JPS5780646A - Electron lens - Google Patents

Electron lens

Info

Publication number
JPS5780646A
JPS5780646A JP15631480A JP15631480A JPS5780646A JP S5780646 A JPS5780646 A JP S5780646A JP 15631480 A JP15631480 A JP 15631480A JP 15631480 A JP15631480 A JP 15631480A JP S5780646 A JPS5780646 A JP S5780646A
Authority
JP
Japan
Prior art keywords
field generated
magnetic field
solenoid coil
range
electron lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15631480A
Other languages
Japanese (ja)
Other versions
JPS6326503B2 (en
Inventor
Seiichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15631480A priority Critical patent/JPS5780646A/en
Publication of JPS5780646A publication Critical patent/JPS5780646A/en
Publication of JPS6326503B2 publication Critical patent/JPS6326503B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Abstract

PURPOSE:To extend the variable range of the focal length of an electron lens with a small number of Ampere-turn, by according the effective range of magnetic field generated by a solenoid coil with the effective range of the magnetic field generated by an electron lens. CONSTITUTION:A solenoid coil is provided between an upper magnetic piece 1 and an lower magnetic piece 2. The length of the solenoid coil 3 is determined so that the half range in the magnetic field generated by the solenoid coil 3 may approximately accord with the half range in the magnetic field generated by the lens. By doing this, the focus variable range can be extended.
JP15631480A 1980-11-06 1980-11-06 Electron lens Granted JPS5780646A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15631480A JPS5780646A (en) 1980-11-06 1980-11-06 Electron lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15631480A JPS5780646A (en) 1980-11-06 1980-11-06 Electron lens

Publications (2)

Publication Number Publication Date
JPS5780646A true JPS5780646A (en) 1982-05-20
JPS6326503B2 JPS6326503B2 (en) 1988-05-30

Family

ID=15625084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15631480A Granted JPS5780646A (en) 1980-11-06 1980-11-06 Electron lens

Country Status (1)

Country Link
JP (1) JPS5780646A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5476058A (en) * 1977-11-25 1979-06-18 Hell Rudolf Dr Ing Gmbh Optoelectronic lens unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5476058A (en) * 1977-11-25 1979-06-18 Hell Rudolf Dr Ing Gmbh Optoelectronic lens unit

Also Published As

Publication number Publication date
JPS6326503B2 (en) 1988-05-30

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