FR2550379A1 - Canon a electrons destine a etre monte sur une chambre de travail notamment pour le traitement de pieces par vaporisation sous vide - Google Patents
Canon a electrons destine a etre monte sur une chambre de travail notamment pour le traitement de pieces par vaporisation sous vide Download PDFInfo
- Publication number
- FR2550379A1 FR2550379A1 FR8412341A FR8412341A FR2550379A1 FR 2550379 A1 FR2550379 A1 FR 2550379A1 FR 8412341 A FR8412341 A FR 8412341A FR 8412341 A FR8412341 A FR 8412341A FR 2550379 A1 FR2550379 A1 FR 2550379A1
- Authority
- FR
- France
- Prior art keywords
- tube
- flange
- guide tube
- vacuum
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009834 vaporization Methods 0.000 title description 2
- 230000008016 vaporization Effects 0.000 title description 2
- 230000001133 acceleration Effects 0.000 abstract description 27
- 238000012423 maintenance Methods 0.000 abstract description 6
- 238000007789 sealing Methods 0.000 abstract description 5
- 230000006978 adaptation Effects 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 2
- 238000002955 isolation Methods 0.000 description 13
- 238000010894 electron beam technology Methods 0.000 description 10
- 238000010276 construction Methods 0.000 description 7
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 238000000429 assembly Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- CEMRYHAKTHXVLU-UHFFFAOYSA-N 1,1-bis[3-(4-fluorophenyl)propyl]-2-[3-(1h-imidazol-5-yl)propyl]guanidine;trihydrochloride Chemical compound Cl.Cl.Cl.C=1C=C(F)C=CC=1CCCN(CCCC=1C=CC(F)=CC=1)C(N)=NCCCC1=CN=CN1 CEMRYHAKTHXVLU-UHFFFAOYSA-N 0.000 description 1
- 206010012289 Dementia Diseases 0.000 description 1
- 101710162453 Replication factor A Proteins 0.000 description 1
- 102100035729 Replication protein A 70 kDa DNA-binding subunit Human genes 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000003517 fume Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- -1 insulating body 33 Chemical compound 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19833328172 DE3328172A1 (de) | 1983-08-04 | 1983-08-04 | Elektronenstrahlkanone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2550379A1 true FR2550379A1 (fr) | 1985-02-08 |
Family
ID=6205785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8412341A Pending FR2550379A1 (fr) | 1983-08-04 | 1984-08-03 | Canon a electrons destine a etre monte sur une chambre de travail notamment pour le traitement de pieces par vaporisation sous vide |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4622453A (enExample) |
| JP (1) | JPS6044950A (enExample) |
| DE (1) | DE3328172A1 (enExample) |
| FR (1) | FR2550379A1 (enExample) |
| GB (1) | GB2144904B (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4032918C2 (de) * | 1990-10-17 | 2000-06-29 | Heidelberger Druckmasch Ag | Vorrichtung zur Beaufschlagung eines Materials mit einem Elektronenstrahl |
| DE19537230C1 (de) * | 1995-10-06 | 1997-01-30 | Saechsische Elektronenstrahl G | Elektronenkanone |
| RU2518502C1 (ru) * | 2012-10-09 | 2014-06-10 | Открытое акционерное общество "Научно-исследовательский технологический институт "Прогресс" | Электронно-лучевая пушка |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2627580A (en) * | 1948-10-23 | 1953-02-03 | Rca Corp | Demountable vacuumtight seal |
| US3150256A (en) * | 1962-07-05 | 1964-09-22 | Philips Electronic Pharma | Column for electron microscopes |
| US3345529A (en) * | 1966-08-29 | 1967-10-03 | Ibm | Electron beam column with demountable flux-generating assembly and beam-forming elements |
| US3652821A (en) * | 1969-11-06 | 1972-03-28 | Leybold Heraeus Verwaltung | Electron gun for heating materials in an evacuated container |
| US3787696A (en) * | 1972-03-15 | 1974-01-22 | Etec Corp | Scanning electron microscope electron-optical column construction |
| US3846660A (en) * | 1969-08-06 | 1974-11-05 | Gen Electric | Electron beam generating system with collimated focusing means |
| US4020353A (en) * | 1974-09-06 | 1977-04-26 | Hitachi, Ltd. | Sample analysis apparatus using electron beam irradiation |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1163530A (en) * | 1965-12-14 | 1969-09-10 | Steigerwald Strahltech | Electron beam generating apparatus |
| US3887784A (en) * | 1971-12-27 | 1975-06-03 | Commissariat Energie Atomique | Welding guns |
| US3783230A (en) * | 1972-08-10 | 1974-01-01 | J Peyrot | Gun for welding tubes on a tube plate |
| DE2528032C2 (de) * | 1975-06-24 | 1983-06-09 | Leybold-Heraeus GmbH, 5000 Köln | Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke |
| US4084076A (en) * | 1977-05-10 | 1978-04-11 | Evgeny Ivanovich Istomin | Electron beam welding gun |
-
1983
- 1983-08-04 DE DE19833328172 patent/DE3328172A1/de not_active Withdrawn
-
1984
- 1984-06-19 JP JP59124626A patent/JPS6044950A/ja active Granted
- 1984-06-27 US US06/624,987 patent/US4622453A/en not_active Expired - Fee Related
- 1984-07-05 GB GB08417147A patent/GB2144904B/en not_active Expired
- 1984-08-03 FR FR8412341A patent/FR2550379A1/fr active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2627580A (en) * | 1948-10-23 | 1953-02-03 | Rca Corp | Demountable vacuumtight seal |
| US3150256A (en) * | 1962-07-05 | 1964-09-22 | Philips Electronic Pharma | Column for electron microscopes |
| US3345529A (en) * | 1966-08-29 | 1967-10-03 | Ibm | Electron beam column with demountable flux-generating assembly and beam-forming elements |
| US3846660A (en) * | 1969-08-06 | 1974-11-05 | Gen Electric | Electron beam generating system with collimated focusing means |
| US3652821A (en) * | 1969-11-06 | 1972-03-28 | Leybold Heraeus Verwaltung | Electron gun for heating materials in an evacuated container |
| US3787696A (en) * | 1972-03-15 | 1974-01-22 | Etec Corp | Scanning electron microscope electron-optical column construction |
| US4020353A (en) * | 1974-09-06 | 1977-04-26 | Hitachi, Ltd. | Sample analysis apparatus using electron beam irradiation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6044950A (ja) | 1985-03-11 |
| GB8417147D0 (en) | 1984-08-08 |
| JPH0524613B2 (enExample) | 1993-04-08 |
| GB2144904B (en) | 1986-12-03 |
| US4622453A (en) | 1986-11-11 |
| DE3328172A1 (de) | 1985-02-14 |
| GB2144904A (en) | 1985-03-13 |
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