JPS55121257A - Electron lens - Google Patents

Electron lens

Info

Publication number
JPS55121257A
JPS55121257A JP2890479A JP2890479A JPS55121257A JP S55121257 A JPS55121257 A JP S55121257A JP 2890479 A JP2890479 A JP 2890479A JP 2890479 A JP2890479 A JP 2890479A JP S55121257 A JPS55121257 A JP S55121257A
Authority
JP
Japan
Prior art keywords
magnetic pole
pole
intermediate magnetic
electron lens
clearance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2890479A
Other languages
Japanese (ja)
Other versions
JPS5851661B2 (en
Inventor
Katsushige Tsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP2890479A priority Critical patent/JPS5851661B2/en
Publication of JPS55121257A publication Critical patent/JPS55121257A/en
Publication of JPS5851661B2 publication Critical patent/JPS5851661B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To enable an S-letter distortion of an electron lens to be extremely lessened, by determining a clearance between magnetic poles and a thickness of an intermediate magnetic pole to be in a specific relation. CONSTITUTION:The double cap lens is constituted by a yoke 1, top magnetic pole 2a, bottom magnetic pole 2b, intermediate magnetic pole 3 and excitation coils 4a, 4b. Reversely directional currents are fed to the excitation coils 4a and 4b causing the magnetic poles 2a and 2b to be energized, for instance, as an N-pole and the intermediate magnetic pole 3 as an S-pole. A thickness (t) of the intermediate magnetic pole 3 and a clearance S between the intermediate magnetic pole and those of the other magnetic poles are selected in such a relation that a value of t<2>/S comes to be almost less than seven.
JP2890479A 1979-03-13 1979-03-13 electronic lens Expired JPS5851661B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2890479A JPS5851661B2 (en) 1979-03-13 1979-03-13 electronic lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2890479A JPS5851661B2 (en) 1979-03-13 1979-03-13 electronic lens

Publications (2)

Publication Number Publication Date
JPS55121257A true JPS55121257A (en) 1980-09-18
JPS5851661B2 JPS5851661B2 (en) 1983-11-17

Family

ID=12261389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2890479A Expired JPS5851661B2 (en) 1979-03-13 1979-03-13 electronic lens

Country Status (1)

Country Link
JP (1) JPS5851661B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4384208A (en) * 1979-12-28 1983-05-17 Jeol Ltd. Electron lens equipped with three magnetic pole pieces

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019058634A1 (en) 2017-09-25 2019-03-28 オリンパス株式会社 Optical module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4384208A (en) * 1979-12-28 1983-05-17 Jeol Ltd. Electron lens equipped with three magnetic pole pieces

Also Published As

Publication number Publication date
JPS5851661B2 (en) 1983-11-17

Similar Documents

Publication Publication Date Title
ES470151A1 (en) Electron microscope (comprising an auxiliary lens)
GB1464039A (en) Electron bearm gun system
JPS53147219A (en) Brushless direct current linear motor
JPS5473217A (en) Movable coil type arc motor
GB1178079A (en) Improvements in or relating to Electromagnetic Separators
JPS55121257A (en) Electron lens
GB2022359A (en) Geophone with shaped magnetic field
JPS5456462A (en) Optical isolator
JPS5526511A (en) Movable mirror mechanism
JPS5668100A (en) Moving coil type cartridge
JPS6455023A (en) Rotary machine
JPS5574347A (en) Electrical rotary machine
JPS55161342A (en) Permanent magnet electromagnetic lens
JPS5240027A (en) High-speed printing equipment
JPS5346615A (en) Dc linear motor
JPS5767272A (en) Electron lens
JPS5517934A (en) Magnetron
JPS5228220A (en) Deflection yoke
JPS5249406A (en) Voice coil motor
JPS55166850A (en) Focus magnet
JPS55144638A (en) Objective lens for scanning electron microscopes
JPS5596607A (en) Method of magnetizing rolled magnet
JPS55137652A (en) Magnetic lens for electron microscope
JPS561758A (en) Stator for small-sized motor
JPS51132411A (en) Linear motor of voice coil type