DE3328172A1 - Elektronenstrahlkanone - Google Patents

Elektronenstrahlkanone

Info

Publication number
DE3328172A1
DE3328172A1 DE19833328172 DE3328172A DE3328172A1 DE 3328172 A1 DE3328172 A1 DE 3328172A1 DE 19833328172 DE19833328172 DE 19833328172 DE 3328172 A DE3328172 A DE 3328172A DE 3328172 A1 DE3328172 A1 DE 3328172A1
Authority
DE
Germany
Prior art keywords
guide tube
electron beam
flange
gun according
beam guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19833328172
Other languages
German (de)
English (en)
Inventor
Helmut Heinz 8031 Gilching Spruck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to DE19833328172 priority Critical patent/DE3328172A1/de
Priority to JP59124626A priority patent/JPS6044950A/ja
Priority to US06/624,987 priority patent/US4622453A/en
Priority to GB08417147A priority patent/GB2144904B/en
Priority to FR8412341A priority patent/FR2550379A1/fr
Publication of DE3328172A1 publication Critical patent/DE3328172A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19833328172 1983-08-04 1983-08-04 Elektronenstrahlkanone Withdrawn DE3328172A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19833328172 DE3328172A1 (de) 1983-08-04 1983-08-04 Elektronenstrahlkanone
JP59124626A JPS6044950A (ja) 1983-08-04 1984-06-19 電子銃
US06/624,987 US4622453A (en) 1983-08-04 1984-06-27 Electron beam gun mounting on a work chamber
GB08417147A GB2144904B (en) 1983-08-04 1984-07-05 Electron beam gun
FR8412341A FR2550379A1 (fr) 1983-08-04 1984-08-03 Canon a electrons destine a etre monte sur une chambre de travail notamment pour le traitement de pieces par vaporisation sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19833328172 DE3328172A1 (de) 1983-08-04 1983-08-04 Elektronenstrahlkanone

Publications (1)

Publication Number Publication Date
DE3328172A1 true DE3328172A1 (de) 1985-02-14

Family

ID=6205785

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833328172 Withdrawn DE3328172A1 (de) 1983-08-04 1983-08-04 Elektronenstrahlkanone

Country Status (5)

Country Link
US (1) US4622453A (enExample)
JP (1) JPS6044950A (enExample)
DE (1) DE3328172A1 (enExample)
FR (1) FR2550379A1 (enExample)
GB (1) GB2144904B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4032918A1 (de) * 1990-10-17 1992-04-23 Hell Rudolf Dr Ing Gmbh Verfahren und vorrichtung zur abschirmung eines elektronenstrahles
DE19537230C1 (de) * 1995-10-06 1997-01-30 Saechsische Elektronenstrahl G Elektronenkanone

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2518502C1 (ru) * 2012-10-09 2014-06-10 Открытое акционерное общество "Научно-исследовательский технологический институт "Прогресс" Электронно-лучевая пушка

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1955846C3 (de) * 1969-11-06 1973-10-31 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Elektronenkanone fur die Erhitzung von Materialien in einem Vakuumbehalter
DE1514782B2 (de) * 1965-12-14 1975-11-13 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Elektronenstrahl-Erzeugungssystem
DE2528032C2 (de) * 1975-06-24 1983-06-09 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2627580A (en) * 1948-10-23 1953-02-03 Rca Corp Demountable vacuumtight seal
NL294725A (enExample) * 1962-07-05
US3345529A (en) * 1966-08-29 1967-10-03 Ibm Electron beam column with demountable flux-generating assembly and beam-forming elements
US3846660A (en) * 1969-08-06 1974-11-05 Gen Electric Electron beam generating system with collimated focusing means
US3887784A (en) * 1971-12-27 1975-06-03 Commissariat Energie Atomique Welding guns
US3787696A (en) * 1972-03-15 1974-01-22 Etec Corp Scanning electron microscope electron-optical column construction
US3783230A (en) * 1972-08-10 1974-01-01 J Peyrot Gun for welding tubes on a tube plate
JPS5937540B2 (ja) * 1974-09-06 1984-09-10 株式会社日立製作所 電界放射形走査電子顕微鏡
US4084076A (en) * 1977-05-10 1978-04-11 Evgeny Ivanovich Istomin Electron beam welding gun

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1514782B2 (de) * 1965-12-14 1975-11-13 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Elektronenstrahl-Erzeugungssystem
DE1955846C3 (de) * 1969-11-06 1973-10-31 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Elektronenkanone fur die Erhitzung von Materialien in einem Vakuumbehalter
DE2528032C2 (de) * 1975-06-24 1983-06-09 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4032918A1 (de) * 1990-10-17 1992-04-23 Hell Rudolf Dr Ing Gmbh Verfahren und vorrichtung zur abschirmung eines elektronenstrahles
DE4032918C2 (de) * 1990-10-17 2000-06-29 Heidelberger Druckmasch Ag Vorrichtung zur Beaufschlagung eines Materials mit einem Elektronenstrahl
DE19537230C1 (de) * 1995-10-06 1997-01-30 Saechsische Elektronenstrahl G Elektronenkanone

Also Published As

Publication number Publication date
JPS6044950A (ja) 1985-03-11
GB8417147D0 (en) 1984-08-08
JPH0524613B2 (enExample) 1993-04-08
GB2144904B (en) 1986-12-03
FR2550379A1 (fr) 1985-02-08
US4622453A (en) 1986-11-11
GB2144904A (en) 1985-03-13

Similar Documents

Publication Publication Date Title
DE68926962T2 (de) Plasma elektronengewehr fur ionen aus einer entfernten quelle
DE69414421T2 (de) Plasmabeschleuniger mit geschlossener elektronenlaufbahn
DE1920300A1 (de) Vorrichtung zur Herbeifuehrung von Kernfusionen
DE882769C (de) Verfahren und Einrichtung zur Trennung geladener Teilchen von verschiedenem e/m-Verhaeltnis
DE1814802A1 (de) Vorrichtung zur Herbeifuehrung von Kernfusionen
EP0558797B1 (de) Vorrichtung zur Kathodenzerstäubung
DE1190112B (de) Vorrichtung zur Erzeugung eines Elektronenstrahlbuendels hoher Stromstaerke und Verfahren zum Erhitzen und Schmelzen mittels einer solchen Vorrichtung
DE1156515B (de) Vorrichtung zur Erzeugung negativer Ionen
DE69919675T2 (de) Vakuumbeschichtungsvorrichtung
CH621580A5 (enExample)
DE3333686C2 (enExample)
EP0492114A1 (de) Zerstäubungsanlage
DE19739527C2 (de) Vakuumbogen-Plasmaquelle mit Magnet-Partikelfilter
CH639798A5 (de) Roentgenroehre mit einer elektronenkanone.
DE2519537C2 (de) Elektronenstrahlgerät für Heiz-, Schmelz- und Verdampfungszwecke mit Ablenksystemen
DE2341503A1 (de) Elektronenstrahlroehre
DE3328172A1 (de) Elektronenstrahlkanone
EP0612097A1 (de) Vorrichtung zum Beschichten eines Substrats
DE3303677C2 (de) Plasmakanone
DE2528032C2 (de) Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke
DE2712829C3 (de) Ionenquelle
EP0608478A2 (de) Vorrichtung zur Kathodenzerstäubung
DE1240199B (de) Entladungsvorrichtung zum Erzeugen einer energiereichen Bogenentladung
DE2203853C3 (de) Bildwandler- oder Bildverstärkerdiodenrohre
DE1220940B (de) Ionenquelle

Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8127 New person/name/address of the applicant

Owner name: LEYBOLD AG, 6450 HANAU, DE

8110 Request for examination paragraph 44
8139 Disposal/non-payment of the annual fee