DE3150848C3 - Elektronenstrahlerzeugungssystem für hohe Helligkeit - Google Patents

Elektronenstrahlerzeugungssystem für hohe Helligkeit

Info

Publication number
DE3150848C3
DE3150848C3 DE3150848A DE3150848A DE3150848C3 DE 3150848 C3 DE3150848 C3 DE 3150848C3 DE 3150848 A DE3150848 A DE 3150848A DE 3150848 A DE3150848 A DE 3150848A DE 3150848 C3 DE3150848 C3 DE 3150848C3
Authority
DE
Germany
Prior art keywords
cathode
electron beam
conical
brightness
wehnelt electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3150848A
Other languages
German (de)
English (en)
Other versions
DE3150848A1 (de
DE3150848C2 (US20040232935A1-20041125-M00002.png
Inventor
Hirotoshi Hagiwara
Hideo Hiraoka
Masaji Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Publication of DE3150848A1 publication Critical patent/DE3150848A1/de
Publication of DE3150848C2 publication Critical patent/DE3150848C2/de
Application granted granted Critical
Publication of DE3150848C3 publication Critical patent/DE3150848C3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)
DE3150848A 1980-12-27 1981-12-22 Elektronenstrahlerzeugungssystem für hohe Helligkeit Expired - Fee Related DE3150848C3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18551880A JPS57128433A (en) 1980-12-27 1980-12-27 High luminance electron gun

Publications (3)

Publication Number Publication Date
DE3150848A1 DE3150848A1 (de) 1982-08-19
DE3150848C2 DE3150848C2 (US20040232935A1-20041125-M00002.png) 1987-03-05
DE3150848C3 true DE3150848C3 (de) 1994-12-22

Family

ID=16172185

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3150848A Expired - Fee Related DE3150848C3 (de) 1980-12-27 1981-12-22 Elektronenstrahlerzeugungssystem für hohe Helligkeit

Country Status (4)

Country Link
US (1) US4591754A (US20040232935A1-20041125-M00002.png)
JP (1) JPS57128433A (US20040232935A1-20041125-M00002.png)
DE (1) DE3150848C3 (US20040232935A1-20041125-M00002.png)
GB (1) GB2090698B (US20040232935A1-20041125-M00002.png)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4924136A (en) * 1987-09-28 1990-05-08 Siemens Aktiengesellschaft Beam generating system for electron beam measuring instruments having cathode support structure
EP0366851B1 (en) * 1988-11-01 1994-02-16 International Business Machines Corporation Low-voltage source for narrow electron/ion beams
US5633507A (en) * 1995-09-19 1997-05-27 International Business Machines Corporation Electron beam lithography system with low brightness
JP4052731B2 (ja) * 1998-06-18 2008-02-27 株式会社アドバンテスト 電子銃
US6252339B1 (en) 1998-09-17 2001-06-26 Nikon Corporation Removable bombardment filament-module for electron beam projection systems
JP2009146884A (ja) * 2007-11-22 2009-07-02 Mamoru Nakasuji 電子銃及び電子線装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58148B2 (ja) * 1972-08-22 1983-01-05 日本電子株式会社 デンシジユウ
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
JPS5277661A (en) * 1975-12-24 1977-06-30 Jeol Ltd Electron gun
US4054946A (en) * 1976-09-28 1977-10-18 Bell Telephone Laboratories, Incorporated Electron source of a single crystal of lanthanum hexaboride emitting surface of (110) crystal plane
JPS55131946A (en) * 1979-03-31 1980-10-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron gun

Also Published As

Publication number Publication date
US4591754A (en) 1986-05-27
DE3150848A1 (de) 1982-08-19
GB2090698B (en) 1984-08-30
JPS57128433A (en) 1982-08-10
DE3150848C2 (US20040232935A1-20041125-M00002.png) 1987-03-05
GB2090698A (en) 1982-07-14

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8125 Change of the main classification

Ipc: H01J 37/063

D2 Grant after examination
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8305 Restricted maintenance of patent after opposition
D4 Patent maintained restricted
8339 Ceased/non-payment of the annual fee