FR2549677B1 - Procede d'inspection de plaquettes de circuits electroniques - Google Patents

Procede d'inspection de plaquettes de circuits electroniques

Info

Publication number
FR2549677B1
FR2549677B1 FR8319596A FR8319596A FR2549677B1 FR 2549677 B1 FR2549677 B1 FR 2549677B1 FR 8319596 A FR8319596 A FR 8319596A FR 8319596 A FR8319596 A FR 8319596A FR 2549677 B1 FR2549677 B1 FR 2549677B1
Authority
FR
France
Prior art keywords
circuit board
electronic circuit
inspection process
board inspection
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8319596A
Other languages
English (en)
Other versions
FR2549677A1 (fr
Inventor
Robert F Benson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermo Electron Scientific Instruments LLC
Original Assignee
Nicolet Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nicolet Instrument Corp filed Critical Nicolet Instrument Corp
Publication of FR2549677A1 publication Critical patent/FR2549677A1/fr
Application granted granted Critical
Publication of FR2549677B1 publication Critical patent/FR2549677B1/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • H05K3/4611Manufacturing multilayer circuits by laminating two or more circuit boards
    • H05K3/4638Aligning and fixing the circuit boards before lamination; Detecting or measuring the misalignment after lamination; Aligning external circuit patterns or via connections relative to internal circuits
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • H05K1/0269Marks, test patterns or identification means for visual or optical inspection
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09781Dummy conductors, i.e. not used for normal transport of current; Dummy electrodes of components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09818Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
    • H05K2201/09918Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007Types of components
    • H05K2201/10204Dummy component, dummy PCB or template, e.g. for monitoring, controlling of processes, comparing, scanning
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0008Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
FR8319596A 1983-07-18 1983-12-07 Procede d'inspection de plaquettes de circuits electroniques Expired FR2549677B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/514,624 US4536239A (en) 1983-07-18 1983-07-18 Multi-layer circuit board inspection system

Publications (2)

Publication Number Publication Date
FR2549677A1 FR2549677A1 (fr) 1985-01-25
FR2549677B1 true FR2549677B1 (fr) 1988-11-25

Family

ID=24048011

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8319596A Expired FR2549677B1 (fr) 1983-07-18 1983-12-07 Procede d'inspection de plaquettes de circuits electroniques

Country Status (6)

Country Link
US (1) US4536239A (fr)
JP (1) JPS6022333A (fr)
CA (1) CA1198831A (fr)
DE (1) DE3342564A1 (fr)
FR (1) FR2549677B1 (fr)
GB (1) GB2143379B (fr)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4617160A (en) * 1984-11-23 1986-10-14 Irvine Sensors Corporation Method for fabricating modules comprising uniformly stacked, aligned circuit-carrying layers
JPS61125712A (ja) * 1984-11-26 1986-06-13 Matsushita Electric Works Ltd 多層印刷配線板の孔穿設法
US4809308A (en) * 1986-02-20 1989-02-28 Irt Corporation Method and apparatus for performing automated circuit board solder quality inspections
US4790694A (en) * 1986-10-09 1988-12-13 Loma Park Associates Method and system for multi-layer printed circuit board pre-drill processing
DE3640616A1 (de) * 1986-11-27 1988-06-09 Standard Elektrik Lorenz Ag Justiervorrichtung
US4899440A (en) * 1986-12-31 1990-02-13 Systems Analysis And Integration Method and apparatus for locating targets on a panel and performing work operations thereon
GB2212333A (en) * 1987-11-11 1989-07-19 Gen Electric Co Plc Method of fabricating multi-layer circuits
US4938600A (en) * 1989-02-09 1990-07-03 Interactive Video Systems, Inc. Method and apparatus for measuring registration between layers of a semiconductor wafer
US4940633A (en) * 1989-05-26 1990-07-10 Hermansen Ralph D Method of bonding metals with a radio-opaque adhesive/sealant for void detection and product made
JPH03123010A (ja) * 1989-10-05 1991-05-24 Murata Mfg Co Ltd 積層電子部品の製造方法
US5111406A (en) * 1990-01-05 1992-05-05 Nicolet Instrument Corporation Method for determining drill target locations in a multilayer board panel
US5010449A (en) * 1990-04-04 1991-04-23 Eastman Kodak Company Multi-layer printed circuit board and a method for assuring assembly in a selected order
US5206820A (en) * 1990-08-31 1993-04-27 At&T Bell Laboratories Metrology system for analyzing panel misregistration in a panel manufacturing process and providing appropriate information for adjusting panel manufacturing processes
US5048178A (en) * 1990-10-23 1991-09-17 International Business Machines Corp. Alignment--registration tool for fabricating multi-layer electronic packages
EP0698084B1 (fr) * 1993-05-14 1998-06-24 Minnesota Mining And Manufacturing Company Procede de quantification rapide de la croissance de microorganismes
GB2307352A (en) * 1995-11-16 1997-05-21 Marconi Gec Ltd Manufacture of multi-layer printed circuit boards
NO308630B1 (no) * 1996-09-19 2000-10-02 Norske Stats Oljeselskap System for inspeksjon av rørledninger
US5788802A (en) * 1996-10-22 1998-08-04 Preco Industries, Inc. Vacuum drum feed and alignment apparatus for multiple layer laminator
WO1998033366A1 (fr) 1997-01-29 1998-07-30 Kabushiki Kaisha Toshiba Procede et dispositif permettant de fabriquer un tableau de connexions multicouches et un tableau de connexions approprie
US7640836B1 (en) 1997-03-28 2010-01-05 Preco Industries, Inc. Method for simultaneous x, y and θ registration of segment of continuous web with a processing station
WO1998043788A1 (fr) * 1997-03-28 1998-10-08 Preco Industries, Inc. Appareil alimente en feuille ou bande et comprenant un mecanisme de positionnement grande vitesse
JP4322402B2 (ja) 2000-06-22 2009-09-02 大日本印刷株式会社 プリント配線基板及びその製造方法
US7433509B1 (en) * 2001-10-09 2008-10-07 Nanometrics Incorporated Method for automatic de-skewing of multiple layer wafer for improved pattern recognition
DE102004049439A1 (de) * 2004-10-08 2006-04-13 Feinfocus Gmbh Bohrvorrichtung zum Bohren von Kontaktierungsbohrungen zum Verbinden von Kontaktierungsflächen von Mehrschicht-Leiterplatten
AT12737U1 (de) * 2010-09-17 2012-10-15 Austria Tech & System Tech Verfahren zum herstellen einer aus mehreren leiterplattenbereichen bestehenden leiterplatte sowie leiterplatte
WO2011127867A2 (fr) * 2011-05-27 2011-10-20 华为技术有限公司 Carte à circuit imprimé multicouche et son procédé de fabrication
CN102998309B (zh) * 2011-09-09 2015-07-15 深南电路有限公司 一种多层印刷电路板对位检测方法
CN104582331B (zh) * 2014-12-31 2017-10-17 广州兴森快捷电路科技有限公司 多层线路板的内层偏位检测方法
CN107278020A (zh) * 2017-06-30 2017-10-20 上达电子(深圳)股份有限公司 电路板及对位治具
CN108260305A (zh) * 2018-01-11 2018-07-06 郑州云海信息技术有限公司 一种pcb板自动叠板棕化方法
CN110691475B (zh) * 2018-07-06 2021-01-08 深南电路股份有限公司 一种pcb板层偏检测反馈系统及其检测装置
CN108925066B (zh) * 2018-08-28 2020-01-31 深圳市景旺电子股份有限公司 一种多层板层间偏移检测方法及检测系统
CN112654141B (zh) * 2020-12-25 2022-10-11 天津普林电路股份有限公司 一种机械孔与内层图形对位的检查方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1046853A (en) * 1962-05-17 1966-10-26 Atomic Energy Authority Uk Improvements in or relating to the identification of circuit cards
GB1597841A (en) * 1977-01-19 1981-09-09 Nicolet Xrd Corp Electron beam focussing
US4193687A (en) * 1978-06-05 1980-03-18 Rockwell International Corporation High resolution alignment technique and apparatus
US4327292A (en) * 1980-05-13 1982-04-27 Hughes Aircraft Company Alignment process using serial detection of repetitively patterned alignment marks
DE3031103C2 (de) * 1980-08-16 1982-08-19 Bodenseewerk Gerätetechnik GmbH, 7770 Überlingen Verfahren zur Prüfung des Lageversatzes bei Mehrlagenleiterplatten
DE3045433A1 (de) * 1980-12-02 1982-07-01 Siemens AG, 1000 Berlin und 8000 München Mehrlagen-leiterplatte und verfahren zur ermittlung der ist-position innenliegender anschlussflaechen
US4343878A (en) * 1981-01-02 1982-08-10 Amdahl Corporation System for providing photomask alignment keys in semiconductor integrated circuit processing

Also Published As

Publication number Publication date
GB2143379A (en) 1985-02-06
US4536239A (en) 1985-08-20
GB2143379B (en) 1986-04-09
FR2549677A1 (fr) 1985-01-25
JPS6022333A (ja) 1985-02-04
CA1198831A (fr) 1985-12-31
DE3342564C2 (fr) 1988-12-29
DE3342564A1 (de) 1985-02-07
GB8402265D0 (en) 1984-02-29

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Legal Events

Date Code Title Description
ST Notification of lapse