GB2080610B - Electron lens equipped with three magnetic pole pieces - Google Patents
Electron lens equipped with three magnetic pole piecesInfo
- Publication number
- GB2080610B GB2080610B GB8118118A GB8118118A GB2080610B GB 2080610 B GB2080610 B GB 2080610B GB 8118118 A GB8118118 A GB 8118118A GB 8118118 A GB8118118 A GB 8118118A GB 2080610 B GB2080610 B GB 2080610B
- Authority
- GB
- United Kingdom
- Prior art keywords
- magnetic pole
- pole pieces
- electron lens
- lens equipped
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9711380A JPS5723454A (en) | 1980-07-16 | 1980-07-16 | Electron lens |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2080610A GB2080610A (en) | 1982-02-03 |
GB2080610B true GB2080610B (en) | 1984-07-04 |
Family
ID=14183515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB8118118A Expired GB2080610B (en) | 1980-07-16 | 1981-06-12 | Electron lens equipped with three magnetic pole pieces |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS5723454A (en) |
DE (1) | DE3125253C2 (en) |
GB (1) | GB2080610B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5767272A (en) * | 1980-10-15 | 1982-04-23 | Jeol Ltd | Electron lens |
US4450357A (en) * | 1981-10-13 | 1984-05-22 | Jeol Ltd. | Electron lens equipped with three magnetic pole pieces |
GB2140196A (en) * | 1983-05-05 | 1984-11-21 | Cambridge Instr Ltd | Particle beam lenses |
US11450505B2 (en) * | 2020-12-22 | 2022-09-20 | Fei Company | Magnetic field free sample plane for charged particle microscope |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE920861C (en) * | 1940-06-04 | 1954-12-02 | Aeg | Arrangement for practicing the method for producing and observing an overview image with a small magnification in an electron microscope |
CH312422A (en) * | 1953-04-30 | 1955-12-31 | Trueb Taeuber & Co Ag | Low-distortion lens system for particle beam apparatus, in particular electron microscopes. |
US3188465A (en) * | 1959-12-29 | 1965-06-08 | Kabushikikaisha Nihondenshi Ka | Two stage electron beam magnification device comprising plural adjustable magnetic lens system |
JPS526073A (en) * | 1975-07-04 | 1977-01-18 | Hitachi Ltd | Magnetic field type electronic lens |
JPS5945171B2 (en) * | 1979-12-28 | 1984-11-05 | 日本電子株式会社 | electronic lens |
-
1980
- 1980-07-16 JP JP9711380A patent/JPS5723454A/en active Granted
-
1981
- 1981-06-12 GB GB8118118A patent/GB2080610B/en not_active Expired
- 1981-06-26 DE DE19813125253 patent/DE3125253C2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5723454A (en) | 1982-02-06 |
DE3125253C2 (en) | 1988-09-08 |
JPS6245662B2 (en) | 1987-09-28 |
DE3125253A1 (en) | 1982-06-03 |
GB2080610A (en) | 1982-02-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |