CH312422A - Low-distortion lens system for particle beam apparatus, in particular electron microscopes. - Google Patents

Low-distortion lens system for particle beam apparatus, in particular electron microscopes.

Info

Publication number
CH312422A
CH312422A CH312422DA CH312422A CH 312422 A CH312422 A CH 312422A CH 312422D A CH312422D A CH 312422DA CH 312422 A CH312422 A CH 312422A
Authority
CH
Switzerland
Prior art keywords
low
lens system
particle beam
beam apparatus
electron microscopes
Prior art date
Application number
Other languages
German (de)
Inventor
Ag Trueb Taeuber Co
Original Assignee
Trueb Taeuber & Co Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trueb Taeuber & Co Ag filed Critical Trueb Taeuber & Co Ag
Publication of CH312422A publication Critical patent/CH312422A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
CH312422D 1953-04-30 1953-04-30 Low-distortion lens system for particle beam apparatus, in particular electron microscopes. CH312422A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1105876X 1953-04-30

Publications (1)

Publication Number Publication Date
CH312422A true CH312422A (en) 1955-12-31

Family

ID=7723145

Family Applications (1)

Application Number Title Priority Date Filing Date
CH312422D CH312422A (en) 1953-04-30 1953-04-30 Low-distortion lens system for particle beam apparatus, in particular electron microscopes.

Country Status (3)

Country Link
CH (1) CH312422A (en)
DE (1) DE939396C (en)
FR (1) FR1105876A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5945171B2 (en) * 1979-12-28 1984-11-05 日本電子株式会社 electronic lens
JPS5723454A (en) * 1980-07-16 1982-02-06 Jeol Ltd Electron lens
US4345152A (en) * 1980-08-11 1982-08-17 The Perkin-Elmer Corporation Magnetic lens

Also Published As

Publication number Publication date
DE939396C (en) 1956-02-23
FR1105876A (en) 1955-12-08

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