021523A (ja) * 1983-07-15 1985-02-02 Toshiba Corp マスク欠陥検査方法
JPH061370B2 (ja) * 1983-11-24 1994-01-05 株式会社東芝 マスク欠陥検査装置
JPS60223124A (ja) * 1984-04-18 1985-11-07 Mitsubishi Electric Corp パタ−ン検査装置
GB8429250D0 (en) * 1984-11-20 1984-12-27 Rosen D Measurement method
DE3587846T2 (de) * 1984-12-26 1994-10-06 Hitachi Ltd Verfahren und Gerät zum Prüfen der Geometrie von Mehrschichtmustern für integrierte Schaltungsstrukturen.
US4856904A (en) * 1985-01-21 1989-08-15 Nikon Corporation Wafer inspecting apparatus
US4641967A (en) * 1985-10-11 1987-02-10 Tencor Instruments Particle position correlator and correlation method for a surface scanner
DE3540100A1 (de) * 1985-11-12 1987-06-11 Mania Gmbh Verfahren zur optischen pruefung von leiterplatten
US4760265A (en) * 1986-01-18 1988-07-26 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Method and device for detecting defects of patterns in microelectronic devices
JP2504951B2 (ja) * 1986-05-15 1996-06-05 東芝機械株式会社 パタ−ン検査方法
US4734923A (en) * 1986-05-19 1988-03-29 Hampshire Instruments, Inc Lithographic system mask inspection device
US4829375A (en) * 1986-08-29 1989-05-09 Multiline Technology, Inc. Method for punching in printed circuit board laminates and related apparatus and articles of manufacture
AT392857B (de) * 1987-07-13 1991-06-25 Ims Ionen Mikrofab Syst Vorrichtung und verfahren zur inspektion einer maske
US4876656A (en) * 1987-08-28 1989-10-24 Motorola Inc. Circuit location sensor for component placement apparatus
US4845558A (en) * 1987-12-03 1989-07-04 Kla Instruments Corporation Method and apparatus for detecting defects in repeated microminiature patterns
US5235400A (en) * 1988-10-12 1993-08-10 Hitachi, Ltd. Method of and apparatus for detecting defect on photomask
US5287290A (en) * 1989-03-10 1994-02-15 Fujitsu Limited Method and apparatus for checking a mask pattern
US5124927A (en) * 1990-03-02 1992-06-23 International Business Machines Corp. Latent-image control of lithography tools
JPH04177111A (ja) * 1990-11-13 1992-06-24 Mitsubishi Electric Corp 位相シフトマスク検査装置
US5198878A (en) * 1990-11-30 1993-03-30 International Business Machines Corporation Substrate machining verifier
US5586058A (en) * 1990-12-04 1996-12-17 Orbot Instruments Ltd. Apparatus and method for inspection of a patterned object by comparison thereof to a reference
JP2985323B2 (ja) * 1991-03-04 1999-11-29 株式会社日立製作所 パターン検査方法及びその装置
DE4214926A1 (de) * 1992-05-06 1993-11-11 Rheinmetall Jenoptik Optical M Anordnung zur geometriegetreu hochauflösenden Abtastung großer Bildformate
JPH0728226A (ja) * 1993-04-30 1995-01-31 Internatl Business Mach Corp <Ibm> 領域的イメージを測定する装置及び方法
USH1616H (en) * 1994-05-31 1996-12-03 Minnesota Mining And Manufacturing Company Web inspection system having enhanced video signal preprocessing
US5744381A (en) * 1995-03-13 1998-04-28 Kabushiki Kaisha Toshiba Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof
JPH09218163A (ja) * 1996-02-13 1997-08-19 Horiba Ltd 異物検査装置における信号処理方法
US5917932A (en) * 1997-06-24 1999-06-29 International Business Machines Corporation System and method for evaluating image placement on pre-distorted masks
DE19826923A1 (de) * 1997-12-18 1999-12-23 Josef Graf Vorrichtung zur Energieversorgung von tragbaren Elektrogeräten
DE19817714C5 (de) * 1998-04-21 2011-06-30 Vistec Semiconductor Systems GmbH, 35781 Verfahren zur Messung der Lage von Strukturen auf einer Maskenoberfläche
DE19825518C2 (de) * 1998-06-08 2001-10-04 Fresenius Ag Vorrichtung zur Messung von Parameteränderungen an lichtdurchlässigen Objekten
JP3283836B2 (ja) * 1998-08-31 2002-05-20 日本電気株式会社 レチクル外観検査装置の画像アライメント方法
JP3485052B2 (ja) 1999-12-16 2004-01-13 日本電気株式会社 参照画像作成方法、パターン検査装置及び参照画像作成プログラムを記録した記録媒体
JP2002310929A (ja) * 2001-04-13 2002-10-23 Mitsubishi Electric Corp 欠陥検査装置
US6894774B2 (en) * 2001-08-10 2005-05-17 Hoya Corporation Method of defect inspection of graytone mask and apparatus doing the same
JP3904419B2 (ja) * 2001-09-13 2007-04-11 株式会社日立製作所 検査装置および検査システム
JP3647416B2 (ja) * 2002-01-18 2005-05-11 Ｎｅｃエレクトロニクス株式会社 パターン検査装置及びその方法
US6735745B2 (en) * 2002-02-07 2004-05-11 Applied Materials, Inc. Method and system for detecting defects
JP3677254B2 (ja) 2002-03-27 2005-07-27 株式会社東芝 欠陥検査装置
US6850321B1 (en) * 2002-07-09 2005-02-01 Kla-Tencor Technologies Corporation Dual stage defect region identification and defect detection method and apparatus
US7221788B2 (en) * 2003-07-01 2007-05-22 Infineon Technologies Ag Method of inspecting a mask or reticle for detecting a defect, and mask or reticle inspection system
JP5525739B2 (ja) * 2008-09-16 2014-06-18 株式会社ニューフレアテクノロジー パターン検査装置及びパターン検査方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5192182A (de) * 1975-02-10 1976-08-12
JPS5232676A (en) * 1975-09-08 1977-03-12 Fujitsu Ltd Pattern check system
US4218142A (en) * 1978-03-08 1980-08-19 Aerodyne Research, Inc. Mask analysis
JPS5598842A (en) * 1978-09-28 1980-07-28 Toshiba Corp Position detection system
US4392120A (en) * 1978-10-30 1983-07-05 A. Aoki & Associates Pattern inspection system
SE449531B (sv) * 1980-12-11 1987-05-04 Gerhard Westerberg Forfarande och anordning for kontroll av mikromasker
EP0070017B1 (de) * 1981-07-14 1986-10-29 Hitachi, Ltd. Mustererkennungssystem
US4475037A (en) * 1982-05-11 1984-10-02 International Business Machines Corporation Method of inspecting a mask using an electron beam vector scan system

Also Published As

Publication number Publication date
JPS633450B2 (de) 1988-01-23
DD212619A5 (de) 1984-08-15
JPS5963725A (ja) 1984-04-11
EP0105661B1 (de) 1986-12-10
US4559603A (en) 1985-12-17
EP0105661A1 (de) 1984-04-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)