DE3125253C2 - Elektronenlinse mit drei Magnetpolstücken - Google Patents
Elektronenlinse mit drei MagnetpolstückenInfo
- Publication number
- DE3125253C2 DE3125253C2 DE19813125253 DE3125253A DE3125253C2 DE 3125253 C2 DE3125253 C2 DE 3125253C2 DE 19813125253 DE19813125253 DE 19813125253 DE 3125253 A DE3125253 A DE 3125253A DE 3125253 C2 DE3125253 C2 DE 3125253C2
- Authority
- DE
- Germany
- Prior art keywords
- magnetic pole
- pole piece
- distortion
- lens
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 49
- 230000005284 excitation Effects 0.000 claims abstract description 23
- 238000005065 mining Methods 0.000 claims 1
- 230000004075 alteration Effects 0.000 description 8
- 238000010894 electron beam technology Methods 0.000 description 7
- 230000001133 acceleration Effects 0.000 description 3
- 230000005294 ferromagnetic effect Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 241000226585 Antennaria plantaginifolia Species 0.000 description 1
- 230000037007 arousal Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001976 improved effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9711380A JPS5723454A (en) | 1980-07-16 | 1980-07-16 | Electron lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3125253A1 DE3125253A1 (de) | 1982-06-03 |
| DE3125253C2 true DE3125253C2 (de) | 1988-09-08 |
Family
ID=14183515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19813125253 Expired DE3125253C2 (de) | 1980-07-16 | 1981-06-26 | Elektronenlinse mit drei Magnetpolstücken |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5723454A (enrdf_load_stackoverflow) |
| DE (1) | DE3125253C2 (enrdf_load_stackoverflow) |
| GB (1) | GB2080610B (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5767272A (en) * | 1980-10-15 | 1982-04-23 | Jeol Ltd | Electron lens |
| US4450357A (en) * | 1981-10-13 | 1984-05-22 | Jeol Ltd. | Electron lens equipped with three magnetic pole pieces |
| GB2140196A (en) * | 1983-05-05 | 1984-11-21 | Cambridge Instr Ltd | Particle beam lenses |
| US11450505B2 (en) * | 2020-12-22 | 2022-09-20 | Fei Company | Magnetic field free sample plane for charged particle microscope |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE920861C (de) * | 1940-06-04 | 1954-12-02 | Aeg | Anordnung zur Ausuebung des Verfahrens zur Herstellung und Beobachtung eines UEbersichtsbildes geringer Vergroesserung in einem Elektronenmikroskop |
| CH312422A (de) * | 1953-04-30 | 1955-12-31 | Trueb Taeuber & Co Ag | Verzeichnungsarmes Linsensystem für Korpuskularstrahlapparate, insbesondere Elektronenmikroskope. |
| US3188465A (en) * | 1959-12-29 | 1965-06-08 | Kabushikikaisha Nihondenshi Ka | Two stage electron beam magnification device comprising plural adjustable magnetic lens system |
| JPS526073A (en) * | 1975-07-04 | 1977-01-18 | Hitachi Ltd | Magnetic field type electronic lens |
| JPS5945171B2 (ja) * | 1979-12-28 | 1984-11-05 | 日本電子株式会社 | 電子レンズ |
-
1980
- 1980-07-16 JP JP9711380A patent/JPS5723454A/ja active Granted
-
1981
- 1981-06-12 GB GB8118118A patent/GB2080610B/en not_active Expired
- 1981-06-26 DE DE19813125253 patent/DE3125253C2/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB2080610A (en) | 1982-02-03 |
| DE3125253A1 (de) | 1982-06-03 |
| JPS6245662B2 (enrdf_load_stackoverflow) | 1987-09-28 |
| JPS5723454A (en) | 1982-02-06 |
| GB2080610B (en) | 1984-07-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8128 | New person/name/address of the agent |
Representative=s name: LIEDL, G., DIPL.-PHYS. NOETH, H., DIPL.-PHYS., PAT |
|
| D2 | Grant after examination | ||
| 8363 | Opposition against the patent | ||
| 8366 | Restricted maintained after opposition proceedings | ||
| 8305 | Restricted maintenance of patent after opposition | ||
| D4 | Patent maintained restricted | ||
| 8339 | Ceased/non-payment of the annual fee |