JPS5767272A - Electron lens - Google Patents
Electron lensInfo
- Publication number
- JPS5767272A JPS5767272A JP14389080A JP14389080A JPS5767272A JP S5767272 A JPS5767272 A JP S5767272A JP 14389080 A JP14389080 A JP 14389080A JP 14389080 A JP14389080 A JP 14389080A JP S5767272 A JPS5767272 A JP S5767272A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- lens
- pole gap
- pole
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To reduce distortion aberration to zero and shorten a focal length by setting the electromotive force of the magnetic field in the lower magnetic pole gap of a three-magnetic-pole lens in which the polarity of the magnetic field occurring each magnetic pole gap is mutually inverted to higher values than that of the magnetic field occurring each magnetic pole gap.
CONSTITUTION: A three-magnetic-pole lens is formed by providing the first magnetic pole gap S1 between magnetic poles 1 and 2 and the second magnetic pole gap S2 between the magnetic poles 2 and 3. The three-magnetic-pole is formed into a projection lens 7 and combines with an intermediate lens 4. By applying current to excitation coils 5, 8, and 9, a magnification variable lens system is formed. Besides, when the electromotive of the magnetic field on the S1 side of an excitation coil 7 is made equal to that within S1 and S2 and fixed to the vicinity of the electromotive when the minimum focal length is obtained, the electromotive force of the S2 side is set to higher values than that on the S1 side. As a result, when distortion aberration and the S-shaped distortion aberration are reduced to zero by the current supplied to the coils 8 and 9, the focal length can remarkably be shortened.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14389080A JPS5767272A (en) | 1980-10-15 | 1980-10-15 | Electron lens |
DE19813139905 DE3139905C2 (en) | 1980-10-15 | 1981-10-07 | Method of operating an electron lens with three magnetic pole pieces |
GB8131187A GB2087138B (en) | 1980-10-15 | 1981-10-15 | Electron lens equipped with three magnetic pole pieces |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14389080A JPS5767272A (en) | 1980-10-15 | 1980-10-15 | Electron lens |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5767272A true JPS5767272A (en) | 1982-04-23 |
JPS6241376B2 JPS6241376B2 (en) | 1987-09-02 |
Family
ID=15349410
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14389080A Granted JPS5767272A (en) | 1980-10-15 | 1980-10-15 | Electron lens |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS5767272A (en) |
DE (1) | DE3139905C2 (en) |
GB (1) | GB2087138B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4585942A (en) * | 1983-03-17 | 1986-04-29 | Jeol Ltd. | Transmission electron microscope |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS526073A (en) * | 1975-07-04 | 1977-01-18 | Hitachi Ltd | Magnetic field type electronic lens |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5945171B2 (en) * | 1979-12-28 | 1984-11-05 | 日本電子株式会社 | electronic lens |
JPS5723454A (en) * | 1980-07-16 | 1982-02-06 | Jeol Ltd | Electron lens |
-
1980
- 1980-10-15 JP JP14389080A patent/JPS5767272A/en active Granted
-
1981
- 1981-10-07 DE DE19813139905 patent/DE3139905C2/en not_active Expired
- 1981-10-15 GB GB8131187A patent/GB2087138B/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS526073A (en) * | 1975-07-04 | 1977-01-18 | Hitachi Ltd | Magnetic field type electronic lens |
Also Published As
Publication number | Publication date |
---|---|
GB2087138A (en) | 1982-05-19 |
GB2087138B (en) | 1984-11-21 |
DE3139905A1 (en) | 1982-06-09 |
DE3139905C2 (en) | 1984-02-16 |
JPS6241376B2 (en) | 1987-09-02 |
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