GB2080610B - Electron lens equipped with three magnetic pole pieces - Google Patents

Electron lens equipped with three magnetic pole pieces

Info

Publication number
GB2080610B
GB2080610B GB8118118A GB8118118A GB2080610B GB 2080610 B GB2080610 B GB 2080610B GB 8118118 A GB8118118 A GB 8118118A GB 8118118 A GB8118118 A GB 8118118A GB 2080610 B GB2080610 B GB 2080610B
Authority
GB
United Kingdom
Prior art keywords
magnetic pole
pole pieces
electron lens
lens equipped
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8118118A
Other languages
English (en)
Other versions
GB2080610A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB2080610A publication Critical patent/GB2080610A/en
Application granted granted Critical
Publication of GB2080610B publication Critical patent/GB2080610B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
GB8118118A 1980-07-16 1981-06-12 Electron lens equipped with three magnetic pole pieces Expired GB2080610B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9711380A JPS5723454A (en) 1980-07-16 1980-07-16 Electron lens

Publications (2)

Publication Number Publication Date
GB2080610A GB2080610A (en) 1982-02-03
GB2080610B true GB2080610B (en) 1984-07-04

Family

ID=14183515

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8118118A Expired GB2080610B (en) 1980-07-16 1981-06-12 Electron lens equipped with three magnetic pole pieces

Country Status (3)

Country Link
JP (1) JPS5723454A (enrdf_load_stackoverflow)
DE (1) DE3125253C2 (enrdf_load_stackoverflow)
GB (1) GB2080610B (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5767272A (en) * 1980-10-15 1982-04-23 Jeol Ltd Electron lens
US4450357A (en) * 1981-10-13 1984-05-22 Jeol Ltd. Electron lens equipped with three magnetic pole pieces
GB2140196A (en) * 1983-05-05 1984-11-21 Cambridge Instr Ltd Particle beam lenses
US11450505B2 (en) * 2020-12-22 2022-09-20 Fei Company Magnetic field free sample plane for charged particle microscope

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE920861C (de) * 1940-06-04 1954-12-02 Aeg Anordnung zur Ausuebung des Verfahrens zur Herstellung und Beobachtung eines UEbersichtsbildes geringer Vergroesserung in einem Elektronenmikroskop
CH312422A (de) * 1953-04-30 1955-12-31 Trueb Taeuber & Co Ag Verzeichnungsarmes Linsensystem für Korpuskularstrahlapparate, insbesondere Elektronenmikroskope.
US3188465A (en) * 1959-12-29 1965-06-08 Kabushikikaisha Nihondenshi Ka Two stage electron beam magnification device comprising plural adjustable magnetic lens system
JPS526073A (en) * 1975-07-04 1977-01-18 Hitachi Ltd Magnetic field type electronic lens
JPS5945171B2 (ja) * 1979-12-28 1984-11-05 日本電子株式会社 電子レンズ

Also Published As

Publication number Publication date
DE3125253C2 (de) 1988-09-08
JPS6245662B2 (enrdf_load_stackoverflow) 1987-09-28
DE3125253A1 (de) 1982-06-03
GB2080610A (en) 1982-02-03
JPS5723454A (en) 1982-02-06

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee