JPS5767272A - Electron lens - Google Patents

Electron lens

Info

Publication number
JPS5767272A
JPS5767272A JP14389080A JP14389080A JPS5767272A JP S5767272 A JPS5767272 A JP S5767272A JP 14389080 A JP14389080 A JP 14389080A JP 14389080 A JP14389080 A JP 14389080A JP S5767272 A JPS5767272 A JP S5767272A
Authority
JP
Japan
Prior art keywords
magnetic
lens
pole gap
pole
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14389080A
Other languages
Japanese (ja)
Other versions
JPS6241376B2 (en
Inventor
Katsushige Tsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP14389080A priority Critical patent/JPS5767272A/en
Priority to DE19813139905 priority patent/DE3139905C2/en
Priority to GB8131187A priority patent/GB2087138B/en
Publication of JPS5767272A publication Critical patent/JPS5767272A/en
Publication of JPS6241376B2 publication Critical patent/JPS6241376B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To reduce distortion aberration to zero and shorten a focal length by setting the electromotive force of the magnetic field in the lower magnetic pole gap of a three-magnetic-pole lens in which the polarity of the magnetic field occurring each magnetic pole gap is mutually inverted to higher values than that of the magnetic field occurring each magnetic pole gap.
CONSTITUTION: A three-magnetic-pole lens is formed by providing the first magnetic pole gap S1 between magnetic poles 1 and 2 and the second magnetic pole gap S2 between the magnetic poles 2 and 3. The three-magnetic-pole is formed into a projection lens 7 and combines with an intermediate lens 4. By applying current to excitation coils 5, 8, and 9, a magnification variable lens system is formed. Besides, when the electromotive of the magnetic field on the S1 side of an excitation coil 7 is made equal to that within S1 and S2 and fixed to the vicinity of the electromotive when the minimum focal length is obtained, the electromotive force of the S2 side is set to higher values than that on the S1 side. As a result, when distortion aberration and the S-shaped distortion aberration are reduced to zero by the current supplied to the coils 8 and 9, the focal length can remarkably be shortened.
COPYRIGHT: (C)1982,JPO&Japio
JP14389080A 1980-10-15 1980-10-15 Electron lens Granted JPS5767272A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP14389080A JPS5767272A (en) 1980-10-15 1980-10-15 Electron lens
DE19813139905 DE3139905C2 (en) 1980-10-15 1981-10-07 Method of operating an electron lens with three magnetic pole pieces
GB8131187A GB2087138B (en) 1980-10-15 1981-10-15 Electron lens equipped with three magnetic pole pieces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14389080A JPS5767272A (en) 1980-10-15 1980-10-15 Electron lens

Publications (2)

Publication Number Publication Date
JPS5767272A true JPS5767272A (en) 1982-04-23
JPS6241376B2 JPS6241376B2 (en) 1987-09-02

Family

ID=15349410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14389080A Granted JPS5767272A (en) 1980-10-15 1980-10-15 Electron lens

Country Status (3)

Country Link
JP (1) JPS5767272A (en)
DE (1) DE3139905C2 (en)
GB (1) GB2087138B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585942A (en) * 1983-03-17 1986-04-29 Jeol Ltd. Transmission electron microscope

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS526073A (en) * 1975-07-04 1977-01-18 Hitachi Ltd Magnetic field type electronic lens

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945171B2 (en) * 1979-12-28 1984-11-05 日本電子株式会社 electronic lens
JPS5723454A (en) * 1980-07-16 1982-02-06 Jeol Ltd Electron lens

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS526073A (en) * 1975-07-04 1977-01-18 Hitachi Ltd Magnetic field type electronic lens

Also Published As

Publication number Publication date
JPS6241376B2 (en) 1987-09-02
DE3139905A1 (en) 1982-06-09
GB2087138B (en) 1984-11-21
DE3139905C2 (en) 1984-02-16
GB2087138A (en) 1982-05-19

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