JPS5613648A - Electron lens - Google Patents

Electron lens

Info

Publication number
JPS5613648A
JPS5613648A JP8912479A JP8912479A JPS5613648A JP S5613648 A JPS5613648 A JP S5613648A JP 8912479 A JP8912479 A JP 8912479A JP 8912479 A JP8912479 A JP 8912479A JP S5613648 A JPS5613648 A JP S5613648A
Authority
JP
Japan
Prior art keywords
magnetic pole
aperture
magnetic
magnetic field
shaped distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8912479A
Other languages
Japanese (ja)
Other versions
JPS6010419B2 (en
Inventor
Katsushige Tsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP8912479A priority Critical patent/JPS6010419B2/en
Publication of JPS5613648A publication Critical patent/JPS5613648A/en
Publication of JPS6010419B2 publication Critical patent/JPS6010419B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Abstract

PURPOSE:To eliminate S-shaped distortion by raising the intensity of magnetic field inside the second aperture above that inside the first aperture. CONSTITUTION:The yoke 1 is connected magnetically with the first magnetic pole 2, the second magnetic pole 3, and the third magnetic pole 4. Each of the magnetic poles is facing each other at a definite interval S, and a vertically symmetric magnetic pole 3. The excited coils 5 and 6 supply current so as to enable an anti-polar magnetic field to obtain in the magnetic pole apertures g1 and g2. By more greatly increasing the contribution of the magnetic field in the second aperture g2 than the distribution of the first aperture g1, the coefficient of S-shaped distortion can be made zero or almost zero.
JP8912479A 1979-07-13 1979-07-13 electronic lens Expired JPS6010419B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8912479A JPS6010419B2 (en) 1979-07-13 1979-07-13 electronic lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8912479A JPS6010419B2 (en) 1979-07-13 1979-07-13 electronic lens

Publications (2)

Publication Number Publication Date
JPS5613648A true JPS5613648A (en) 1981-02-10
JPS6010419B2 JPS6010419B2 (en) 1985-03-16

Family

ID=13962129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8912479A Expired JPS6010419B2 (en) 1979-07-13 1979-07-13 electronic lens

Country Status (1)

Country Link
JP (1) JPS6010419B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585942A (en) * 1983-03-17 1986-04-29 Jeol Ltd. Transmission electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585942A (en) * 1983-03-17 1986-04-29 Jeol Ltd. Transmission electron microscope

Also Published As

Publication number Publication date
JPS6010419B2 (en) 1985-03-16

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