JPH0524613B2 - - Google Patents

Info

Publication number
JPH0524613B2
JPH0524613B2 JP59124626A JP12462684A JPH0524613B2 JP H0524613 B2 JPH0524613 B2 JP H0524613B2 JP 59124626 A JP59124626 A JP 59124626A JP 12462684 A JP12462684 A JP 12462684A JP H0524613 B2 JPH0524613 B2 JP H0524613B2
Authority
JP
Japan
Prior art keywords
guide tube
beam guide
electron gun
flange
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59124626A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6044950A (ja
Inventor
Shupurutsuku Herumuuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of JPS6044950A publication Critical patent/JPS6044950A/ja
Publication of JPH0524613B2 publication Critical patent/JPH0524613B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59124626A 1983-08-04 1984-06-19 電子銃 Granted JPS6044950A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19833328172 DE3328172A1 (de) 1983-08-04 1983-08-04 Elektronenstrahlkanone
DE3328172.6 1983-08-04

Publications (2)

Publication Number Publication Date
JPS6044950A JPS6044950A (ja) 1985-03-11
JPH0524613B2 true JPH0524613B2 (enExample) 1993-04-08

Family

ID=6205785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59124626A Granted JPS6044950A (ja) 1983-08-04 1984-06-19 電子銃

Country Status (5)

Country Link
US (1) US4622453A (enExample)
JP (1) JPS6044950A (enExample)
DE (1) DE3328172A1 (enExample)
FR (1) FR2550379A1 (enExample)
GB (1) GB2144904B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4032918C2 (de) * 1990-10-17 2000-06-29 Heidelberger Druckmasch Ag Vorrichtung zur Beaufschlagung eines Materials mit einem Elektronenstrahl
DE19537230C1 (de) * 1995-10-06 1997-01-30 Saechsische Elektronenstrahl G Elektronenkanone
RU2518502C1 (ru) * 2012-10-09 2014-06-10 Открытое акционерное общество "Научно-исследовательский технологический институт "Прогресс" Электронно-лучевая пушка

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2627580A (en) * 1948-10-23 1953-02-03 Rca Corp Demountable vacuumtight seal
NL294725A (enExample) * 1962-07-05
GB1163530A (en) * 1965-12-14 1969-09-10 Steigerwald Strahltech Electron beam generating apparatus
US3345529A (en) * 1966-08-29 1967-10-03 Ibm Electron beam column with demountable flux-generating assembly and beam-forming elements
US3846660A (en) * 1969-08-06 1974-11-05 Gen Electric Electron beam generating system with collimated focusing means
DE1955846C3 (de) * 1969-11-06 1973-10-31 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Elektronenkanone fur die Erhitzung von Materialien in einem Vakuumbehalter
US3887784A (en) * 1971-12-27 1975-06-03 Commissariat Energie Atomique Welding guns
US3787696A (en) * 1972-03-15 1974-01-22 Etec Corp Scanning electron microscope electron-optical column construction
US3783230A (en) * 1972-08-10 1974-01-01 J Peyrot Gun for welding tubes on a tube plate
JPS5937540B2 (ja) * 1974-09-06 1984-09-10 株式会社日立製作所 電界放射形走査電子顕微鏡
DE2528032C2 (de) * 1975-06-24 1983-06-09 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke
US4084076A (en) * 1977-05-10 1978-04-11 Evgeny Ivanovich Istomin Electron beam welding gun

Also Published As

Publication number Publication date
JPS6044950A (ja) 1985-03-11
GB8417147D0 (en) 1984-08-08
GB2144904B (en) 1986-12-03
FR2550379A1 (fr) 1985-02-08
US4622453A (en) 1986-11-11
DE3328172A1 (de) 1985-02-14
GB2144904A (en) 1985-03-13

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